DE3567270D1 - Film thickness measuring apparatus - Google Patents

Film thickness measuring apparatus

Info

Publication number
DE3567270D1
DE3567270D1 DE8585303660T DE3567270T DE3567270D1 DE 3567270 D1 DE3567270 D1 DE 3567270D1 DE 8585303660 T DE8585303660 T DE 8585303660T DE 3567270 T DE3567270 T DE 3567270T DE 3567270 D1 DE3567270 D1 DE 3567270D1
Authority
DE
Germany
Prior art keywords
film thickness
measuring apparatus
thickness measuring
film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585303660T
Other languages
English (en)
Inventor
Makoto Itonaga
Kanji Kayanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10492084A external-priority patent/JPS60249007A/ja
Priority claimed from JP12331284A external-priority patent/JPS613103A/ja
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Application granted granted Critical
Publication of DE3567270D1 publication Critical patent/DE3567270D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
DE8585303660T 1984-05-24 1985-05-23 Film thickness measuring apparatus Expired DE3567270D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10492084A JPS60249007A (ja) 1984-05-24 1984-05-24 膜厚測定装置
JP12331284A JPS613103A (ja) 1984-06-15 1984-06-15 光学系調整用治具

Publications (1)

Publication Number Publication Date
DE3567270D1 true DE3567270D1 (en) 1989-02-09

Family

ID=26445285

Family Applications (2)

Application Number Title Priority Date Filing Date
DE198585303660T Pending DE165722T1 (de) 1984-05-24 1985-05-23 Duennschichtmessapparat.
DE8585303660T Expired DE3567270D1 (en) 1984-05-24 1985-05-23 Film thickness measuring apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE198585303660T Pending DE165722T1 (de) 1984-05-24 1985-05-23 Duennschichtmessapparat.

Country Status (3)

Country Link
US (1) US4695162A (de)
EP (1) EP0165722B1 (de)
DE (2) DE165722T1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428509A (en) * 1987-07-23 1989-01-31 Nippon Kokan Kk Apparatus for measuring thickness of film
US4967152A (en) * 1988-03-11 1990-10-30 Ultra-Probe Apparatus including a focused UV light source for non-contact measurement and alteration of electrical properties of conductors
DE3936541C2 (de) * 1988-11-02 1998-05-20 Ricoh Kk Verfahren zum Messen von mindestens zwei unbekannten physikalischen Größen einer einlagigen Dünnschicht oder der obersten Lage einer mehrlagigen Dünnschicht-Struktur
JPH06105796B2 (ja) * 1989-05-30 1994-12-21 信越半導体株式会社 発光ダイオードおよびその製造方法
US5131752A (en) * 1990-06-28 1992-07-21 Tamarack Scientific Co., Inc. Method for film thickness endpoint control
JP2691056B2 (ja) * 1990-07-17 1997-12-17 三菱重工業株式会社 印刷機の版面上の水膜検出器
JP2927934B2 (ja) * 1990-11-16 1999-07-28 株式会社リコー 薄膜測定方法および装置
IL96483A (en) * 1990-11-27 1995-07-31 Orbotech Ltd Optical inspection method and apparatus
US5410409A (en) * 1991-08-30 1995-04-25 International Business Machines Corporation Search routine for ellipsometers
WO1993006480A1 (en) * 1991-09-17 1993-04-01 Exxon Research And Engineering Company Hydrogen fluoride sensor
FR2685763B1 (fr) * 1991-12-27 1994-03-25 Aime Vareille Procede et dispositif optiques de mesure de distance et leur application au positionnement relatif de pieces.
DE69421844T2 (de) * 1993-04-23 2000-06-29 Japan Res Dev Corp Verfahren zur Kontrolle der Schichtdicke und/oder des Brechungsindexes
DE19537807C1 (de) * 1995-10-11 1997-02-06 Roland Man Druckmasch Verfahren zum Feststellen von Schichten
WO1998048252A1 (en) * 1997-04-22 1998-10-29 The Regents Of The University Of California Laser detection of material thickness
US6483580B1 (en) * 1998-03-06 2002-11-19 Kla-Tencor Technologies Corporation Spectroscopic scatterometer system
ATE374923T1 (de) * 1999-08-06 2007-10-15 Inverness Medical Biostar Inc Bindungsanalyseinstrumente basierend auf lichtabschwächung durch dünnschichten
AU2002360738A1 (en) * 2001-12-19 2003-07-09 Kla-Tencor Technologies Corporation Parametric profiling using optical spectroscopic systems
US7515253B2 (en) 2005-01-12 2009-04-07 Kla-Tencor Technologies Corporation System for measuring a sample with a layer containing a periodic diffracting structure
JP2007040930A (ja) * 2005-08-05 2007-02-15 Ebara Corp 膜厚測定方法及び基板処理装置
DE102007063415B4 (de) * 2007-12-18 2014-12-04 BAM Bundesanstalt für Materialforschung und -prüfung Verfahren und Vorrichtung zum Erkennen eines Erzeugnisses
DE102015007054A1 (de) 2015-06-02 2016-12-08 Thomas Huth-Fehre Verfahren und Vorrichtung zur Bestimmung der Dicke von dünnen organischen Schichten
CN111912785B (zh) * 2020-07-22 2023-06-23 深圳信息职业技术学院 一种光学常数测量方法与光学常数测量设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3880524A (en) * 1973-06-25 1975-04-29 Ibm Automatic ellipsometer
US3985447A (en) * 1975-08-29 1976-10-12 Bell Telephone Laboratories, Incorporated Measurement of thin films by polarized light
US4298281A (en) * 1979-07-16 1981-11-03 Libbey-Owens-Ford Company Laser system for aligning conveyor rolls
US4466739A (en) * 1982-02-26 1984-08-21 Kasner William H Laser beam alignment system

Also Published As

Publication number Publication date
EP0165722B1 (de) 1989-01-04
DE165722T1 (de) 1986-03-20
US4695162A (en) 1987-09-22
EP0165722A3 (en) 1986-06-18
EP0165722A2 (de) 1985-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee