DE3302017C2 - - Google Patents

Info

Publication number
DE3302017C2
DE3302017C2 DE3302017A DE3302017A DE3302017C2 DE 3302017 C2 DE3302017 C2 DE 3302017C2 DE 3302017 A DE3302017 A DE 3302017A DE 3302017 A DE3302017 A DE 3302017A DE 3302017 C2 DE3302017 C2 DE 3302017C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3302017A
Other versions
DE3302017A1 (de
Inventor
George J. Sitek
Sherman L. Stevensville Mich. Us Walker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leco Corp
Original Assignee
Leco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leco Corp filed Critical Leco Corp
Publication of DE3302017A1 publication Critical patent/DE3302017A1/de
Application granted granted Critical
Publication of DE3302017C2 publication Critical patent/DE3302017C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G19/00—Weighing apparatus or methods adapted for special purposes not provided for in the preceding groups
    • G01G19/52—Weighing apparatus combined with other objects, e.g. furniture
DE19833302017 1982-03-05 1983-01-21 Kurzanalysator und verfahren zu seiner anwendung Granted DE3302017A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/355,221 US4522788A (en) 1982-03-05 1982-03-05 Proximate analyzer

Publications (2)

Publication Number Publication Date
DE3302017A1 DE3302017A1 (de) 1983-09-08
DE3302017C2 true DE3302017C2 (de) 1987-01-22

Family

ID=23396678

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833302017 Granted DE3302017A1 (de) 1982-03-05 1983-01-21 Kurzanalysator und verfahren zu seiner anwendung

Country Status (4)

Country Link
US (1) US4522788A (de)
JP (1) JPS58162840A (de)
DE (1) DE3302017A1 (de)
GB (1) GB2116733B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007006553A1 (de) 2007-02-09 2008-08-14 ELTRA Entwicklungs- und Vertriebsgesellschaft von elektronischen und physikalischen Geräten mbH Thermogravimetrischer Analysator

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US5064009A (en) * 1989-08-03 1991-11-12 Sartorius Ag Device for the determination of dry substance
NO175025C (no) * 1992-02-28 1994-08-17 Norsk Hydro As Apparatur for analyse av karbonprodukter
US5558029A (en) * 1994-12-14 1996-09-24 Barnstead/Thermlyne Corporation Ashing furnace and method
US6000935A (en) * 1997-02-21 1999-12-14 Troxler Electronic Laboratories, Inc Adjustable apparatus for pyrolysis of a composite material and method of calibration therefor
TW539918B (en) 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
JPH11326172A (ja) * 1998-05-19 1999-11-26 Yanagawa Giken:Kk 水分計
US6270727B1 (en) * 1998-07-31 2001-08-07 Leco Corporation Analytical crucible
US6497239B2 (en) 1999-08-05 2002-12-24 S. C. Fluids, Inc. Inverted pressure vessel with shielded closure mechanism
US6334266B1 (en) 1999-09-20 2002-01-01 S.C. Fluids, Inc. Supercritical fluid drying system and method of use
CN1175470C (zh) * 1999-11-02 2004-11-10 东京威力科创股份有限公司 多个工件的超临界处理的方法和装置
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
EP1303870A2 (de) * 2000-07-26 2003-04-23 Tokyo Electron Limited Hochdrucksbehandlungskammer für halbleiterscheiben
IL154095A0 (en) * 2000-08-04 2003-07-31 S C Fluids Inc Inverted pressure vessel with shielded closure mechanism
US7048888B2 (en) 2001-06-28 2006-05-23 Jose Maria Las Navas Garcia Automatic cover system for proximate analyzers and the like
US20040040660A1 (en) * 2001-10-03 2004-03-04 Biberger Maximilian Albert High pressure processing chamber for multiple semiconductor substrates
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
JP2005517884A (ja) * 2002-02-15 2005-06-16 東京エレクトロン株式会社 圧力強化ダイヤフラム弁
US7387868B2 (en) * 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US7021635B2 (en) 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7225820B2 (en) 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7077917B2 (en) * 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7172729B2 (en) * 2003-03-04 2007-02-06 Jose Maria Las Navas Garcia Mixed sample moisture or ash analyzer
JP4658038B2 (ja) * 2003-03-06 2011-03-23 レコ コーポレイション 予測的温度制御機能を備えた分析炉
US7270137B2 (en) 2003-04-28 2007-09-18 Tokyo Electron Limited Apparatus and method of securing a workpiece during high-pressure processing
US20050022850A1 (en) * 2003-07-29 2005-02-03 Supercritical Systems, Inc. Regulation of flow of processing chemistry only into a processing chamber
US7163380B2 (en) * 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US20050034660A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Alignment means for chamber closure to reduce wear on surfaces
US7186093B2 (en) * 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US20060065189A1 (en) * 2004-09-30 2006-03-30 Darko Babic Method and system for homogenization of supercritical fluid in a high pressure processing system
US20060065288A1 (en) * 2004-09-30 2006-03-30 Darko Babic Supercritical fluid processing system having a coating on internal members and a method of using
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US20060135047A1 (en) * 2004-12-22 2006-06-22 Alexei Sheydayi Method and apparatus for clamping a substrate in a high pressure processing system
US7434590B2 (en) * 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7140393B2 (en) * 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7435447B2 (en) * 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7767145B2 (en) * 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7380984B2 (en) * 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US20060225772A1 (en) * 2005-03-29 2006-10-12 Jones William D Controlled pressure differential in a high-pressure processing chamber
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) * 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
US10240870B2 (en) 2015-01-26 2019-03-26 Spex Sample Prep, Llc Method for operating a power-compensated fusion furnace
US11513042B2 (en) * 2015-01-26 2022-11-29 SPEX SamplePrep, LLC Power-compensated fusion furnace
CN104764672A (zh) * 2015-03-30 2015-07-08 常州大学 烟煤的水分自动测试设备
US11899033B2 (en) 2016-12-01 2024-02-13 Leco Corporation Access port for a thermogravimetric analyzer furnace
USD847009S1 (en) * 2017-07-04 2019-04-30 Hunan Sundy Science And Technology Co., Ltd. Proximate analyzer
CN108801834A (zh) * 2018-04-28 2018-11-13 中国建材检验认证集团股份有限公司 一种自动称量系统和烧失量的测定方法

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US2709914A (en) * 1951-01-10 1955-06-07 Pillsbury Mills Inc Apparatus for determining the moisture content of materials
US3765237A (en) * 1971-04-06 1973-10-16 Instrumentation Labor Inc Calorimetry
US4009605A (en) * 1976-02-24 1977-03-01 Apollo Chem Method for determining T{HD 250 {B temperature
JPS54161393A (en) * 1978-06-12 1979-12-20 Nippon Kokan Kk Device for automatically measuring water content and ash content of coal
FR2435703A1 (fr) * 1978-06-27 1980-04-04 Lafarge Ciments Sa Dispositif de pesee et installation comprenant un tel dispositif et destinee notamment au titrage d'une matiere pulverulente en particulier d'un cru de cimenterie
JPS55141654A (en) * 1979-04-21 1980-11-05 Fujisash Co Moisture measuring method using high-frequency dielectric drying and its apparatus
US4303615A (en) * 1980-06-02 1981-12-01 Fisher Scientific Company Crucible with lid

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007006553A1 (de) 2007-02-09 2008-08-14 ELTRA Entwicklungs- und Vertriebsgesellschaft von elektronischen und physikalischen Geräten mbH Thermogravimetrischer Analysator

Also Published As

Publication number Publication date
GB2116733A (en) 1983-09-28
JPS58162840A (ja) 1983-09-27
GB8305977D0 (en) 1983-04-07
GB2116733B (en) 1985-10-23
US4522788A (en) 1985-06-11
DE3302017A1 (de) 1983-09-08

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition