DE3016361C2 - Einrichtung zur optischen Abstandsmessung von Oberflächen - Google Patents

Einrichtung zur optischen Abstandsmessung von Oberflächen

Info

Publication number
DE3016361C2
DE3016361C2 DE3016361A DE3016361A DE3016361C2 DE 3016361 C2 DE3016361 C2 DE 3016361C2 DE 3016361 A DE3016361 A DE 3016361A DE 3016361 A DE3016361 A DE 3016361A DE 3016361 C2 DE3016361 C2 DE 3016361C2
Authority
DE
Germany
Prior art keywords
receiving device
light
opto
light spot
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3016361A
Other languages
English (en)
Other versions
DE3016361A1 (de
Inventor
Omer L. Hageniers
Bernard Hockley
Nick Liptay-Wagner
W.J. Windsor Ontario Pastorius
Timothy R. Pryor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensor Adaptive Machines Inc
Original Assignee
Diffracto Ltd Canada
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21875397&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3016361(C2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Diffracto Ltd Canada filed Critical Diffracto Ltd Canada
Publication of DE3016361A1 publication Critical patent/DE3016361A1/de
Application granted granted Critical
Publication of DE3016361C2 publication Critical patent/DE3016361C2/de
Priority to DE20321608U priority Critical patent/DE20321608U1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2416—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of gears
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/87—Combinations of systems using electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4813—Housing arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems

Description

Die Erfindung betrifft ei.ie Einrichtung zur optischen Abstandsmessung von Oberfläche, der im Oberbegriff des Patentanspruchs genannten Art
Durch die DE-OS 25 13 389 ist eine Einrichtung der betreffenden Art bekannt, bei der die opto-elektronische Empfangseinrichtung senkrecht zur Achse der abbildenden Strahlen angeordnet ist. Bei Abstandsänderungen der gemessenen Oberfläche ändert sich nicht nur in der gewünschten Weise der Ort des auf der opto-elektronischen Empfangseinrichtung abgebildeten Lichtflecks, sondern auch gleichzeitig dessen Größe. Je nach der Größe des gemessenen Abstandes muß also die Auswerteschaltung die Lage des Lichtflecks auf der opto-elektronischen Empfangseinrichtung aus unterschiedlich großen Signalbreiten ermitteln, was zu Schwierigkeiten bei der Auswertung und darüber hinaus zu unterschiedlicher Genauigkeit führt
Der Erfindung liegt die Aufgabe zugrunde, eine Einrichtung zur opto-elektronischen Abstandsmessung von Oberflächen der betreffenden Art zu schaffen, bei der die Breite des auf der opto-elektronischen Empfangseinrichtung abgebildeten Lichtflecks im wesentlichen konstant und dadurch die Auswerteeinrichtung vereinfacht und die Genauigkeit erhöht ist
Diese Aufgabe wird durch die im Kennzeichen des Patentanspruchs angegebene Lehre gelöst
Durch die Neigung der lichtempfindlichen Ebene der opto-elektronischen Empfangseinrichtung ändert sich bei Änderung des Ortes des Lichtflecks auf der lichtempfindlichen Ebene der opto-elektronischen Empfangseinrichtung auch der Abstand der Abbildung von der Abbildungsoptik und damit auch die Vergrößerung. Erfindungsgemäß hat die Neigung der opto-elektronischen Empfangseinrichtung einen solchen Sinn, daß die durch die Änderung des Abstandes von der gemessenen Oberflache bedingte Vergrößerungsanderung durch die durch die Neigung hervorgerufene Vergrößerungsänderung wieder aufgehoben wird, so daß der Lichtfleck unabhängig von dem gemessenen Abstand auf der lichtempfindlichen Ebene der opto-elektronischen Empfangseinrichtung innerhalb eines durch die Neigung bestimmten Unschärfebereichs im wesentlichen gleiche Größe aufweist
Anhand der Zeichnung soll die Erfindung an einem Ausführungsbeispiel näher erläutert werden.
Die Einrichtung zur optischen Abstandsmessung weist einen Laser 1 auf, dessen Licht über eine Pockel-Zelle 2 geregelt and mittels einer Fokussiereinrichtung 3 mit einer Fokussierlinse auf der zu messenden Oberfläche eines Gegenstandes 4 fokussiert wird. Auf der Oberfläche des Gegenstandes 4 entsteht so ein Lichtfleck 2/4, der zwar auch durch irgendeine andere passende Beleuchtungseinrichtung erzeugt werden kann, der jedoch wegen der Verwendung eines Lasers in erwünschter Weise besonders klein ist und der mittels einer Abbüdungsoptik 5 und einem Spiegel 6, der zu einer Verkleinerung der gesamten Einrichtung dient auf eine opto-elektronische Empfangseinrichtung 7 abgebildet wird. Die opto-elektronische Empfangseinrichtung 7 besteht aus einem linearen Fotodiodenfeld und ist zur Achse der abbildenden Strahlen von dem Spiegel 6 her geneigt
Der zu messende Gegenstand 4 befindet sich auf einem Drehtisch, der bei der Messung gedreht wird.
Während der Drehung ändert sich der Abstand der Oberfläche des zu messenden Gegenstandes 4 von der Meßeinrichtung, und entsprechend wandert der auf der Empfangseinrichtung 7 abgebildete Lichtfleck auf dieser seitlich aus. Die Ablenkung ist ein Maß für den Abstand der Oberfläche des Gegenstandes 4 von der Meßeinrichtung. Auf diese Weise kann die Kontur des Gegenstandes 4 bei Drehung des Drehtisches abgetastet und durch die opto-elektroniscr.e Empfangseinrichtung 7 in entsprechende Signale umgewandelt werden, die dann z. B. mit den von einem auf dem Drehtisch plazierten Meistergegenstand abgeleiteten Signalen verglichen werden können.
Bei einer Änderung des Abstandes der Oberfläche des Gegenstandes 4 von der Meßeinrichtung ändert sich auch die Größe des auf der Oberfläche des Gegenstandes 4 durch die Fokussiereinrichtung 3 erzeugten Lichtflecks 2A. Wegen der seitlichen Auswanderung des auf der opto-elektronischen Empfangseinrichtung 7 abgebildeten Lichtflecks bei Abstandsänderungen ändert sich wegen der Neigung der Empfangseinrichtung 7 auch der Abstand des auf dieser abgebildeten Lichtflecks von der Abbildungsoptik 5 und damit auch die Größe des abgebildeten Lichtflecks. Diese Änderung der Größe des abgebildeten Lichtflecks erfolgt aufgrund der entsprechenden Neigung der Empfangseinrichtung 7 derart, daß die Größe des Lichtflecks an allen Orten auf der Empfangseinrichtung 7 im wesentlichen konstant ist. Wegen der Abhängigkeit der Orte von dem gemessenen Abstand der Oberfläche des Gegenstandes 4 ist damit die Größe des auf der Empfangseinrichtung 7 abgebildeten Lichtflecks auch unabhängig von dem gemessenen Abstand. Durch die Schrägstellung der opto-elektronischen Empfangseinrichtung entsteht auch in erwünschter Weise eine allgemeine Vergrößerung der Abbildung, so daß zu dem Vorteil der Konstanz der Abbildung auch der einer Vergrößerung hinzukommt.
Hierzu 1 Blatt Zeichnungen

Claims (1)

  1. Patentanspruch:
    Einrichtung zur optischen Abstandsmessung von Oberflächen zu einem Bezugspunkt an der Einrichtung, mit einem Laser, mit einer Fokussiereinrichtung zur Fokussierung des von dem Laser ausgesandten Lichts auf die zu bestimmende Oberfläche und mit einer Abbildungsoptik zur Abbildung des von dem fokussierten Licht auf der Oberfläche erzeugten Lichtflecks auf eine opto-elektronische Empfangseinrichtung, an die eine elektronische Auswerteeinrichtung zur Erzeugung eines von dem Ort des LJchtflecks auf der opto-elektronischen Empfangseinrichtung abhängigen elektrischen Abstandssignals angeschlossen ist, dadurch gekennzeichnet, daß die lichtempfindliche Ebene der opto-elektronischen Empfangseinrichtucg (7) zur Achse der Abbildungsoptik (5) so geneigt ist, daß der Abstarb des auf die lichtempfindliche Ebene der opto-elektronischen Empfangseinrichtung abgebildeten LJchtflecks von der Abbildungsoptik umso kleiner ist, je größer die Objektweite ist und umgekehrt, und daß der Lichtfleck unabhängig vom gemessenen Abstand auf der lichtempfindlichen Ebene der Empfangseinrichtung (7) innerhalb eines durch die Neigung bestimmten Unschärfebereichs im wesentlichen gleiche Größe aufweist.
DE3016361A 1979-04-30 1980-04-28 Einrichtung zur optischen Abstandsmessung von Oberflächen Expired DE3016361C2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE20321608U DE20321608U1 (de) 1980-04-28 2003-07-18 Regulierventil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/034,278 US4373804A (en) 1979-04-30 1979-04-30 Method and apparatus for electro-optically determining the dimension, location and attitude of objects

Publications (2)

Publication Number Publication Date
DE3016361A1 DE3016361A1 (de) 1981-04-02
DE3016361C2 true DE3016361C2 (de) 1983-12-22

Family

ID=21875397

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3016361A Expired DE3016361C2 (de) 1979-04-30 1980-04-28 Einrichtung zur optischen Abstandsmessung von Oberflächen

Country Status (4)

Country Link
US (23) US4373804A (de)
JP (2) JPS5616802A (de)
DE (1) DE3016361C2 (de)
GB (1) GB2051514B (de)

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US5670787A (en) 1997-09-23
US5734172A (en) 1998-03-31
US5866915A (en) 1999-02-02
US5981965A (en) 1999-11-09
US5773840A (en) 1998-06-30
US5767525A (en) 1998-06-16
US5811825A (en) 1998-09-22
US5362970A (en) 1994-11-08
US4373804A (en) 1983-02-15
US5693953A (en) 1997-12-02
GB2051514A (en) 1981-01-14
US5691545A (en) 1997-11-25
US5854491A (en) 1998-12-29
US5866916A (en) 1999-02-02
US5684292A (en) 1997-11-04
US5811827A (en) 1998-09-22
US5510625A (en) 1996-04-23
US5880459A (en) 1999-03-09
JPS5616802A (en) 1981-02-18
US5677541A (en) 1997-10-14
GB2051514B (en) 1984-02-01
US6211506B1 (en) 2001-04-03
JPS61240104A (ja) 1986-10-25
US6127689A (en) 2000-10-03
US5883390A (en) 1999-03-16
DE3016361A1 (de) 1981-04-02
US5786602A (en) 1998-07-28
US5877491A (en) 1999-03-02

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