DE3880886T2 - Sol-Gel-Verfahren zur Herstellung von Gläsern mit ultraniedriger Ausdehnung. - Google Patents
Sol-Gel-Verfahren zur Herstellung von Gläsern mit ultraniedriger Ausdehnung.Info
- Publication number
- DE3880886T2 DE3880886T2 DE88301239T DE3880886T DE3880886T2 DE 3880886 T2 DE3880886 T2 DE 3880886T2 DE 88301239 T DE88301239 T DE 88301239T DE 3880886 T DE3880886 T DE 3880886T DE 3880886 T2 DE3880886 T2 DE 3880886T2
- Authority
- DE
- Germany
- Prior art keywords
- sol
- ultra
- manufacture
- gel process
- low expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000003980 solgel method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/30—Doped silica-based glasses containing metals
- C03C2201/40—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03C2201/42—Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn containing titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/20—Wet processes, e.g. sol-gel process
- C03C2203/24—Wet processes, e.g. sol-gel process using alkali silicate solutions
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/055,632 US4786618A (en) | 1987-05-29 | 1987-05-29 | Sol-gel method for making ultra-low expansion glass |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3880886D1 DE3880886D1 (de) | 1993-06-17 |
DE3880886T2 true DE3880886T2 (de) | 1993-12-23 |
Family
ID=21999145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88301239T Expired - Fee Related DE3880886T2 (de) | 1987-05-29 | 1988-02-15 | Sol-Gel-Verfahren zur Herstellung von Gläsern mit ultraniedriger Ausdehnung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4786618A (de) |
EP (1) | EP0293064B1 (de) |
JP (1) | JPS63307140A (de) |
DE (1) | DE3880886T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4978641A (en) * | 1988-08-17 | 1990-12-18 | Mitsubishi Kasei Corporation | Porous glass and process for its production |
DE3914850A1 (de) * | 1989-05-05 | 1990-11-08 | Basf Ag | Thermisches isoliermaterial auf der basis von pigmenthaltigen kieselsaeureaerogelen |
BE1004293A3 (fr) * | 1989-07-20 | 1992-10-27 | Solvay | Procede de fabrication d'un composite d'oxydes metalliques, poudres composites d'oxydes metalliques et materiaux ceramiques. |
US5023208A (en) * | 1989-12-19 | 1991-06-11 | Orion Laboratories, Inc. | Sol-gel process for glass and ceramic articles |
US5264408A (en) * | 1990-03-23 | 1993-11-23 | University Of South Carolina | Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same |
US5171911A (en) * | 1990-03-23 | 1992-12-15 | University Of South Carolina | Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same |
US5492964A (en) * | 1990-03-23 | 1996-02-20 | University Of South Carolina | Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same |
US5047380A (en) * | 1990-03-23 | 1991-09-10 | University Of South Carolina | Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same |
US5200237A (en) * | 1990-10-01 | 1993-04-06 | Associated Universities, Inc. | Solid-gel precursor solutions and methods for the fabrication of polymetallicsiloxane coating films |
US5110863A (en) * | 1990-10-01 | 1992-05-05 | Associated Universities, Inc. | Solid-gel precursor solutions and methods for the fabrication of polymetallicsiloxane coating films |
US5243769A (en) * | 1992-06-26 | 1993-09-14 | Yazaki Corporation | Process for rapidly drying a wet, porous gel monolith |
IT1256359B (it) * | 1992-09-01 | 1995-12-01 | Enichem Spa | Procedimento per la preparazione di componenti e dispositivi ottici indimensioni finali o quasi finali, e prodotti cosi' ottenuti |
US6007685A (en) * | 1997-06-19 | 1999-12-28 | Lucent Technologies Inc. | Deposition of highly doped silicon dioxide films |
US6383421B1 (en) | 1998-08-20 | 2002-05-07 | L. Myles Phipps | Method of manufacturing a gas burning artificial log from sol-gel compositions |
US6360564B1 (en) | 2000-01-20 | 2002-03-26 | Corning Incorporated | Sol-gel method of preparing powder for use in forming glass |
EP1195360A1 (de) * | 2000-09-01 | 2002-04-10 | Degussa AG | Verfahren zur Herstellung von SiO2-TiO2-Gläsern mit geringem thermischen Ausdehnungskoeffizient |
DE10208371A1 (de) * | 2002-02-27 | 2003-09-11 | Degussa | Dispersion, enthaltend Silicium-Titan-Mischoxidpulver, daraus herstellte Grünkörper und Glasformkörper |
JP2004131373A (ja) * | 2002-09-09 | 2004-04-30 | Corning Inc | シリカ・チタニア極端紫外線光学素子の製造方法 |
JP5367204B2 (ja) * | 2003-04-03 | 2013-12-11 | 旭硝子株式会社 | TiO2を含有するシリカガラスおよびEUVリソグラフィ用光学部材 |
US7155936B2 (en) * | 2003-08-08 | 2007-01-02 | Corning Incorporated | Doped silica glass articles and methods of forming doped silica glass boules and articles |
JP4492123B2 (ja) * | 2004-01-05 | 2010-06-30 | 旭硝子株式会社 | シリカガラス |
DE102004024808B4 (de) * | 2004-05-17 | 2006-11-09 | Heraeus Quarzglas Gmbh & Co. Kg | Quarzglasrohling für ein optisches Bauteil zur Übertragung extrem kurzwelliger ultravioletter Strahlung |
JP4781003B2 (ja) * | 2005-04-28 | 2011-09-28 | 信越石英株式会社 | ナノインプリントスタンパー用シリカ・チタニアガラス |
DE102007029403A1 (de) * | 2006-06-28 | 2008-01-03 | Corning Incorporated | Glas mit sehr geringer Ausdehnung und Verfahren zu dessen Herstellung |
KR101323303B1 (ko) * | 2012-02-08 | 2013-10-30 | 주식회사 화승티엔씨 | 다공성 복합화합물 및 그 제조방법, 다공성 복합화합물을 함유한 시멘트 조성물 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1596839B1 (de) * | 1966-05-07 | 1970-11-26 | Jenaer Glaswerk Schott & Gen | Verfahren zur Herstellung von Formkoerpern aus Glaesern bei einer Temperatur unterhalb der ueblichen Schmelztemperatur |
US3678144A (en) * | 1970-06-12 | 1972-07-18 | Corning Glass Works | Silicate bodies containing coprecipitated oxides |
EP0107284B1 (de) * | 1982-08-13 | 1988-11-23 | United Kingdom Atomic Energy Authority | Verfahren zur Herstellung von Dispersionen und Gelen |
-
1987
- 1987-05-29 US US07/055,632 patent/US4786618A/en not_active Expired - Lifetime
-
1988
- 1988-02-15 DE DE88301239T patent/DE3880886T2/de not_active Expired - Fee Related
- 1988-02-15 EP EP88301239A patent/EP0293064B1/de not_active Expired - Lifetime
- 1988-03-01 JP JP63048533A patent/JPS63307140A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0293064B1 (de) | 1993-05-12 |
US4786618A (en) | 1988-11-22 |
EP0293064A2 (de) | 1988-11-30 |
DE3880886D1 (de) | 1993-06-17 |
JPS63307140A (ja) | 1988-12-14 |
EP0293064A3 (en) | 1989-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8339 | Ceased/non-payment of the annual fee |