DE3463831D1 - Bearing element for a gas bearing - Google Patents

Bearing element for a gas bearing

Info

Publication number
DE3463831D1
DE3463831D1 DE8484102914T DE3463831T DE3463831D1 DE 3463831 D1 DE3463831 D1 DE 3463831D1 DE 8484102914 T DE8484102914 T DE 8484102914T DE 3463831 T DE3463831 T DE 3463831T DE 3463831 D1 DE3463831 D1 DE 3463831D1
Authority
DE
Germany
Prior art keywords
bearing
gas
bearing element
gas bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484102914T
Other languages
English (en)
Inventor
Siegfried T Stauber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wyler AG
Original Assignee
Wyler AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wyler AG filed Critical Wyler AG
Application granted granted Critical
Publication of DE3463831D1 publication Critical patent/DE3463831D1/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
DE8484102914T 1983-03-30 1984-03-16 Bearing element for a gas bearing Expired DE3463831D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH177483 1983-03-30

Publications (1)

Publication Number Publication Date
DE3463831D1 true DE3463831D1 (en) 1987-06-25

Family

ID=4218292

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484102914T Expired DE3463831D1 (en) 1983-03-30 1984-03-16 Bearing element for a gas bearing

Country Status (6)

Country Link
US (1) US4558909A (de)
EP (1) EP0121829B1 (de)
JP (1) JPS59183114A (de)
DE (1) DE3463831D1 (de)
IN (1) IN162946B (de)
SU (1) SU1400515A3 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663649A5 (de) * 1983-11-09 1987-12-31 Wyler Ag Befestigungsschaft fuer den lagerkoerper eines luftlagers.
DE3513896A1 (de) * 1985-04-17 1986-10-30 KLG Kaufbeurer Leiterplattengesellschaft mbH, 8950 Kaufbeuren Lagerkoerper fuer ein luftkissenlager eines linearlagers
US4699525A (en) * 1985-07-18 1987-10-13 Ebara Corporation Thrust bearing
US4717263A (en) * 1985-07-26 1988-01-05 Compact Spindle Bearing Corporation Gas bearing
CH666647A5 (de) * 1985-08-10 1988-08-15 Wyler Ag Spanabhebende werkzeugmaschine.
US4749283A (en) * 1985-09-12 1988-06-07 Canon Kabushiki Kaisha Static pressure bearing
NL8502650A (nl) * 1985-09-27 1987-04-16 Pelt & Hooykaas Gasleger alsmede hiervoor geschikt legerdeel.
JPS62140023A (ja) * 1985-12-16 1987-06-23 Ebara Res Co Ltd 流量計
JPS62140022A (ja) * 1985-12-16 1987-06-23 Ebara Res Co Ltd 流量計
NL8601464A (nl) * 1986-06-06 1988-01-04 Philips Nv Axiaal lager met een reservoir met een patroon van transportgroeven.
US4719705A (en) * 1986-06-24 1988-01-19 The Perkin-Elmer Corporation Reticle transporter
US4958098A (en) * 1986-12-16 1990-09-18 Eastman Kodak Company Rotary device
EP0317787B2 (de) 1987-11-25 1997-05-07 Esec Sa Einrichtung zur Durchführung der Zustellbewegung eines Arbeitsorgans zu einer Arbeitsstation
US4798478A (en) * 1988-02-16 1989-01-17 Nicolet Instrument Corporation Self-aligning fluid bearing
US5097207A (en) * 1989-11-03 1992-03-17 John H. Blanz Company, Inc. Temperature stable cryogenic probe station
US5077523A (en) * 1989-11-03 1991-12-31 John H. Blanz Company, Inc. Cryogenic probe station having movable chuck accomodating variable thickness probe cards
US5160883A (en) * 1989-11-03 1992-11-03 John H. Blanz Company, Inc. Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support
US5166606A (en) * 1989-11-03 1992-11-24 John H. Blanz Company, Inc. High efficiency cryogenic test station
DE4006853A1 (de) * 1990-03-05 1991-09-12 Zeiss Carl Fa Einrichtung zur vorspannung eines gefuehrten maschinenteils
JPH116525A (ja) * 1997-06-17 1999-01-12 Mitsutoyo Corp 流体軸受装置
US6491435B1 (en) 2000-07-24 2002-12-10 Moore Epitaxial, Inc. Linear robot
US6443618B1 (en) * 2000-07-24 2002-09-03 Moore Epitaxial, Inc. Particulate free air bearing and seal
WO2002025126A1 (de) * 2000-09-19 2002-03-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hydrostatische lagervorrichtung
DE102004005515B3 (de) * 2004-02-03 2005-06-16 Diamant-Metallplastic Gmbh Auf einer Unterlage mittels eines Druckpolsters abstützbares und darauf verschiebbares Gleitlager
US7642523B1 (en) * 2006-05-02 2010-01-05 New Way Machine Components, Inc. Vacuum chamber stage with application of vacuum from below
JP4445528B2 (ja) * 2007-07-11 2010-04-07 住友重機械工業株式会社 静圧軸受
DE102009019773B4 (de) * 2009-04-30 2022-03-03 Friedrich-Schiller-Universität Jena Verfahren zur Verbesserung der Positioniergenauigkeit von mittels Gaslagerelementen geführten Tischen und Verwendung von Luftlagerelementen mit Dichtsystemen für in Umgebungsatmosphäre geführte Tischsysteme
WO2020106279A1 (en) * 2018-11-20 2020-05-28 Dresser-Rand Company Bearing and/or seal assembly including permeable body with features engineered to form a desired distribution pattern for a pressurized gas conveyed therethrough
WO2023218132A1 (en) * 2022-05-13 2023-11-16 Aalto University Foundation Sr Porosity and/or permeability measurement device and method

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2362667A (en) * 1942-05-15 1944-11-14 Westinghouse Electric & Mfg Co Thrust bearing
GB794902A (en) * 1953-02-16 1958-05-14 Godfrey Hanworth Ltd Improvements in or relating to braked turbines
US3232680A (en) * 1963-08-19 1966-02-01 Whittaker Corp Fluid bearing
US3380040A (en) * 1964-04-01 1968-04-23 Hughes Aircraft Co Hydrodynamic bearing support for a magnetic drum
NL143660B (nl) * 1965-03-27 1974-10-15 Philips Nv Axiaal leger.
US3377113A (en) * 1965-08-03 1968-04-09 Rotron Mfg Co Hydrodynamic bearing
FR1547132A (fr) * 1966-12-15 1968-11-22 Lucas Industries Ltd Palier de butée et patin pour tête de piston en comportant application
US3545366A (en) * 1967-09-11 1970-12-08 Hans Bruhin Apparatus for storing wheels of cheeses
GB1265885A (de) * 1969-06-11 1972-03-08
JPS4829939A (de) * 1971-08-25 1973-04-20
US3841720A (en) * 1973-04-02 1974-10-15 Ford Motor Co Thrust bearing assembly
CH549736A (de) * 1973-06-21 1974-05-31 Sulzer Ag Selbstdruckerzeugendes axial-gasschwebelager.
JPS5037635A (de) * 1973-08-06 1975-04-08
DE2600759A1 (de) * 1976-01-10 1977-07-14 Skf Kugellagerfabriken Gmbh Selbstdruckerzeugendes axialgleitlager
DE2616918A1 (de) * 1976-04-15 1977-10-27 Schunk & Ebe Gmbh Sinterlager fuer radial- und axialbelastung
CS220883B1 (en) * 1980-06-30 1983-04-29 Jozef Turza Hydrostatic pendulum

Also Published As

Publication number Publication date
EP0121829A1 (de) 1984-10-17
US4558909A (en) 1985-12-17
SU1400515A3 (ru) 1988-05-30
IN162946B (de) 1988-07-23
EP0121829B1 (de) 1987-05-20
JPS59183114A (ja) 1984-10-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee