DE3853649T2 - Vorrichtung zum Abtasten mit Lichtstrahlen. - Google Patents

Vorrichtung zum Abtasten mit Lichtstrahlen.

Info

Publication number
DE3853649T2
DE3853649T2 DE3853649T DE3853649T DE3853649T2 DE 3853649 T2 DE3853649 T2 DE 3853649T2 DE 3853649 T DE3853649 T DE 3853649T DE 3853649 T DE3853649 T DE 3853649T DE 3853649 T2 DE3853649 T2 DE 3853649T2
Authority
DE
Germany
Prior art keywords
scanning
light rays
rays
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3853649T
Other languages
English (en)
Other versions
DE3853649D1 (de
Inventor
Shigeru Dainippon Scree Sasada
Yoshihiro Dainippon Sc Kishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Publication of DE3853649D1 publication Critical patent/DE3853649D1/de
Application granted granted Critical
Publication of DE3853649T2 publication Critical patent/DE3853649T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
DE3853649T 1987-05-13 1988-05-11 Vorrichtung zum Abtasten mit Lichtstrahlen. Expired - Lifetime DE3853649T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62114705A JPH01237513A (ja) 1987-05-13 1987-05-13 光ビーム偏向走査装置

Publications (2)

Publication Number Publication Date
DE3853649D1 DE3853649D1 (de) 1995-06-01
DE3853649T2 true DE3853649T2 (de) 1995-08-31

Family

ID=14644556

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3853649T Expired - Lifetime DE3853649T2 (de) 1987-05-13 1988-05-11 Vorrichtung zum Abtasten mit Lichtstrahlen.

Country Status (4)

Country Link
US (1) US4946234A (de)
EP (1) EP0291035B1 (de)
JP (1) JPH01237513A (de)
DE (1) DE3853649T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3935239A1 (de) * 1988-10-21 1990-04-26 Asahi Optical Co Ltd Abtastgeraet
US5210635A (en) * 1989-04-17 1993-05-11 Dainippon Screen Mfg. Co., Ltd. Multibeam scanning system
GB2232781B (en) * 1989-05-19 1993-09-01 Ricoh Kk Image forming apparatus
JPH04283792A (ja) * 1991-03-13 1992-10-08 Pioneer Electron Corp ２次元情報表示装置
US5491328A (en) 1991-09-24 1996-02-13 Spectra-Physics Scanning Systems, Inc. Checkout counter scanner having multiple scanning surfaces
US5438187A (en) * 1991-11-01 1995-08-01 Spectra-Physics Scanning Systems, Inc. Multiple focus optical system for data reading applications
US5479011A (en) * 1992-12-18 1995-12-26 Spectra-Physics Scanning Systems, Inc. Variable focus optical system for data reading
US5347121A (en) * 1992-12-18 1994-09-13 Spectra-Physics Scanning Systems, Inc. Variable focus optical system for data reading
US5315429A (en) * 1993-01-04 1994-05-24 Xerox Corporation Micromechanical light modulator with optically interlaced output
JP2912556B2 (ja) * 1994-10-25 1999-06-28 富士通株式会社 像形成装置における露光方法及び像形成装置
US5633736A (en) * 1995-03-28 1997-05-27 Eastman Kodak Company Scan lens and an optical scanner system incorporating two deflectors
DE19829986C1 (de) * 1998-07-04 2000-03-30 Lis Laser Imaging Systems Gmbh Verfahren zur Direktbelichtung von Leiterplattensubstraten
US6469729B1 (en) * 1999-10-15 2002-10-22 Videojet Technologies Inc. Laser marking device and method for marking arcuate surfaces
DE10062683A1 (de) * 2000-12-15 2002-06-20 Heidelberger Druckmasch Ag Mehrstrahl-Abtastvorrichtung
US6621063B2 (en) 2001-06-21 2003-09-16 Psc Scanning, Inc. Omni-directional optical code reader using scheimpflug optics
EP1805779A4 (de) * 2004-10-01 2009-07-01 Univ Washington Umabbildungsverfahren zur verringerung von verzerrungen in bildern
US8929688B2 (en) 2004-10-01 2015-01-06 University Of Washington Remapping methods to reduce distortions in images
US7466466B2 (en) * 2005-05-11 2008-12-16 Gsi Group Corporation Optical scanning method and system and method for correcting optical aberrations introduced into the system by a beam deflector
JP5133600B2 (ja) * 2006-05-29 2013-01-30 オリンパス株式会社 レーザ走査型顕微鏡および顕微鏡観察方法
US7952602B2 (en) 2008-09-02 2011-05-31 Coherent, Inc. Wide field diode-laser marker with swinging projection-optics
US20100078857A1 (en) * 2008-09-29 2010-04-01 Coherent, Inc. Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage
US7952603B2 (en) * 2008-09-29 2011-05-31 Coherent, Inc. Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage
US8558859B2 (en) 2011-04-20 2013-10-15 Coherent, Inc. Laser printer with multiple laser-beam sources
JP6651768B2 (ja) * 2015-09-28 2020-02-19 株式会社ニコン パターン描画装置
TWI736621B (zh) * 2016-10-04 2021-08-21 日商尼康股份有限公司 圖案描繪裝置及圖案描繪方法
JP6583451B2 (ja) * 2018-03-01 2019-10-02 株式会社ニコン パターン描画装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1549714A (en) * 1975-05-12 1979-08-08 Ecrm Making halftone reproductions
GB2009558B (en) * 1977-12-05 1982-09-02 Street Graham S B Scanning apparatus
JPS54111362A (en) * 1978-02-20 1979-08-31 Canon Inc Two-dimensional scanning optical system
JPS561923A (en) * 1979-06-20 1981-01-10 Dainippon Screen Mfg Co Ltd Stabilizing method for quantity of light in optical system using light deflecting element
GB2088086B (en) * 1980-11-19 1984-05-10 Marconi Co Ltd Apparatus for accurately moving a body in accordance with a predetermined motion
DE3046584C2 (de) * 1980-12-11 1984-03-15 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Optisch-mechanischer Abtaster
JPS58100117A (ja) * 1981-12-09 1983-06-14 Konishiroku Photo Ind Co Ltd レ−ザビ−ム走査方法
JPS58211735A (ja) * 1982-06-04 1983-12-09 Canon Inc 複数ビ−ム走査装置
JPS5929220A (ja) * 1982-08-11 1984-02-16 Nec Corp 平面走査機構
JPS59218145A (ja) * 1983-05-26 1984-12-08 株式会社東芝 超音波検査装置
JPS6187123A (ja) * 1984-10-05 1986-05-02 Konishiroku Photo Ind Co Ltd 走査光学系
US4829175A (en) * 1985-12-05 1989-05-09 Fuji Photo Film Co., Ltd. Light beam scanning apparatus, method of correcting unevenness in scanning lines in light beam scanning apparatus, method of detecting deflection of rotational axis of light beam deflector and rotational axis deflection detecting device

Also Published As

Publication number Publication date
EP0291035A2 (de) 1988-11-17
DE3853649D1 (de) 1995-06-01
US4946234A (en) 1990-08-07
JPH0527086B2 (de) 1993-04-20
EP0291035A3 (de) 1991-01-30
JPH01237513A (ja) 1989-09-22
EP0291035B1 (de) 1995-04-26

Similar Documents

Publication Publication Date Title
DE3853649D1 (de) Vorrichtung zum Abtasten mit Lichtstrahlen.
DE68911330D1 (de) Vorrichtung mit einem Ausrichtungsgestell.
DE3861201D1 (de) Vorrichtung zum fuehren von optischen strahlen.
DE3765272D1 (de) Lichtempfindliche vorrichtung.
DE58902570D1 (de) Vorrichtung zum durchstrahlen von gegenstaenden mit faecherfoermiger strahlung.
DE68908915T2 (de) Bilderzeugungsgerät mit herausnehmbarer Prozesskassette.
DE69006376D1 (de) Sensorsystem mit optischer Versorgung.
DE3686163T2 (de) Vorrichtung zur strahlungsbilderkennung.
DE3774324D1 (de) Vorrichtung zur zusammenfuehrung von laserstrahlen.
DE68922417D1 (de) Elektro-optische Vorrichtung.
DE3889720T2 (de) Elektro-optische Vorrichtung.
DE68914319T2 (de) Verbessertes Lichtquellen-System mit Einrichtung zum Erzielen einer gleichmässigen Lichtverteilung.
DE3871703T2 (de) Lichtabtastvorrichtung.
DE3768824D1 (de) Vorrichtung zum auslesen von strahlungsbildern.
DE3784372T2 (de) Vorrichtung zum verschmelzen von optischen fibern mit polarisationserhaltung.
DE59102032D1 (de) Vorrichtung zum übertragen von laserlicht.
DE68910906T2 (de) Leuchtende Vorrichtung.
DE3889523T2 (de) Optisches Gerät.
DE69007059T2 (de) Vorrichtung zum Konzentrieren von Strahlen.
DE3852755D1 (de) Optischer Fühler mit mehreren Elementen.
DE3887387T2 (de) Vorrichtung zum Aufrauhen der Längsseite von Lichtleitern.
DE3862166D1 (de) Vorrichtung zum auslesen von strahlungsbildern.
DE3786502D1 (de) Vorrichtung zum nachweis von strahlungsbildern.
DE3888575T2 (de) Lichtemittierende Vorrichtung.
DE68905384T2 (de) Vorrichtung zur korrelation von lichtintensitaet.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition