DE3267548D1 - Process and device for an automatic optical inspection - Google Patents

Process and device for an automatic optical inspection

Info

Publication number
DE3267548D1
DE3267548D1 DE8282104731T DE3267548T DE3267548D1 DE 3267548 D1 DE3267548 D1 DE 3267548D1 DE 8282104731 T DE8282104731 T DE 8282104731T DE 3267548 T DE3267548 T DE 3267548T DE 3267548 D1 DE3267548 D1 DE 3267548D1
Authority
DE
Germany
Prior art keywords
optical inspection
automatic optical
automatic
inspection
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8282104731T
Other languages
English (en)
Inventor
Heinz Ing Grad Baier
Peter Kopp
Erwin Ing Grad Pfeffer
Hans-Peter Dipl Ing Reimann
Hans Dr Dipl Ing Rosch
Martin Schneiderhan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IBM Deutschland GmbH
International Business Machines Corp
Original Assignee
IBM Deutschland GmbH
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IBM Deutschland GmbH, International Business Machines Corp filed Critical IBM Deutschland GmbH
Application granted granted Critical
Publication of DE3267548D1 publication Critical patent/DE3267548D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
DE8282104731T 1982-05-28 1982-05-28 Process and device for an automatic optical inspection Expired DE3267548D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP82104731A EP0095517B1 (de) 1982-05-28 1982-05-28 Verfahren und Einrichtung zur automatischen optischen Inspektion

Publications (1)

Publication Number Publication Date
DE3267548D1 true DE3267548D1 (en) 1986-01-02

Family

ID=8189061

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8282104731T Expired DE3267548D1 (en) 1982-05-28 1982-05-28 Process and device for an automatic optical inspection

Country Status (4)

Country Link
US (1) US4570180A (de)
EP (1) EP0095517B1 (de)
JP (1) JPS58215541A (de)
DE (1) DE3267548D1 (de)

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USRE38716E1 (en) 1984-12-20 2005-03-22 Orbotech, Ltd. Automatic visual inspection system
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US5987172A (en) * 1995-12-06 1999-11-16 Cognex Corp. Edge peak contour tracker
US5845007A (en) * 1996-01-02 1998-12-01 Cognex Corporation Machine vision method and apparatus for edge-based image histogram analysis
US5872870A (en) * 1996-02-16 1999-02-16 Cognex Corporation Machine vision methods for identifying extrema of objects in rotated reference frames
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US6259827B1 (en) 1996-03-21 2001-07-10 Cognex Corporation Machine vision methods for enhancing the contrast between an object and its background using multiple on-axis images
US6298149B1 (en) 1996-03-21 2001-10-02 Cognex Corporation Semiconductor device image inspection with contrast enhancement
US5978502A (en) * 1996-04-01 1999-11-02 Cognex Corporation Machine vision methods for determining characteristics of three-dimensional objects
US6137893A (en) * 1996-10-07 2000-10-24 Cognex Corporation Machine vision calibration targets and methods of determining their location and orientation in an image
US5960125A (en) 1996-11-21 1999-09-28 Cognex Corporation Nonfeedback-based machine vision method for determining a calibration relationship between a camera and a moveable object
US5953130A (en) * 1997-01-06 1999-09-14 Cognex Corporation Machine vision methods and apparatus for machine vision illumination of an object
DE19709939A1 (de) * 1997-03-11 1998-09-17 Atg Test Systems Gmbh Verfahren und Vorrichtung zum Prüfen von Leiterplatten
US6075881A (en) * 1997-03-18 2000-06-13 Cognex Corporation Machine vision methods for identifying collinear sets of points from an image
US5974169A (en) * 1997-03-20 1999-10-26 Cognex Corporation Machine vision methods for determining characteristics of an object using boundary points and bounding regions
US6141033A (en) * 1997-05-15 2000-10-31 Cognex Corporation Bandwidth reduction of multichannel images for machine vision
US6608647B1 (en) 1997-06-24 2003-08-19 Cognex Corporation Methods and apparatus for charge coupled device image acquisition with independent integration and readout
US5978080A (en) * 1997-09-25 1999-11-02 Cognex Corporation Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view
US6025854A (en) * 1997-12-31 2000-02-15 Cognex Corporation Method and apparatus for high speed image acquisition
US6236769B1 (en) 1998-01-28 2001-05-22 Cognex Corporation Machine vision systems and methods for morphological transformation of an image with zero or other uniform offsets
US6282328B1 (en) 1998-01-28 2001-08-28 Cognex Corporation Machine vision systems and methods for morphological transformation of an image with non-uniform offsets
US6215915B1 (en) 1998-02-20 2001-04-10 Cognex Corporation Image processing methods and apparatus for separable, general affine transformation of an image
US6381375B1 (en) 1998-02-20 2002-04-30 Cognex Corporation Methods and apparatus for generating a projection of an image
US6516092B1 (en) 1998-05-29 2003-02-04 Cognex Corporation Robust sub-model shape-finder
US7016539B1 (en) 1998-07-13 2006-03-21 Cognex Corporation Method for fast, robust, multi-dimensional pattern recognition
US6131817A (en) * 1998-10-09 2000-10-17 Nbs Technologies, Inc. Plastic card transport apparatus and inspection system
US6381366B1 (en) 1998-12-18 2002-04-30 Cognex Corporation Machine vision methods and system for boundary point-based comparison of patterns and images
US6687402B1 (en) 1998-12-18 2004-02-03 Cognex Corporation Machine vision methods and systems for boundary feature comparison of patterns and images
US6272018B1 (en) 1999-02-11 2001-08-07 Original Solutions Inc. Method for the verification of the polarity and presence of components on a printed circuit board
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US6684402B1 (en) 1999-12-01 2004-01-27 Cognex Technology And Investment Corporation Control methods and apparatus for coupling multiple image acquisition devices to a digital data processor
CA2296143A1 (fr) 2000-01-18 2001-07-18 9071 9410 Quebec Inc. Systeme d'inspection optique
US6748104B1 (en) 2000-03-24 2004-06-08 Cognex Corporation Methods and apparatus for machine vision inspection using single and multiple templates or patterns
DE10043726C2 (de) * 2000-09-05 2003-12-04 Atg Test Systems Gmbh Verfahren zum Prüfen von Leiterplatten mit einem Paralleltester und eine Vorrichtung zum Ausführen des Verfahrens
US20020038510A1 (en) * 2000-10-04 2002-04-04 Orbotech, Ltd Method for detecting line width defects in electrical circuit inspection
US7006669B1 (en) 2000-12-31 2006-02-28 Cognex Corporation Machine vision method and apparatus for thresholding images of non-uniform materials
JP4096533B2 (ja) * 2001-08-31 2008-06-04 松下電工株式会社 画像処理検査システム
US7349575B2 (en) * 2003-06-27 2008-03-25 Nippon Avionics Co., Ltd. Pattern inspection method and apparatus, and pattern alignment method
US7190834B2 (en) * 2003-07-22 2007-03-13 Cognex Technology And Investment Corporation Methods for finding and characterizing a deformed pattern in an image
US8081820B2 (en) 2003-07-22 2011-12-20 Cognex Technology And Investment Corporation Method for partitioning a pattern into optimized sub-patterns
US7639861B2 (en) 2005-09-14 2009-12-29 Cognex Technology And Investment Corporation Method and apparatus for backlighting a wafer during alignment
US8111904B2 (en) * 2005-10-07 2012-02-07 Cognex Technology And Investment Corp. Methods and apparatus for practical 3D vision system
US8162584B2 (en) * 2006-08-23 2012-04-24 Cognex Corporation Method and apparatus for semiconductor wafer alignment
US9679224B2 (en) 2013-06-28 2017-06-13 Cognex Corporation Semi-supervised method for training multiple pattern recognition and registration tool models

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FR2305801A1 (fr) * 1975-03-28 1976-10-22 Seve Procede pour le reperage automatique de zones particulieres d'un plan et installation pour sa mise en oeuvre
DE2601522C2 (de) * 1976-01-16 1978-05-03 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren und Anordnung zur Erfassung von Kurven auf einer Vorlage
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Also Published As

Publication number Publication date
JPH0236895B2 (de) 1990-08-21
EP0095517B1 (de) 1985-11-21
JPS58215541A (ja) 1983-12-15
US4570180A (en) 1986-02-11
EP0095517A1 (de) 1983-12-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee