DE3587492D1 - Frequenzmoduliertes laser-radar. - Google Patents

Frequenzmoduliertes laser-radar.

Info

Publication number
DE3587492D1
DE3587492D1 DE8585301845T DE3587492T DE3587492D1 DE 3587492 D1 DE3587492 D1 DE 3587492D1 DE 8585301845 T DE8585301845 T DE 8585301845T DE 3587492 T DE3587492 T DE 3587492T DE 3587492 D1 DE3587492 D1 DE 3587492D1
Authority
DE
Germany
Prior art keywords
ranging
interferometer
target
path
phase difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585301845T
Other languages
English (en)
Other versions
DE3587492T2 (de
Inventor
Francis Eugene Goodwin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Digital Signal Corp
Original Assignee
Digital Signal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Digital Signal Corp filed Critical Digital Signal Corp
Application granted granted Critical
Publication of DE3587492D1 publication Critical patent/DE3587492D1/de
Publication of DE3587492T2 publication Critical patent/DE3587492T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/32Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497Means for monitoring or calibrating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60Reference interferometer, i.e. additional interferometer not interacting with object
DE85301845T 1984-03-16 1985-03-15 Frequenzmoduliertes Laser-Radar. Expired - Fee Related DE3587492T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/590,350 US4830486A (en) 1984-03-16 1984-03-16 Frequency modulated lasar radar

Publications (2)

Publication Number Publication Date
DE3587492D1 true DE3587492D1 (de) 1993-09-09
DE3587492T2 DE3587492T2 (de) 1994-03-17

Family

ID=24361895

Family Applications (1)

Application Number Title Priority Date Filing Date
DE85301845T Expired - Fee Related DE3587492T2 (de) 1984-03-16 1985-03-15 Frequenzmoduliertes Laser-Radar.

Country Status (5)

Country Link
US (1) US4830486A (de)
EP (1) EP0164181B1 (de)
JP (1) JP2566907B2 (de)
AT (1) ATE92640T1 (de)
DE (1) DE3587492T2 (de)

Families Citing this family (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744653A (en) * 1984-04-12 1988-05-17 Matsushita Electric Industrial Co., Ltd. Distance measurement by laser light
KR900002117B1 (ko) * 1985-03-28 1990-04-02 시부야 고오교오 가부시끼가이샤 레이저 광선을 이용한 거리측정방법과 장치
GB2504248B (en) 1986-02-02 2014-07-23 Selex Sensors & Airborne Sys Imaging arrangement
DE3630887A1 (de) * 1986-03-26 1987-10-08 Hommelwerke Gmbh Vorrichtung zur messung kleiner laengen
US4895441A (en) * 1987-03-19 1990-01-23 Pandel Instruments, Inc. Method and apparatus for precision ranging
FR2629197B1 (fr) * 1988-03-24 1991-09-13 Maitre Ateliers Procede et dispositif pour mesurer la distance d'un objet au moyen d'un faisceau laser
GB8807385D0 (en) * 1988-03-29 1988-05-05 British Telecomm Semiconductor device assembly
EP0336027A1 (de) * 1988-04-05 1989-10-11 Pandel Instruments, Inc Verfahren und Gerät zur Präzisionsabstandsmessung
DE3906118A1 (de) * 1989-02-28 1990-08-30 Bosch Gmbh Robert Vorrichtung zur interferometrischen erfassung von oberflaechenstrukturen
US4957362A (en) * 1989-09-08 1990-09-18 Environmental Research Institute Of Michigan Method and apparatus for electro-optical phase detection
US5028129A (en) * 1990-01-05 1991-07-02 Ball Corporation Differential absorption ranging method and apparatus
US5000567A (en) * 1990-01-24 1991-03-19 The Boeing Company Laser radar system for detecting an object
US5235455A (en) * 1991-02-21 1993-08-10 The United States Of American As Represented By The Secretary Of The Navy Wide bandwidth differential amplifier
US5227857A (en) * 1991-04-24 1993-07-13 The United States Of America As Represented By The Secretary Of The Navy System for cancelling phase noise in an interferometric fiber optic sensor arrangement
US5200606A (en) * 1991-07-02 1993-04-06 Ltv Missiles And Electronics Group Laser radar scanning system
US5221956A (en) * 1991-08-14 1993-06-22 Kustom Signals, Inc. Lidar device with combined optical sight
US5294075A (en) * 1991-08-28 1994-03-15 The Boeing Company High accuracy optical position sensing system
US5164733A (en) * 1992-01-29 1992-11-17 The United States Of America As Represented By The Secretary Of The Army Phase shift detection for use in laser radar ranging systems
US5371587A (en) * 1992-05-06 1994-12-06 The Boeing Company Chirped synthetic wavelength laser radar
US5311353A (en) * 1993-03-05 1994-05-10 Analog Modules Wide dynamic range optical receivers
WO1995020139A1 (en) * 1994-01-24 1995-07-27 Svg Lithography Systems, Inc. Grating-grating interferometric alignment system
US5489984A (en) * 1994-04-01 1996-02-06 Imra America, Inc. Differential ranging measurement system and method utilizing ultrashort pulses
US5585913A (en) * 1994-04-01 1996-12-17 Imra America Inc. Ultrashort pulsewidth laser ranging system employing a time gate producing an autocorrelation and method therefore
US5778016A (en) 1994-04-01 1998-07-07 Imra America, Inc. Scanning temporal ultrafast delay methods and apparatuses therefor
JP2864993B2 (ja) * 1994-07-06 1999-03-08 信越半導体株式会社 表面形状測定装置
DE4427352C1 (de) * 1994-08-02 1996-01-18 Siemens Ag Verfahren zur hochauflösenden Abstandsmessung mittels FMCW-Laser-Radar
US5988862A (en) * 1996-04-24 1999-11-23 Cyra Technologies, Inc. Integrated system for quickly and accurately imaging and modeling three dimensional objects
FR2754605B1 (fr) * 1996-10-14 1998-10-30 Commissariat Energie Atomique Velocimetre et telemetre laser utilisant une detection coherente
FR2761782B1 (fr) * 1997-04-02 1999-05-07 Commissariat Energie Atomique Velocimetre et telemetre laser utilisant une detection coherente
US6446217B1 (en) * 1998-03-11 2002-09-03 Milli Sensor Systems & Actuators, Inc. System for determining and controlling the peak amplitude and phase of an oscillating member
US7800758B1 (en) 1999-07-23 2010-09-21 Faro Laser Trackers, Llc Laser-based coordinate measuring device and laser-based method for measuring coordinates
DE10027239A1 (de) * 2000-05-31 2001-12-06 Sick Ag Verfahren zur Abstandsmessung und Abstandsmeßeinrichtung
US6718821B1 (en) * 2001-11-07 2004-04-13 Sandia Corporation Laser interferometry force-feedback sensor for an interfacial force microscope
GB2384127A (en) * 2002-01-15 2003-07-16 Qinetiq Ltd Optical transmission system
DE10204133B4 (de) * 2002-02-01 2004-05-27 Robert Bosch Gmbh Interferometrisches Messverfahren und Vorrichtung
DE10224761B3 (de) * 2002-06-04 2004-03-25 Carl Zeiss Jena Gmbh Laserstrahlinterferometer
JP4062008B2 (ja) * 2002-08-07 2008-03-19 株式会社東京精密 デジタル測定ヘッド
US6879421B2 (en) * 2003-03-28 2005-04-12 Beyond 3, Inc. Method and system for performing swept-wavelength measurements within an optical system incorporating a reference resonator
CN101394783B (zh) 2004-09-21 2014-03-19 数字信号公司 远程监视生理机能的系统和方法
EP2386245B1 (de) * 2005-02-14 2012-12-19 Digital Signal Corporation Laserradarsystem zur Bereitstellung von gechirpter elektromagnetischer Strahlung
US7139446B2 (en) * 2005-02-17 2006-11-21 Metris Usa Inc. Compact fiber optic geometry for a counter-chirp FMCW coherent laser radar
EP1696201A1 (de) * 2005-02-23 2006-08-30 Leica Geosystems AG Phasenrauschkompensation für interferometrische Absolutdistanzmesser
US20060280415A1 (en) * 2005-03-17 2006-12-14 Anthony Slotwinski Precision length standard for coherent laser radar
WO2006102916A1 (de) * 2005-03-31 2006-10-05 Infineon Technologies Ag Verfahren zum ermitteln einer strahlungsleistung und eine belichtungsvorrichtung
US8451432B2 (en) 2005-06-09 2013-05-28 Analog-Modules, Inc. Laser spot tracking with off-axis angle detection
US7773202B2 (en) 2005-06-09 2010-08-10 Analog Modules, Inc. Laser spot tracker and target identifier
US7215413B2 (en) * 2005-06-24 2007-05-08 The Boeing Company Chirped synthetic wave laser radar apparatus and methods
US7292347B2 (en) * 2005-08-01 2007-11-06 Mitutoyo Corporation Dual laser high precision interferometer
US8018579B1 (en) 2005-10-21 2011-09-13 Apple Inc. Three-dimensional imaging and display system
CA2634033C (en) * 2005-12-14 2015-11-17 Digital Signal Corporation System and method for tracking eyeball motion
US8081670B2 (en) 2006-02-14 2011-12-20 Digital Signal Corporation System and method for providing chirped electromagnetic radiation
KR100871097B1 (ko) * 2007-01-08 2008-11-28 김태근 결맞음 주파수영역 반사파 계측법에 기초한 광영상 시스템
JP5019117B2 (ja) * 2007-11-14 2012-09-05 スタンレー電気株式会社 距離画像生成装置
JP5663130B2 (ja) * 2008-03-18 2015-02-04 アズビル株式会社 反射型光電スイッチおよび物体検出方法
US7821619B2 (en) * 2008-03-19 2010-10-26 Raytheon Company Rapid scan LADAR 3D imaging with compact digital beam formation
EP2128561B1 (de) * 2008-05-28 2014-10-29 Leica Geosystems AG Interferometrisches Distanzmessverfahren mit verzögertem Chirp-Signal und ebensolche Vorrichtung
EP2128560B1 (de) 2008-05-28 2015-07-01 Leica Geosystems AG Interferometrisches Distanzmessverfahren mit spektral trennbarem Doppelchirp und ebensolche Vorrichtung
EP2399150B1 (de) 2009-02-20 2020-10-07 StereoVision Imaging, Inc. System und verfahren zur erzeugung dreidimensionaler bilder mithilfe von lidar- und videomessungen
CN103261962B (zh) 2010-10-25 2018-04-27 株式会社尼康 用于检查或测量对象的设备、光学组件、方法,以及用于制造结构的方法
US8724095B2 (en) 2011-10-25 2014-05-13 Nikon Corporation Optical assembly for laser radar
US8823938B2 (en) * 2012-01-11 2014-09-02 The Aerospace Corporation System, apparatus, and method for tracking atmospheric differential absorption
US8937725B2 (en) 2012-06-14 2015-01-20 Nikon Corporation Measurement assembly including a metrology system and a pointer that directs the metrology system
US10119816B2 (en) 2012-11-21 2018-11-06 Nikon Metrology Nv Low drift reference for laser radar
US9618619B2 (en) 2012-11-21 2017-04-11 Nikon Corporation Radar systems with dual fiber coupled lasers
US9638799B2 (en) 2012-11-21 2017-05-02 Nikon Corporation Scan mirrors for laser radar
US20140149018A1 (en) * 2012-11-29 2014-05-29 Ford Global Technologies, Llc Engine with laser ignition and measurement
EP2806246B1 (de) * 2013-05-24 2019-11-20 Attocube Systems AG Doppellaserinterferometer
FR3020137B1 (fr) * 2014-04-22 2016-05-13 Msc & Sgcc Dispositif de controle dimensionnel de recipients par detection optique sans contact
US10151827B2 (en) 2014-07-25 2018-12-11 DSCG Solutions, Inc. Laser phase estimation and correction
US10386310B2 (en) 2014-08-29 2019-08-20 Aurora Solar Technologies (Canada) Inc. System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof
US10247538B2 (en) * 2014-10-29 2019-04-02 Bridger Photonics, Inc. Accurate chirped synthetic wavelength interferometer
US10677924B2 (en) 2015-06-23 2020-06-09 Mezmeriz, Inc. Portable panoramic laser mapping and/or projection system
DE102015110362B4 (de) * 2015-06-26 2018-01-18 n-hands GmbH & Co. KG Verfahren und Vorrichtung zur interferometrischen Absolutmessung einer Entfernung
KR20180063164A (ko) 2015-09-28 2018-06-11 바라자 피티와이 엘티디 공간 프로파일링 시스템 및 방법
US9970756B2 (en) 2015-10-06 2018-05-15 Bridger Photonics, Inc. High-sensitivity gas-mapping 3D imager and method of operation
EP3542209B1 (de) 2016-11-16 2022-03-23 Baraja Pty Ltd Optischer strahlrichter
CN110023025B (zh) * 2016-11-29 2020-11-13 松下知识产权经营株式会社 调芯方法
JP7069447B2 (ja) 2016-12-16 2022-05-18 バラハ ピーティーワイ リミテッド 環境の空間プロファイルの推定
US11422258B2 (en) 2017-03-16 2022-08-23 Bridger Photonics, Inc. FMCW LiDAR methods and apparatuses including examples having feedback loops
US10310085B2 (en) * 2017-07-07 2019-06-04 Mezmeriz Inc. Photonic integrated distance measuring pixel and method of distance measurement
US10578740B2 (en) 2017-08-23 2020-03-03 Mezmeriz Inc. Coherent optical distance measurement apparatus and method
JP7191399B2 (ja) 2017-08-25 2022-12-19 バラハ ピーティーワイ リミテッド 環境の空間プロファイルの推定
CN111386472B (zh) 2017-09-06 2024-01-09 博莱佳私人有限公司 光束导向器
US11422244B2 (en) 2017-09-25 2022-08-23 Bridger Photonics, Inc. Digitization systems and techniques and examples of use in FMCW LiDAR methods and apparatuses
WO2019070751A1 (en) 2017-10-02 2019-04-11 Bridger Photonics, Inc. PROCESSING TEMPORAL SEGMENTS OF LASER WAVE LENGTH FLUCTUATIONS AND EXAMPLES OF USE IN FREQUENCY MODULATED MAINTAINED WAVE LIDAR (FMCW) METHODS AND APPARATUSES
WO2019079448A1 (en) 2017-10-17 2019-04-25 Bridger Photonics, Inc. ROTARY OPTICAL REFLECTOR APPARATUSES AND METHODS
CA3082566A1 (en) 2017-11-14 2019-05-23 Bridger Photonics, Inc. Apparatuses and methods for anomalous gas concentration detection
WO2019186776A1 (ja) * 2018-03-28 2019-10-03 日本電気株式会社 測距装置及び制御方法
CN109253698B (zh) * 2018-09-21 2021-07-13 湖北工业大学 一种位移传感器
WO2020072484A1 (en) 2018-10-01 2020-04-09 Nikon Corporation An auxiliary focus measurement for a laser radar 3d scanner
US11768291B1 (en) 2019-04-11 2023-09-26 Ball Aerospace & Technologies Corp. High dynamic range ranging interferometer
DE102019135648A1 (de) * 2019-12-21 2021-06-24 Carl Zeiss Ag Vorrichtung und Verfahren zur Abstandsermittlung eines Objekts
DE102020213161A1 (de) 2020-10-19 2022-04-21 Robert Bosch Gesellschaft mit beschränkter Haftung LiDAR-System und Steuerverfahren mit Oberflächenrauheitsbestimmung
CN113671516B (zh) * 2021-08-05 2023-07-25 湖南大学 一种车灯测距装置及其方法
DE102021004609A1 (de) 2021-09-11 2023-03-16 Eques Consulting GmbH Vorrichtung und damit durchführbares Verfahren zur non-invasiven Konzentrationsbestimmung von Komponenten im menschlichen Blutkreislauf und Verwendung des Verfahrens.

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1402826A (fr) * 1965-10-29 1965-06-18 Geophysique Cie Gle Perfectionnements à la mesure des distances au moyen d'ondes électro-magnétiques
FR1483778A (fr) * 1966-02-26 1967-06-09 Snecma Procédé et dispositif de recherche de trajet optimal
US3523735A (en) * 1966-10-07 1970-08-11 Gen Dynamics Corp Interferometer system for distance measurement
US3589815A (en) * 1968-06-21 1971-06-29 Information Dev Corp Noncontact measuring probe
US3692414A (en) * 1971-02-24 1972-09-19 Harry L Hosterman Non-contacting measuring probe
IE39252B1 (en) * 1973-05-17 1978-08-30 Siemens Ag Improvements inor relating to distance measuring equipmen
US3860343A (en) * 1973-10-09 1975-01-14 Hughes Aircraft Co Transmit-receive subsystem for laser radars
US3909131A (en) * 1974-02-12 1975-09-30 United Technologies Corp Surface gauging by remote image tracking
JPS5156668A (ja) * 1974-11-14 1976-05-18 Oki Electric Ind Co Ltd Reezakyorikei
US3986774A (en) * 1975-05-08 1976-10-19 United Technologies Corporation Gauging surfaces by remotely tracking multiple images
US4209253A (en) * 1975-11-03 1980-06-24 Hughes John L Laser radar tracking system
US4167329A (en) * 1977-12-12 1979-09-11 Raytheon Company Focussed doppler radar
DE2804119A1 (de) * 1978-01-31 1979-08-02 Siemens Ag Interferometer mit einer spule aus einem einmode-wellenleiter
US4307398A (en) * 1978-02-21 1981-12-22 Zelex Tracking filter for use in hand held radar device
US4284351A (en) * 1978-06-12 1981-08-18 National Research Development Corporation Processing of digital signals
DE2834954A1 (de) * 1978-08-10 1980-02-21 Honeywell Gmbh Entfernungs- und geschwindigkeitsmesseinrichtung mit rauschfrequenzmoduliertem sender
US4340304A (en) * 1978-08-11 1982-07-20 Rockwell International Corporation Interferometric method and system
US4181432A (en) * 1978-10-18 1980-01-01 The Singer Company Velocity measuring system
FR2449897A1 (fr) * 1979-02-23 1980-09-19 Thomson Csf Gyrometre interferometrique a fibre optique particulierement adapte a la mesure de faibles vitesses de rotation
DE2908854C2 (de) * 1979-03-07 1986-04-17 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Entfernungsmeßgerät nach dem Impulslaufzeitverfahren
US4290697A (en) * 1979-07-26 1981-09-22 The United States Of America As Represented By The Secretary Of The Navy Method to eliminate fiber interferometer reflections
US4271412A (en) * 1979-10-15 1981-06-02 Raytheon Company Range tracker utilizing spectral analysis
FR2468099A1 (fr) * 1979-10-17 1981-04-30 Anvar Procede et appareil d'interferometrie laser a deux longueurs d'ondes
GB2066015B (en) * 1979-10-23 1984-02-15 South African Inventions Distance measurment
US4299491A (en) * 1979-12-11 1981-11-10 United Technologies Corporation Noncontact optical gauging system
US4397550A (en) * 1980-02-14 1983-08-09 Agency Of Industrial Science & Technology Laser doppler velocimeter
US4355899A (en) * 1980-05-22 1982-10-26 The United States Of America As Represented By The Secretary Of The Air Force Interferometric distance measurement method
US4321602A (en) * 1980-07-07 1982-03-23 Rca Corporation Frequency-tracking filter, as for use in FM-CW radar
US4355900A (en) * 1980-08-08 1982-10-26 The United States Of America As Represented By The Secretary Of The Air Force Self-calibrating interferometer
JPS5838880A (ja) * 1981-08-31 1983-03-07 Tokyo Optical Co Ltd 光波距離計
CA1176355A (en) * 1981-12-22 1984-10-16 Her Majesty In Right Of Canada As Represented By The Atomic Energy Of Ca Nada Limited Multiple measuring control volume laser doppler anemometer
US4533242A (en) * 1982-09-28 1985-08-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ranging system which compares an object-reflected component of a light beam to a reference component of the light beam
US4511800A (en) * 1983-03-28 1985-04-16 Rca Corporation Optical reflectance method for determining the surface roughness of materials in semiconductor processing
US4594000A (en) * 1983-04-04 1986-06-10 Ball Corporation Method and apparatus for optically measuring distance and velocity
US4611912A (en) * 1983-04-04 1986-09-16 Ball Corporation Method and apparatus for optically measuring distance and velocity
US4547685A (en) * 1983-10-21 1985-10-15 Advanced Micro Devices, Inc. Sense amplifier circuit for semiconductor memories
JPS60138484A (ja) * 1983-12-26 1985-07-23 Toshiba Corp 距離測定装置

Also Published As

Publication number Publication date
EP0164181B1 (de) 1993-08-04
JP2566907B2 (ja) 1996-12-25
DE3587492T2 (de) 1994-03-17
JPS60233581A (ja) 1985-11-20
US4830486A (en) 1989-05-16
EP0164181A3 (en) 1988-10-26
ATE92640T1 (de) 1993-08-15
EP0164181A2 (de) 1985-12-11

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