DE3575050D1 - Verfahren zur herstellung einer monolitisch-integrierten, optischen schaltung enthaltend einen laser und eine nach diesem verfahren erhaltene schaltung. - Google Patents
Verfahren zur herstellung einer monolitisch-integrierten, optischen schaltung enthaltend einen laser und eine nach diesem verfahren erhaltene schaltung.Info
- Publication number
- DE3575050D1 DE3575050D1 DE8585400626T DE3575050T DE3575050D1 DE 3575050 D1 DE3575050 D1 DE 3575050D1 DE 8585400626 T DE8585400626 T DE 8585400626T DE 3575050 T DE3575050 T DE 3575050T DE 3575050 D1 DE3575050 D1 DE 3575050D1
- Authority
- DE
- Germany
- Prior art keywords
- monolitically
- laser
- producing
- integrated
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/125—Distributed Bragg reflector [DBR] lasers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0262—Photo-diodes, e.g. transceiver devices, bidirectional devices
- H01S5/0264—Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1021—Coupled cavities
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/095—Laser devices
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8405053A FR2562328B1 (fr) | 1984-03-30 | 1984-03-30 | Procede de fabrication d'un dispositif optique integre monolithique comprenant un laser a semi-conducteur et dispositif obtenu par ce procede |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3575050D1 true DE3575050D1 (de) | 1990-02-01 |
Family
ID=9302666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585400626T Expired - Fee Related DE3575050D1 (de) | 1984-03-30 | 1985-03-29 | Verfahren zur herstellung einer monolitisch-integrierten, optischen schaltung enthaltend einen laser und eine nach diesem verfahren erhaltene schaltung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4720468A (de) |
EP (1) | EP0159258B1 (de) |
JP (1) | JPH0636457B2 (de) |
DE (1) | DE3575050D1 (de) |
FR (1) | FR2562328B1 (de) |
WO (1) | WO1985004491A1 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2584826B1 (fr) * | 1985-07-11 | 1987-10-09 | Labo Electronique Physique | Element de commutation optique entre deux guides de lumiere et matrice de commutation optique formee de ces elements de commutation |
DE3609278A1 (de) * | 1986-03-19 | 1987-09-24 | Siemens Ag | Integrierte optische halbleiteranordnung |
FR2605801B1 (fr) * | 1986-10-23 | 1989-03-03 | Menigaux Louis | Procede de fabrication d'une structure semi-conductrice susceptible d'effet laser multi-longueurs d'onde, et dispositif obtenu |
JPS63142887A (ja) * | 1986-12-05 | 1988-06-15 | Sharp Corp | 半導体発光素子 |
JP2587628B2 (ja) * | 1987-01-29 | 1997-03-05 | 国際電信電話株式会社 | 半導体集積発光素子 |
SE461491B (sv) * | 1987-12-02 | 1990-02-19 | Asea Ab | Monolitisk optokopplare |
US4847665A (en) * | 1988-03-31 | 1989-07-11 | Northern Telecom Limited | Monolithic integration of optoelectronic and electronic devices |
US5055894A (en) * | 1988-09-29 | 1991-10-08 | The Boeing Company | Monolithic interleaved LED/PIN photodetector array |
FR2642228A1 (fr) * | 1989-01-20 | 1990-07-27 | Menigaux Louis | Procede de fabrication d'un dispositif semi-conducteur quasi plat susceptible d'effet laser multi-longueurs d'onde et dispositif correspondant |
FR2655775B1 (fr) * | 1989-12-13 | 1992-03-20 | Menigaux Louis | Procede de realisation d'une structure integree guide photodetecteur. |
US5071786A (en) * | 1990-03-08 | 1991-12-10 | Xerox Corporation | Method of making multiple wavelength p-n junction semiconductor laser with separated waveguides |
US5091799A (en) * | 1990-10-31 | 1992-02-25 | The United States Of America As Represented By The Secretary Of The Navy | Buried heterostructure laser modulator |
NL9100103A (nl) * | 1991-01-23 | 1992-08-17 | Philips Nv | Halfgeleiderdiodelaser met monitordiode. |
JPH0661583A (ja) * | 1992-08-11 | 1994-03-04 | Sony Corp | 半導体レーザ |
US6693736B1 (en) | 1992-09-10 | 2004-02-17 | Fujitsu Limited | Optical circuit system and components of same |
WO1994006052A1 (en) * | 1992-09-10 | 1994-03-17 | Fujitsu Limited | Optical circuit system and its constituents |
JP3323324B2 (ja) * | 1993-06-18 | 2002-09-09 | 株式会社リコー | 発光ダイオードおよび発光ダイオードアレイ |
JPH07202263A (ja) * | 1993-12-28 | 1995-08-04 | Ricoh Co Ltd | 端面発光型発光ダイオード、アレイ状光源、側面受光型受光素子、受発光素子、端面発光型発光ダイオードアレイ状光源 |
US5721750A (en) * | 1995-04-13 | 1998-02-24 | Korea Advanced Institute Of Science And Technology | Laser diode for optoelectronic integrated circuit and a process for preparing the same |
US6931003B2 (en) * | 2000-02-09 | 2005-08-16 | Bookline Flolmstead Llc | Packet prioritization protocol for a large-scale, high speed computer network |
US7043106B2 (en) * | 2002-07-22 | 2006-05-09 | Applied Materials, Inc. | Optical ready wafers |
US7110629B2 (en) * | 2002-07-22 | 2006-09-19 | Applied Materials, Inc. | Optical ready substrates |
US7072534B2 (en) * | 2002-07-22 | 2006-07-04 | Applied Materials, Inc. | Optical ready substrates |
KR20060026027A (ko) * | 2003-05-29 | 2006-03-22 | 어플라이드 머티어리얼스, 인코포레이티드 | 광신호의 연속 라우팅 |
US7103079B2 (en) * | 2003-06-27 | 2006-09-05 | Applied Materials, Inc. | Pulsed quantum dot laser system with low jitter |
US20050016446A1 (en) | 2003-07-23 | 2005-01-27 | Abbott John S. | CaF2 lenses with reduced birefringence |
US20060222024A1 (en) * | 2005-03-15 | 2006-10-05 | Gray Allen L | Mode-locked semiconductor lasers with quantum-confined active region |
US20060227825A1 (en) * | 2005-04-07 | 2006-10-12 | Nl-Nanosemiconductor Gmbh | Mode-locked quantum dot laser with controllable gain properties by multiple stacking |
WO2007027615A1 (en) * | 2005-09-01 | 2007-03-08 | Applied Materials, Inc. | Ridge technique for fabricating an optical detector and an optical waveguide |
WO2007065614A2 (en) * | 2005-12-07 | 2007-06-14 | Innolume Gmbh | Laser source with broadband spectrum emission |
US7561607B2 (en) * | 2005-12-07 | 2009-07-14 | Innolume Gmbh | Laser source with broadband spectrum emission |
US7835408B2 (en) * | 2005-12-07 | 2010-11-16 | Innolume Gmbh | Optical transmission system |
WO2010065731A2 (en) * | 2008-12-03 | 2010-06-10 | Innolume Gmbh | Semiconductor laser with low relative intensity noise of individual longitudinal modes and optical transmission system incorporating the laser |
US10209445B2 (en) * | 2012-07-30 | 2019-02-19 | Hewlett Packard Enterprise Development Lp | Method of fabricating a compact photonics platform |
US10928659B2 (en) | 2014-02-24 | 2021-02-23 | Rockley Photonics Limited | Optoelectronic device |
US10222677B2 (en) | 2014-02-24 | 2019-03-05 | Rockley Photonics Limited | Optoelectronic device |
US11150494B2 (en) | 2015-03-05 | 2021-10-19 | Rockley Photonics Limited | Waveguide modulator structures |
US10921616B2 (en) | 2016-11-23 | 2021-02-16 | Rockley Photonics Limited | Optoelectronic device |
WO2016139484A1 (en) | 2015-03-05 | 2016-09-09 | Rockley Photonics Limited | Waveguide modulator structures |
US10216059B2 (en) | 2015-03-05 | 2019-02-26 | Rockley Photonics Limited | Waveguide modulator structures |
US10678115B2 (en) | 2015-03-05 | 2020-06-09 | Rockley Photonics Limited | Waveguide modulator structures |
US11022824B2 (en) * | 2016-11-23 | 2021-06-01 | Rockley Photonics Limited | Electro-optically active device |
US11101256B2 (en) | 2016-11-23 | 2021-08-24 | Rockley Photonics Limited | Optical modulators |
US11036006B2 (en) | 2016-12-02 | 2021-06-15 | Rockley Photonics Limited | Waveguide device and method of doping a waveguide device |
US11105975B2 (en) | 2016-12-02 | 2021-08-31 | Rockley Photonics Limited | Waveguide optoelectronic device |
GB2576652B (en) | 2017-07-05 | 2021-12-22 | Rockley Photonics Ltd | Optoelectronic device |
IT201700087052A1 (it) * | 2017-07-28 | 2019-01-28 | Prima Electro S P A | Procedimento di fabbricazione di un diodo laser a semiconduttore, e diodo laser |
GB2585391B (en) | 2019-08-23 | 2021-10-27 | Rockley Photonics Ltd | Method of fabricating an optoelectronic component |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1539028A (en) * | 1975-12-18 | 1979-01-24 | Tokyo Inst Tech | Optical systems |
US4114257A (en) * | 1976-09-23 | 1978-09-19 | Texas Instruments Incorporated | Method of fabrication of a monolithic integrated optical circuit |
CA1127282A (en) * | 1978-05-22 | 1982-07-06 | Takashi Sugino | Semiconductor laser and method of making the same |
FR2525033B1 (fr) * | 1982-04-08 | 1986-01-17 | Bouadma Noureddine | Laser a semi-conducteur a plusieurs longueurs d'onde independantes et son procede de realisation |
JPS58216486A (ja) * | 1982-06-10 | 1983-12-16 | Kokusai Denshin Denwa Co Ltd <Kdd> | 半導体レ−ザおよびその製造方法 |
JPS5990981A (ja) * | 1982-11-16 | 1984-05-25 | Nec Corp | 光集積回路の製作方法 |
-
1984
- 1984-03-30 FR FR8405053A patent/FR2562328B1/fr not_active Expired
-
1985
- 1985-03-29 US US06/800,601 patent/US4720468A/en not_active Expired - Lifetime
- 1985-03-29 JP JP60501399A patent/JPH0636457B2/ja not_active Expired - Lifetime
- 1985-03-29 WO PCT/FR1985/000067 patent/WO1985004491A1/fr unknown
- 1985-03-29 DE DE8585400626T patent/DE3575050D1/de not_active Expired - Fee Related
- 1985-03-29 EP EP85400626A patent/EP0159258B1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
WO1985004491A1 (fr) | 1985-10-10 |
EP0159258A1 (de) | 1985-10-23 |
US4720468A (en) | 1988-01-19 |
FR2562328A1 (fr) | 1985-10-04 |
JPH0636457B2 (ja) | 1994-05-11 |
FR2562328B1 (fr) | 1987-11-27 |
EP0159258B1 (de) | 1989-12-27 |
JPS61501669A (ja) | 1986-08-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |