DE3684380D1 - Verfahren zum einebnen von halbleiteranordnungen. - Google Patents
Verfahren zum einebnen von halbleiteranordnungen.Info
- Publication number
- DE3684380D1 DE3684380D1 DE8686108755T DE3684380T DE3684380D1 DE 3684380 D1 DE3684380 D1 DE 3684380D1 DE 8686108755 T DE8686108755 T DE 8686108755T DE 3684380 T DE3684380 T DE 3684380T DE 3684380 D1 DE3684380 D1 DE 3684380D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor arrangements
- leveling
- leveling semiconductor
- arrangements
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/766,629 US4665007A (en) | 1985-08-19 | 1985-08-19 | Planarization process for organic filling of deep trenches |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3684380D1 true DE3684380D1 (de) | 1992-04-23 |
Family
ID=25077031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686108755T Expired - Fee Related DE3684380D1 (de) | 1985-08-19 | 1986-06-27 | Verfahren zum einebnen von halbleiteranordnungen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4665007A (de) |
EP (1) | EP0212149B1 (de) |
JP (1) | JPS6245043A (de) |
CA (1) | CA1233914A (de) |
DE (1) | DE3684380D1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4839311A (en) * | 1987-08-14 | 1989-06-13 | National Semiconductor Corporation | Etch back detection |
US5068959A (en) * | 1988-07-11 | 1991-12-03 | Digital Equipment Corporation | Method of manufacturing a thin film head |
US5091289A (en) * | 1990-04-30 | 1992-02-25 | International Business Machines Corporation | Process for forming multi-level coplanar conductor/insulator films employing photosensitive polyimide polymer compositions |
US5229257A (en) * | 1990-04-30 | 1993-07-20 | International Business Machines Corporation | Process for forming multi-level coplanar conductor/insulator films employing photosensitive polymide polymer compositions |
US5217831A (en) * | 1991-03-22 | 1993-06-08 | At&T Bell Laboratories | Sub-micron device fabrication |
US5276126A (en) * | 1991-11-04 | 1994-01-04 | Ocg Microelectronic Materials, Inc. | Selected novolak resin planarization layer for lithographic applications |
US5320864A (en) * | 1992-06-29 | 1994-06-14 | Lsi Logic Corporation | Sedimentary deposition of photoresist on semiconductor wafers |
US5330883A (en) * | 1992-06-29 | 1994-07-19 | Lsi Logic Corporation | Techniques for uniformizing photoresist thickness and critical dimension of underlying features |
US5618751A (en) * | 1996-05-23 | 1997-04-08 | International Business Machines Corporation | Method of making single-step trenches using resist fill and recess |
US5851899A (en) * | 1996-08-08 | 1998-12-22 | Siemens Aktiengesellschaft | Gapfill and planarization process for shallow trench isolation |
US6020256A (en) * | 1996-12-18 | 2000-02-01 | Lucent Technologies Inc. | Method of integrated circuit fabrication |
JP3373748B2 (ja) * | 1997-02-07 | 2003-02-04 | 株式会社東芝 | 半導体装置の製造方法 |
US6136665A (en) * | 1998-06-03 | 2000-10-24 | United Microelectronics Corp. | Method for forming a recess-free buffer layer |
US6221560B1 (en) | 1999-08-12 | 2001-04-24 | Chartered Semiconductor Manufacturing Ltd. | Method to enhance global planarization of silicon oxide surface for IC device fabrication |
US20040034134A1 (en) * | 1999-08-26 | 2004-02-19 | Lamb James E. | Crosslinkable fill compositions for uniformly protecting via and contact holes |
EP1212788B1 (de) * | 1999-08-26 | 2014-06-11 | Brewer Science | Verbessertes füllmaterial für ein dual-damaszene-verfahren |
US6482716B1 (en) * | 2000-01-11 | 2002-11-19 | Infineon Technologies North America Corp. | Uniform recess depth of recessed resist layers in trench structure |
JP3794470B2 (ja) * | 2001-04-18 | 2006-07-05 | Tdk株式会社 | 薄膜磁気ヘッド、磁気ヘッド装置及び磁気記録再生装置 |
US6586313B2 (en) * | 2001-11-29 | 2003-07-01 | Stmicroelectronics S.R.L. | Method of avoiding the effects of lack of uniformity in trench isolated integrated circuits |
US7323417B2 (en) * | 2004-09-21 | 2008-01-29 | Molecular Imprints, Inc. | Method of forming a recessed structure employing a reverse tone process |
US7205244B2 (en) * | 2004-09-21 | 2007-04-17 | Molecular Imprints | Patterning substrates employing multi-film layers defining etch-differential interfaces |
US7547504B2 (en) * | 2004-09-21 | 2009-06-16 | Molecular Imprints, Inc. | Pattern reversal employing thick residual layers |
US7977032B2 (en) * | 2005-02-11 | 2011-07-12 | International Business Machines Corporation | Method to create region specific exposure in a layer |
US20070020876A1 (en) * | 2005-07-19 | 2007-01-25 | Micron Technology, Inc. | Integrated circuitry, dynamic random access memory cells, electronic systems, and semiconductor processing methods |
US20070077763A1 (en) * | 2005-09-30 | 2007-04-05 | Molecular Imprints, Inc. | Deposition technique to planarize a multi-layer structure |
US7524758B2 (en) * | 2006-02-17 | 2009-04-28 | Toshiba America Electronic Components, Inc. | Interconnect structure and method for semiconductor device |
CN100461433C (zh) * | 2007-01-04 | 2009-02-11 | 北京京东方光电科技有限公司 | 一种tft阵列结构及其制造方法 |
US20080318420A1 (en) * | 2007-06-22 | 2008-12-25 | Wong Denny K | Two step chemical mechanical polish |
US11901189B2 (en) * | 2020-02-27 | 2024-02-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Ambient controlled two-step thermal treatment for spin-on coating layer planarization |
CN113517216B (zh) * | 2020-04-09 | 2023-10-17 | 长鑫存储技术有限公司 | 沟槽隔离结构制备方法和半导体器件制备方法 |
CN113380696B (zh) * | 2021-04-26 | 2022-11-15 | 南方科技大学 | 深槽的填充方法及深槽的填充结构 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2559389A (en) * | 1942-04-02 | 1951-07-03 | Keuffel & Esser Co | Method of producing precision images |
US3976524A (en) * | 1974-06-17 | 1976-08-24 | Ibm Corporation | Planarization of integrated circuit surfaces through selective photoresist masking |
DE2547792C3 (de) * | 1974-10-25 | 1978-08-31 | Hitachi, Ltd., Tokio | Verfahren zur Herstellung eines Halbleiterbauelementes |
JPS588579B2 (ja) * | 1975-08-20 | 1983-02-16 | 松下電器産業株式会社 | ハンドウタイソウチノセイゾウホウホウ |
US4104086A (en) * | 1977-08-15 | 1978-08-01 | International Business Machines Corporation | Method for forming isolated regions of silicon utilizing reactive ion etching |
US4139442A (en) * | 1977-09-13 | 1979-02-13 | International Business Machines Corporation | Reactive ion etching method for producing deep dielectric isolation in silicon |
US4284659A (en) * | 1980-05-12 | 1981-08-18 | Bell Telephone Laboratories | Insulation layer reflow |
JPS56160050A (en) * | 1980-05-14 | 1981-12-09 | Fujitsu Ltd | Semiconductor device and manufacture thereof |
US4389281A (en) * | 1980-12-16 | 1983-06-21 | International Business Machines Corporation | Method of planarizing silicon dioxide in semiconductor devices |
JPS58210634A (ja) * | 1982-05-31 | 1983-12-07 | Toshiba Corp | 半導体装置の製造方法 |
JPS6025247A (ja) * | 1983-07-21 | 1985-02-08 | Nec Corp | 半導体装置の製造方法 |
JPS6050939A (ja) * | 1983-08-30 | 1985-03-22 | Toshiba Corp | 半導体装置の製造方法 |
US4568601A (en) * | 1984-10-19 | 1986-02-04 | International Business Machines Corporation | Use of radiation sensitive polymerizable oligomers to produce polyimide negative resists and planarized dielectric components for semiconductor structures |
US4541169A (en) * | 1984-10-29 | 1985-09-17 | International Business Machines Corporation | Method for making studs for interconnecting metallization layers at different levels in a semiconductor chip |
-
1985
- 1985-08-19 US US06/766,629 patent/US4665007A/en not_active Expired - Fee Related
-
1986
- 1986-03-04 CA CA000503286A patent/CA1233914A/en not_active Expired
- 1986-06-18 JP JP61140400A patent/JPS6245043A/ja active Granted
- 1986-06-27 EP EP86108755A patent/EP0212149B1/de not_active Expired - Lifetime
- 1986-06-27 DE DE8686108755T patent/DE3684380D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA1233914A (en) | 1988-03-08 |
US4665007A (en) | 1987-05-12 |
EP0212149B1 (de) | 1992-03-18 |
JPS6245043A (ja) | 1987-02-27 |
EP0212149A2 (de) | 1987-03-04 |
JPH0344418B2 (de) | 1991-07-05 |
EP0212149A3 (en) | 1989-10-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3684380D1 (de) | Verfahren zum einebnen von halbleiteranordnungen. | |
DE3670641D1 (de) | Verfahren zum ableiten von polynukleotiden. | |
DE3684676D1 (de) | Verfahren zum herstellen von halbleitersubstraten. | |
DE3381509D1 (de) | Verfahren zum herstellen von halbleiteranordnungen. | |
DE3682928D1 (de) | Verfahren zum polymerisieren von aethylen. | |
DE3583111D1 (de) | Verfahren zum schneiden von halbleiterscheiben. | |
DE3581428D1 (de) | Verfahren zum ueberziehen von arzneiformen. | |
DE3680281D1 (de) | Verfahren zum verbinden von silikonbeschichtetem gewebe. | |
DE3672059D1 (de) | Verfahren zum komprimieren von zwei-pegeldaten. | |
AT380974B (de) | Verfahren zum gettern von halbleiterbauelementen | |
DE3673102D1 (de) | Verfahren zum stabilisieren von organopolysiloxanen. | |
DE3582856D1 (de) | Verfahren zum manipulieren von fluessigkeiten. | |
DE3481144D1 (de) | Verfahren zum identifizieren von objekten. | |
DE3778639D1 (de) | Verfahren zum stapelverbinden von draehten. | |
DE3767747D1 (de) | Verfahren zum bestimmen von abmessungen. | |
DE3579942D1 (de) | Verfahren zum loesbarmachen von interferon. | |
DE69009259D1 (de) | Verfahren zum Zusammensetzen von Halbleiteranordnungen. | |
DE3771670D1 (de) | Verfahren zum entschleimen von triglyceridoelen. | |
DE3578942D1 (de) | Verfahren zum haerten von gelatine. | |
DE3861647D1 (de) | Verfahren zum konditionieren von schlamm. | |
DE3667781D1 (de) | Verfahren zum verbinden von keramischen gegenstaenden. | |
DE3764026D1 (de) | Verfahren zum aufbereiten von gebrauchten primaerzellen. | |
DE3483424D1 (de) | Verfahren zum verseilen von profildraehten. | |
DE3778426D1 (de) | Verfahren zum verkleben von substraten. | |
DE3674711D1 (de) | Verfahren zum entwaessern von braunkohle. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |