DE3872803D1 - Selbstjustierende metallisierung einer halbleiteranordnung und verfahren zur selektiven wolframabscheidung. - Google Patents

Selbstjustierende metallisierung einer halbleiteranordnung und verfahren zur selektiven wolframabscheidung.

Info

Publication number
DE3872803D1
DE3872803D1 DE8888201742T DE3872803T DE3872803D1 DE 3872803 D1 DE3872803 D1 DE 3872803D1 DE 8888201742 T DE8888201742 T DE 8888201742T DE 3872803 T DE3872803 T DE 3872803T DE 3872803 D1 DE3872803 D1 DE 3872803D1
Authority
DE
Germany
Prior art keywords
metalization
self
adjusting
semiconductor arrangement
tungsten deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888201742T
Other languages
English (en)
Other versions
DE3872803T2 (de
Inventor
Janet Mary Deblasi
Der Putte Paulus Zacharias Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE3872803D1 publication Critical patent/DE3872803D1/de
Application granted granted Critical
Publication of DE3872803T2 publication Critical patent/DE3872803T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/32051—Deposition of metallic or metal-silicide layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76895—Local interconnects; Local pads, as exemplified by patent document EP0896365
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/903—Catalyst aided deposition
DE8888201742T 1987-08-27 1988-08-16 Selbstjustierende metallisierung einer halbleiteranordnung und verfahren zur selektiven wolframabscheidung. Expired - Fee Related DE3872803T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/090,301 US4822749A (en) 1987-08-27 1987-08-27 Self-aligned metallization for semiconductor device and process using selectively deposited tungsten

Publications (2)

Publication Number Publication Date
DE3872803D1 true DE3872803D1 (de) 1992-08-20
DE3872803T2 DE3872803T2 (de) 1993-02-18

Family

ID=22222186

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888201742T Expired - Fee Related DE3872803T2 (de) 1987-08-27 1988-08-16 Selbstjustierende metallisierung einer halbleiteranordnung und verfahren zur selektiven wolframabscheidung.

Country Status (5)

Country Link
US (1) US4822749A (de)
EP (1) EP0307021B1 (de)
JP (1) JP2598481B2 (de)
KR (1) KR970011263B1 (de)
DE (1) DE3872803T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4994402A (en) * 1987-06-26 1991-02-19 Hewlett-Packard Company Method of fabricating a coplanar, self-aligned contact structure in a semiconductor device
US4985371A (en) * 1988-12-09 1991-01-15 At&T Bell Laboratories Process for making integrated-circuit device metallization
US5358902A (en) * 1989-06-26 1994-10-25 U.S. Philips Corporation Method of producing conductive pillars in semiconductor device
GB2233820A (en) * 1989-06-26 1991-01-16 Philips Nv Providing an electrode on a semiconductor device
JPH03141645A (ja) * 1989-07-10 1991-06-17 Texas Instr Inc <Ti> ポリサイドによる局所的相互接続方法とその方法により製造された半導体素子
US4933303A (en) * 1989-07-25 1990-06-12 Standard Microsystems Corporation Method of making self-aligned tungsten interconnection in an integrated circuit
US4935376A (en) * 1989-10-12 1990-06-19 At&T Bell Laboratories Making silicide gate level runners
US5070029A (en) * 1989-10-30 1991-12-03 Motorola, Inc. Semiconductor process using selective deposition
US4987099A (en) * 1989-12-29 1991-01-22 North American Philips Corp. Method for selectively filling contacts or vias or various depths with CVD tungsten
US5166771A (en) * 1990-01-12 1992-11-24 Paradigm Technology, Inc. Self-aligning contact and interconnect structure
US5483104A (en) * 1990-01-12 1996-01-09 Paradigm Technology, Inc. Self-aligning contact and interconnect structure
US5118639A (en) * 1990-05-29 1992-06-02 Motorola, Inc. Process for the formation of elevated source and drain structures in a semiconductor device
US5156994A (en) * 1990-12-21 1992-10-20 Texas Instruments Incorporated Local interconnect method and structure
US5115296A (en) * 1991-01-14 1992-05-19 United Microelectronics Corporation Preferential oxidization self-aligned contact technology
US5280190A (en) * 1991-03-21 1994-01-18 Industrial Technology Research Institute Self aligned emitter/runner integrated circuit
US5313084A (en) * 1992-05-29 1994-05-17 Sgs-Thomson Microelectronics, Inc. Interconnect structure for an integrated circuit
DE4339919C2 (de) * 1993-11-23 1999-03-04 Siemens Ag Herstellverfahren für eine aus Silizid bestehende Anschlußfläche für ein Siliziumgebiet
US5945738A (en) * 1994-05-31 1999-08-31 Stmicroelectronics, Inc. Dual landing pad structure in an integrated circuit
US5633196A (en) * 1994-05-31 1997-05-27 Sgs-Thomson Microelectronics, Inc. Method of forming a barrier and landing pad structure in an integrated circuit
US5702979A (en) * 1994-05-31 1997-12-30 Sgs-Thomson Microelectronics, Inc. Method of forming a landing pad structure in an integrated circuit
US5956615A (en) * 1994-05-31 1999-09-21 Stmicroelectronics, Inc. Method of forming a metal contact to landing pad structure in an integrated circuit
FR2728390A1 (fr) * 1994-12-19 1996-06-21 Korea Electronics Telecomm Procede de formation d'un transistor a film mince
US5705427A (en) * 1994-12-22 1998-01-06 Sgs-Thomson Microelectronics, Inc. Method of forming a landing pad structure in an integrated circuit
JP4156044B2 (ja) * 1994-12-22 2008-09-24 エスティーマイクロエレクトロニクス，インコーポレイテッド 集積回路におけるランディングパッド構成体の製造方法
US5480830A (en) * 1995-04-04 1996-01-02 Taiwan Semiconductor Manufacturing Company Ltd. Method of making depleted gate transistor for high voltage operation
US5654860A (en) * 1995-08-16 1997-08-05 Micron Technology, Inc. Well resistor for ESD protection of CMOS circuits
AU1123597A (en) * 1995-11-30 1997-06-19 Micron Technology, Inc. Structure for esd protection in semiconductor chips
US6507074B2 (en) 1995-11-30 2003-01-14 Micron Technology, Inc. Structure for ESD protection in semiconductor chips
US5719071A (en) * 1995-12-22 1998-02-17 Sgs-Thomson Microelectronics, Inc. Method of forming a landing pad sturcture in an integrated circuit
US5804846A (en) * 1996-05-28 1998-09-08 Harris Corporation Process for forming a self-aligned raised source/drain MOS device and device therefrom
US6316325B1 (en) * 1998-11-13 2001-11-13 United Microelectronics Corp. Method for fabricating a thin film resistor
US6392302B1 (en) 1998-11-20 2002-05-21 Micron Technology, Inc. Polycide structure and method for forming polycide structure
US8754416B2 (en) * 2005-11-25 2014-06-17 The Hong Hong University of Science and Technology Method for fabrication of active-matrix display panels
CN103871882B (zh) * 2012-12-17 2016-09-28 中芯国际集成电路制造(上海)有限公司 半导体装置及其制造方法
US20150171321A1 (en) 2013-12-13 2015-06-18 Micron Technology, Inc. Methods of forming metal on inhomogeneous surfaces and structures incorporating metal on inhomogeneous surfaces
US9984919B1 (en) 2017-07-31 2018-05-29 Globalfoundries Inc. Inverted damascene interconnect structures

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1399163A (en) * 1972-11-08 1975-06-25 Ferranti Ltd Methods of manufacturing semiconductor devices
US4445266A (en) * 1981-08-07 1984-05-01 Mostek Corporation MOSFET Fabrication process for reducing overlap capacitance and lowering interconnect impedance
JPS60130844A (ja) * 1983-12-20 1985-07-12 Toshiba Corp 半導体装置の製造方法
JPS60240123A (ja) * 1984-05-15 1985-11-29 Fujitsu Ltd 半導体装置の製造方法
JPS60245256A (ja) * 1984-05-21 1985-12-05 Fujitsu Ltd 半導体装置
JPH0682758B2 (ja) * 1984-06-15 1994-10-19 ヒューレット・パッカード・カンパニー 半導体集積回路の形成方法
US4589196A (en) * 1984-10-11 1986-05-20 Texas Instruments Incorporated Contacts for VLSI devices using direct-reacted silicide
DE3650077T2 (de) * 1985-03-15 1995-02-23 Hewlett Packard Co Metallisches Verbindungssystem mit einer ebenen Fläche.
DE3683679D1 (de) * 1985-04-26 1992-03-12 Fujitsu Ltd Verfahren zur herstellung einer kontaktanordnung fuer eine halbleiteranordnung.
US4648175A (en) * 1985-06-12 1987-03-10 Ncr Corporation Use of selectively deposited tungsten for contact formation and shunting metallization
US4630357A (en) * 1985-08-02 1986-12-23 Ncr Corporation Method for forming improved contacts between interconnect layers of an integrated circuit
US4660276A (en) * 1985-08-12 1987-04-28 Rca Corporation Method of making a MOS field effect transistor in an integrated circuit
US4751198A (en) * 1985-09-11 1988-06-14 Texas Instruments Incorporated Process for making contacts and interconnections using direct-reacted silicide
US4764484A (en) * 1987-10-08 1988-08-16 Standard Microsystems Corporation Method for fabricating self-aligned, conformal metallization of semiconductor wafer

Also Published As

Publication number Publication date
EP0307021A1 (de) 1989-03-15
JP2598481B2 (ja) 1997-04-09
KR890004404A (ko) 1989-04-21
EP0307021B1 (de) 1992-07-15
KR970011263B1 (ko) 1997-07-08
DE3872803T2 (de) 1993-02-18
US4822749A (en) 1989-04-18
JPS6472524A (en) 1989-03-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee