DE3865582D1 - Laserinterferometer zur interferometrischen laengenmessung. - Google Patents

Laserinterferometer zur interferometrischen laengenmessung.

Info

Publication number
DE3865582D1
DE3865582D1 DE8888901550T DE3865582T DE3865582D1 DE 3865582 D1 DE3865582 D1 DE 3865582D1 DE 8888901550 T DE8888901550 T DE 8888901550T DE 3865582 T DE3865582 T DE 3865582T DE 3865582 D1 DE3865582 D1 DE 3865582D1
Authority
DE
Germany
Prior art keywords
laser
interferometer
laser interferometer
length measurement
signal detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888901550T
Other languages
English (en)
Inventor
Heinrich Hoefler
Eckhard Bergmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority to DE8888901550T priority Critical patent/DE3865582D1/de
Application granted granted Critical
Publication of DE3865582D1 publication Critical patent/DE3865582D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
    • H01S5/06209—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in single-section lasers
    • H01S5/0622—Controlling the frequency of the radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/06804—Stabilisation of laser output parameters by monitoring an external parameter, e.g. temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/06837—Stabilising otherwise than by an applied electric field or current, e.g. by controlling the temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687—Stabilising the frequency of the laser
DE8888901550T 1987-02-27 1988-02-12 Laserinterferometer zur interferometrischen laengenmessung. Expired - Fee Related DE3865582D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8888901550T DE3865582D1 (de) 1987-02-27 1988-02-12 Laserinterferometer zur interferometrischen laengenmessung.

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19873706347 DE3706347A1 (de) 1987-02-27 1987-02-27 Laserinterferometer zur interferometrischen laengenmessung
DE8888901550T DE3865582D1 (de) 1987-02-27 1988-02-12 Laserinterferometer zur interferometrischen laengenmessung.
PCT/DE1988/000069 WO1988006711A1 (fr) 1987-02-27 1988-02-12 Interferometre a laser pour la mesure des longueurs par interferometrie

Publications (1)

Publication Number Publication Date
DE3865582D1 true DE3865582D1 (de) 1991-11-21

Family

ID=6321908

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19873706347 Granted DE3706347A1 (de) 1987-02-27 1987-02-27 Laserinterferometer zur interferometrischen laengenmessung
DE8888901550T Expired - Fee Related DE3865582D1 (de) 1987-02-27 1988-02-12 Laserinterferometer zur interferometrischen laengenmessung.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19873706347 Granted DE3706347A1 (de) 1987-02-27 1987-02-27 Laserinterferometer zur interferometrischen laengenmessung

Country Status (6)

Country Link
US (1) US4984898A (de)
EP (1) EP0303642B1 (de)
JP (1) JP2534554B2 (de)
AT (1) ATE68591T1 (de)
DE (2) DE3706347A1 (de)
WO (1) WO1988006711A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3830962A1 (de) * 1988-09-12 1990-03-15 Spindler & Hoyer Kg Einrichtung zum messen von laengen oder winkeln mit einem interferometer
AT393763B (de) * 1989-03-21 1991-12-10 Tabarelli Werner Einrichtung zur konstanthaltung der luftwellenlaenge von laserlicht
DE59001953D1 (en) * 1989-06-07 1993-08-19 Tabarelli Werner Interferometeranordnung.
DE3932663A1 (de) * 1989-09-29 1991-04-18 Hommelwerke Gmbh Stehende-wellen-sensor
US5374991A (en) * 1991-03-29 1994-12-20 Gradient Lens Corporation Compact distance measuring interferometer
GB2268582B (en) * 1992-07-09 1995-12-20 Roke Manor Research Improvements in or relating to interferometers
JPH0634318A (ja) * 1992-07-14 1994-02-08 Nikon Corp 干渉計測装置
DE4230748C2 (de) * 1992-09-14 1997-01-16 Heidenhain Gmbh Dr Johannes Interferometrisches Meßverfahren sowie für seine Durchführung geeignete Laserinterferometeranordnung
US5585922A (en) * 1992-12-24 1996-12-17 Nikon Corporation Dual interferometer apparatus compensating for environmental turbulence or fluctuation and for quantization error
DE4314488C2 (de) * 1993-05-03 1997-11-20 Heidenhain Gmbh Dr Johannes Interferometrisches Meßverfahren für Absolutmessungen sowie dafür geeignete Laserinterferometeranordnung
DE4314486C2 (de) * 1993-05-03 1998-08-27 Heidenhain Gmbh Dr Johannes Absolutinterferometrisches Meßverfahren sowie dafür geeignete Laserinterferometeranordnung
US5430537A (en) * 1993-09-03 1995-07-04 Dynamics Research Corporation Light beam distance encoder
GB9320500D0 (en) * 1993-10-05 1993-11-24 Rensihaw Plc Interferometric distance measuring apparatus
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation
DE4427352C1 (de) * 1994-08-02 1996-01-18 Siemens Ag Verfahren zur hochauflösenden Abstandsmessung mittels FMCW-Laser-Radar
DE19520305C2 (de) * 1995-06-02 1997-04-17 Fraunhofer Ges Forschung Verfahren und Meßvorrichtung zur interferometrischen Abstandsmessung
US5991033A (en) * 1996-09-20 1999-11-23 Sparta, Inc. Interferometer with air turbulence compensation
US7224464B2 (en) * 1998-11-04 2007-05-29 Manning Christopher J Fourier-transform spectrometers
US6547397B1 (en) 2000-04-19 2003-04-15 Laser Projection Technologies, Inc. Apparatus and method for projecting a 3D image
JP5541713B2 (ja) * 2009-08-21 2014-07-09 キヤノン株式会社 レーザ干渉測長器、それを用いた加工装置および部品の製造方法
GB201013896D0 (en) * 2010-08-19 2010-10-06 Isis Innovation Apparatus and method for measuring distance
EP3835717A1 (de) 2019-12-11 2021-06-16 Taylor Hobson Limited Wellenlängenreferenzeinheit und interferometrische messvorrichtung

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1154646B (de) * 1960-10-18 1963-09-19 Jenoptik Jena Gmbh Vorrichtung zur kontinuierlichen Laengenmessung mittels Interferenzen in einem ueberdie Kohaerenzlaenge hinausgehenden Messbereich
NL279098A (de) * 1961-05-31
US3588254A (en) * 1968-09-13 1971-06-28 Gen Electric Frequency control for tunable laser utilized in a position control system
JPS596585A (ja) * 1982-07-05 1984-01-13 Ricoh Co Ltd 半導体レ−ザ出力制御方法
DE3235484A1 (de) * 1982-09-24 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Verfahren zur unterdrueckung einer stoerung bei der messung von signalverlaeufen mit einer korpuskularsonde und vorrichtung zur durchfuehrung eines solchen verfahrens
DE3425476A1 (de) * 1983-07-15 1985-01-24 WERO oHG Röth & Co, 6490 Schlüchtern Laengenmessvorrichtung nach dem zweistrahl-laser-interferometerprinzip
US4583228A (en) * 1983-11-21 1986-04-15 At&T Bell Laboratories Frequency stabilization of lasers
GB2154787B (en) * 1984-01-17 1987-04-01 Standard Telephones Cables Ltd Laser stabilisation circuit
DE3404963C2 (de) * 1984-02-11 1986-09-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Laser-Interferometer zur Längenmessung
DE3421213C2 (de) * 1984-06-07 1986-08-28 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-Zweifrequenz-Laserinterferometer
KR900002117B1 (ko) * 1985-03-28 1990-04-02 시부야 고오교오 가부시끼가이샤 레이저 광선을 이용한 거리측정방법과 장치
DE3528259A1 (de) * 1985-08-07 1987-02-19 Adolf Friedrich Prof D Fercher Verfahren und anordnung zur interferometrischen laengenmessung mit halbleiterlasern als lichtquelle

Also Published As

Publication number Publication date
JPH01502296A (ja) 1989-08-10
US4984898A (en) 1991-01-15
EP0303642A1 (de) 1989-02-22
ATE68591T1 (de) 1991-11-15
JP2534554B2 (ja) 1996-09-18
WO1988006711A1 (fr) 1988-09-07
DE3706347A1 (de) 1988-09-08
DE3706347C2 (de) 1989-04-13
EP0303642B1 (de) 1991-10-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DR. JOHANNES HEIDENHAIN GMBH, 83301 TRAUNREUT, DE

8339 Ceased/non-payment of the annual fee