DE3174307D1 - Process and apparatus for converged fine line electron beam treatment of objects - Google Patents

Process and apparatus for converged fine line electron beam treatment of objects

Info

Publication number
DE3174307D1
DE3174307D1 DE8181303357T DE3174307T DE3174307D1 DE 3174307 D1 DE3174307 D1 DE 3174307D1 DE 8181303357 T DE8181303357 T DE 8181303357T DE 3174307 T DE3174307 T DE 3174307T DE 3174307 D1 DE3174307 D1 DE 3174307D1
Authority
DE
Germany
Prior art keywords
objects
electron beam
fine line
beam treatment
line electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181303357T
Other languages
English (en)
Inventor
Stuart A Denholm
William A Frutiger
Kenneth E Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE3174307D1 publication Critical patent/DE3174307D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/02—Irradiation devices having no beam-forming means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/905—Electron beam
DE8181303357T 1981-01-12 1981-07-22 Process and apparatus for converged fine line electron beam treatment of objects Expired DE3174307D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/224,313 US4382186A (en) 1981-01-12 1981-01-12 Process and apparatus for converged fine line electron beam treatment of objects

Publications (1)

Publication Number Publication Date
DE3174307D1 true DE3174307D1 (en) 1986-05-15

Family

ID=22840112

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181303357T Expired DE3174307D1 (en) 1981-01-12 1981-07-22 Process and apparatus for converged fine line electron beam treatment of objects

Country Status (6)

Country Link
US (1) US4382186A (de)
EP (1) EP0056179B1 (de)
JP (1) JPS57136335A (de)
CA (1) CA1180678A (de)
DE (1) DE3174307D1 (de)
FR (1) FR2497999B1 (de)

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WO2008100792A1 (en) 2007-02-12 2008-08-21 Fallbrook Technologies Inc. Continuously variable transmissions and methods therefor
CN103438207B (zh) 2007-02-16 2016-08-31 福博科技术公司 无限变速式无级变速器、无级变速器及其方法、组件、子组件和部件
US8641577B2 (en) 2007-06-11 2014-02-04 Fallbrook Intellectual Property Company Llc Continuously variable transmission
EP2171312B1 (de) 2007-07-05 2013-08-21 Fallbrook Intellectual Property Company LLC Verfahren zur steuerung von einem stufenlosen getriebe
CN103939602B (zh) 2007-11-16 2016-12-07 福博科知识产权有限责任公司 用于变速传动装置的控制器
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CN102112778B (zh) 2008-06-06 2013-10-16 福博科技术公司 无限式无级变速器，无级变速器，用于其的方法、组件、子组件及部件
US8167759B2 (en) 2008-10-14 2012-05-01 Fallbrook Technologies Inc. Continuously variable transmission
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US8512195B2 (en) 2010-03-03 2013-08-20 Fallbrook Intellectual Property Company Llc Infinitely variable transmissions, continuously variable transmissions, methods, assemblies, subassemblies, and components therefor
US8888643B2 (en) 2010-11-10 2014-11-18 Fallbrook Intellectual Property Company Llc Continuously variable transmission
US8980046B2 (en) 2011-04-11 2015-03-17 Lam Research Corporation Semiconductor processing system with source for decoupled ion and radical control
US8900402B2 (en) 2011-05-10 2014-12-02 Lam Research Corporation Semiconductor processing system having multiple decoupled plasma sources
US9111728B2 (en) 2011-04-11 2015-08-18 Lam Research Corporation E-beam enhanced decoupled source for semiconductor processing
US9177756B2 (en) 2011-04-11 2015-11-03 Lam Research Corporation E-beam enhanced decoupled source for semiconductor processing
WO2012142038A1 (en) * 2011-04-11 2012-10-18 Lam Research Corporation E-beam enhanced decoupled source for semiconductor processing
US8900403B2 (en) 2011-05-10 2014-12-02 Lam Research Corporation Semiconductor processing system having multiple decoupled plasma sources
US9315886B1 (en) * 2014-06-27 2016-04-19 The United States Of America, As Represented By The Secretary Of The Navy Desensitization of aluminum alloys using pulsed electron beams
US10047861B2 (en) 2016-01-15 2018-08-14 Fallbrook Intellectual Property Company Llc Systems and methods for controlling rollback in continuously variable transmissions
US10023266B2 (en) 2016-05-11 2018-07-17 Fallbrook Intellectual Property Company Llc Systems and methods for automatic configuration and automatic calibration of continuously variable transmissions and bicycles having continuously variable transmissions
US11215268B2 (en) 2018-11-06 2022-01-04 Fallbrook Intellectual Property Company Llc Continuously variable transmissions, synchronous shifting, twin countershafts and methods for control of same
WO2020176392A1 (en) 2019-02-26 2020-09-03 Fallbrook Intellectual Property Company Llc Reversible variable drives and systems and methods for control in forward and reverse directions
JP6912629B1 (ja) * 2020-05-29 2021-08-04 浜松ホトニクス株式会社 電子線照射装置及び電子線照射装置の製造方法

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US3144552A (en) * 1960-08-24 1964-08-11 Varian Associates Apparatus for the iradiation of materials with a pulsed strip beam of electrons
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Also Published As

Publication number Publication date
US4382186A (en) 1983-05-03
FR2497999A1 (fr) 1982-07-16
FR2497999B1 (fr) 1989-12-08
EP0056179A1 (de) 1982-07-21
CA1180678A (en) 1985-01-08
JPS57136335A (en) 1982-08-23
EP0056179B1 (de) 1986-04-09

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Legal Events

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