DE3878559D1 - Analog/digital-umwandler, hergestellt nach der ionenstrahltechnologie. - Google Patents

Analog/digital-umwandler, hergestellt nach der ionenstrahltechnologie.

Info

Publication number
DE3878559D1
DE3878559D1 DE8989901438T DE3878559T DE3878559D1 DE 3878559 D1 DE3878559 D1 DE 3878559D1 DE 8989901438 T DE8989901438 T DE 8989901438T DE 3878559 T DE3878559 T DE 3878559T DE 3878559 D1 DE3878559 D1 DE 3878559D1
Authority
DE
Germany
Prior art keywords
analog
digital converter
radiation technology
ion radiation
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989901438T
Other languages
English (en)
Other versions
DE3878559T2 (de
Inventor
E Larson
F Jensen
H Walden
E Schmitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE3878559D1 publication Critical patent/DE3878559D1/de
Publication of DE3878559T2 publication Critical patent/DE3878559T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters
    • H03M1/34Analogue value compared with reference values
    • H03M1/36Analogue value compared with reference values simultaneously only, i.e. parallel type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78696Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0684Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
    • H01L29/0692Surface layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/7838Field effect transistors with field effect produced by an insulated gate without inversion channel, e.g. buried channel lateral MISFETs, normally-on lateral MISFETs, depletion-mode lateral MISFETs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78606Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
    • H01L29/78612Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing the kink- or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/786Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78651Silicon transistors
    • H01L29/78654Monocrystalline silicon transistors
    • H01L29/78657SOS transistors
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters
    • H03M1/34Analogue value compared with reference values
    • H03M1/36Analogue value compared with reference values simultaneously only, i.e. parallel type
    • H03M1/361Analogue value compared with reference values simultaneously only, i.e. parallel type having a separate comparator and reference value for each quantisation level, i.e. full flash converter type
DE8989901438T 1988-02-08 1988-12-23 Analog/digital-umwandler, hergestellt nach der ionenstrahltechnologie. Expired - Fee Related DE3878559T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/153,750 US4872010A (en) 1988-02-08 1988-02-08 Analog-to-digital converter made with focused ion beam technology
PCT/US1988/004693 WO1989007367A2 (en) 1988-02-08 1988-12-23 Analog-to-digital converter made with focused ion beam technology

Publications (2)

Publication Number Publication Date
DE3878559D1 true DE3878559D1 (de) 1993-03-25
DE3878559T2 DE3878559T2 (de) 1993-06-03

Family

ID=22548585

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989901438T Expired - Fee Related DE3878559T2 (de) 1988-02-08 1988-12-23 Analog/digital-umwandler, hergestellt nach der ionenstrahltechnologie.

Country Status (6)

Country Link
US (1) US4872010A (de)
EP (1) EP0353271B1 (de)
JP (1) JPH02503255A (de)
KR (1) KR920006252B1 (de)
DE (1) DE3878559T2 (de)
WO (1) WO1989007367A2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5237326A (en) * 1989-02-02 1993-08-17 Samsung Electronics Co., Ltd. Flash type analog-to-digital converter having MOS comparators
JPH04127467A (ja) * 1990-06-04 1992-04-28 Mitsubishi Electric Corp 半導体集積回路装置
US5030952A (en) * 1990-12-26 1991-07-09 Motorola, Inc. Sigma-delta type analog to digital converter with trimmed output and feedback
US5327131A (en) * 1991-11-07 1994-07-05 Kawasaki Steel Corporation Parallel A/D converter having comparator threshold voltages defined by MOS transistor geometries
FR2694449B1 (fr) * 1992-07-09 1994-10-28 France Telecom Composant électronique multifonctions, notamment élément à résistance dynamique négative, et procédé de fabrication correspondant.
US5864162A (en) * 1993-07-12 1999-01-26 Peregrine Seimconductor Corporation Apparatus and method of making a self-aligned integrated resistor load on ultrathin silicon on sapphire
US5572040A (en) * 1993-07-12 1996-11-05 Peregrine Semiconductor Corporation High-frequency wireless communication system on a single ultrathin silicon on sapphire chip
US5930638A (en) * 1993-07-12 1999-07-27 Peregrine Semiconductor Corp. Method of making a low parasitic resistor on ultrathin silicon on insulator
US5863823A (en) * 1993-07-12 1999-01-26 Peregrine Semiconductor Corporation Self-aligned edge control in silicon on insulator
US5416043A (en) * 1993-07-12 1995-05-16 Peregrine Semiconductor Corporation Minimum charge FET fabricated on an ultrathin silicon on sapphire wafer
US5602551A (en) * 1993-10-06 1997-02-11 Nippondenso Co., Ltd. Analog-to-digital converter with silicon-on-insulator structure
US5581100A (en) * 1994-08-30 1996-12-03 International Rectifier Corporation Trench depletion MOSFET
JPH08125152A (ja) 1994-10-28 1996-05-17 Canon Inc 半導体装置、それを用いた相関演算装置、ad変換器、da変換器、信号処理システム
JPH09129864A (ja) 1995-10-30 1997-05-16 Canon Inc 半導体装置及びそれを用いた半導体回路、相関演算装置、信号処理システム
EP0977265A1 (de) * 1998-07-30 2000-02-02 STMicroelectronics S.r.l. Schaltkreis mit einem parasitären Transistor hoher Einsatzspannung
AU3702200A (en) * 1999-02-19 2000-09-04 Penn State Research Foundation, The Voltage quantizer tree circuit
JP4736313B2 (ja) * 2002-09-10 2011-07-27 日本電気株式会社 薄膜半導体装置
US6972702B1 (en) 2004-06-15 2005-12-06 Hrl Laboratories, Llc 1-Of-N A/D converter
US7215268B1 (en) * 2005-10-14 2007-05-08 Freescale Semiconductor, Inc. Signal converters with multiple gate devices
US7279997B2 (en) 2005-10-14 2007-10-09 Freescale Semiconductor, Inc. Voltage controlled oscillator with a multiple gate transistor and method therefor
US7256657B2 (en) * 2005-10-14 2007-08-14 Freescale Semiconductor, Inc. Voltage controlled oscillator having digitally controlled phase adjustment and method therefor
US7773010B2 (en) * 2006-01-31 2010-08-10 Imec A/D converter comprising a voltage comparator device
KR20080075737A (ko) 2007-02-13 2008-08-19 삼성전자주식회사 스위치드 커패시터 회로를 이용한 아날로그 디지털 변환방법 및 장치
WO2009115990A2 (en) * 2008-03-19 2009-09-24 Nxp B.V. Flash analog-to-digital converter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7805068A (nl) * 1978-05-11 1979-11-13 Philips Nv Drempelschakeling.
US4212684A (en) * 1978-11-20 1980-07-15 Ncr Corporation CISFET Processing including simultaneous doping of silicon components and FET channels
US4420743A (en) * 1980-02-11 1983-12-13 Rca Corporation Voltage comparator using unequal gate width FET's

Also Published As

Publication number Publication date
WO1989007367A2 (en) 1989-08-10
EP0353271B1 (de) 1993-02-17
DE3878559T2 (de) 1993-06-03
KR900701098A (ko) 1990-08-17
WO1989007367A3 (en) 1989-10-05
EP0353271A1 (de) 1990-02-07
KR920006252B1 (en) 1992-08-01
US4872010A (en) 1989-10-03
JPH02503255A (ja) 1990-10-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee