DE3880886T2 - Sol-Gel-Verfahren zur Herstellung von Gläsern mit ultraniedriger Ausdehnung. - Google Patents

Sol-Gel-Verfahren zur Herstellung von Gläsern mit ultraniedriger Ausdehnung.

Info

Publication number
DE3880886T2
DE3880886T2 DE88301239T DE3880886T DE3880886T2 DE 3880886 T2 DE3880886 T2 DE 3880886T2 DE 88301239 T DE88301239 T DE 88301239T DE 3880886 T DE3880886 T DE 3880886T DE 3880886 T2 DE3880886 T2 DE 3880886T2
Authority
DE
Germany
Prior art keywords
sol
ultra
manufacture
gel process
low expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88301239T
Other languages
English (en)
Other versions
DE3880886D1 (de
Inventor
Robert Donald Shoup
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Glass Works
Original Assignee
Corning Glass Works
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Glass Works filed Critical Corning Glass Works
Application granted granted Critical
Publication of DE3880886D1 publication Critical patent/DE3880886D1/de
Publication of DE3880886T2 publication Critical patent/DE3880886T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/12Other methods of shaping glass by liquid-phase reaction processes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/06Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00Glass compositions
    • C03C2201/06Doped silica-based glasses
    • C03C2201/30Doped silica-based glasses containing metals
    • C03C2201/40Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03C2201/42Doped silica-based glasses containing metals containing transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn containing titanium
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00Production processes
    • C03C2203/20Wet processes, e.g. sol-gel process
    • C03C2203/24Wet processes, e.g. sol-gel process using alkali silicate solutions
DE88301239T 1987-05-29 1988-02-15 Sol-Gel-Verfahren zur Herstellung von Gläsern mit ultraniedriger Ausdehnung. Expired - Fee Related DE3880886T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/055,632 US4786618A (en) 1987-05-29 1987-05-29 Sol-gel method for making ultra-low expansion glass

Publications (2)

Publication Number Publication Date
DE3880886D1 DE3880886D1 (de) 1993-06-17
DE3880886T2 true DE3880886T2 (de) 1993-12-23

Family

ID=21999145

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88301239T Expired - Fee Related DE3880886T2 (de) 1987-05-29 1988-02-15 Sol-Gel-Verfahren zur Herstellung von Gläsern mit ultraniedriger Ausdehnung.

Country Status (4)

Country Link
US (1) US4786618A (de)
EP (1) EP0293064B1 (de)
JP (1) JPS63307140A (de)
DE (1) DE3880886T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4978641A (en) * 1988-08-17 1990-12-18 Mitsubishi Kasei Corporation Porous glass and process for its production
DE3914850A1 (de) * 1989-05-05 1990-11-08 Basf Ag Thermisches isoliermaterial auf der basis von pigmenthaltigen kieselsaeureaerogelen
BE1004293A3 (fr) * 1989-07-20 1992-10-27 Solvay Procede de fabrication d'un composite d'oxydes metalliques, poudres composites d'oxydes metalliques et materiaux ceramiques.
US5023208A (en) * 1989-12-19 1991-06-11 Orion Laboratories, Inc. Sol-gel process for glass and ceramic articles
US5264408A (en) * 1990-03-23 1993-11-23 University Of South Carolina Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same
US5171911A (en) * 1990-03-23 1992-12-15 University Of South Carolina Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same
US5492964A (en) * 1990-03-23 1996-02-20 University Of South Carolina Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same
US5047380A (en) * 1990-03-23 1991-09-10 University Of South Carolina Ceramic materials, method of preparing the same and hydrogenation and oxidation processes using the same
US5200237A (en) * 1990-10-01 1993-04-06 Associated Universities, Inc. Solid-gel precursor solutions and methods for the fabrication of polymetallicsiloxane coating films
US5110863A (en) * 1990-10-01 1992-05-05 Associated Universities, Inc. Solid-gel precursor solutions and methods for the fabrication of polymetallicsiloxane coating films
US5243769A (en) * 1992-06-26 1993-09-14 Yazaki Corporation Process for rapidly drying a wet, porous gel monolith
IT1256359B (it) * 1992-09-01 1995-12-01 Enichem Spa Procedimento per la preparazione di componenti e dispositivi ottici indimensioni finali o quasi finali, e prodotti cosi' ottenuti
US6007685A (en) * 1997-06-19 1999-12-28 Lucent Technologies Inc. Deposition of highly doped silicon dioxide films
US6383421B1 (en) 1998-08-20 2002-05-07 L. Myles Phipps Method of manufacturing a gas burning artificial log from sol-gel compositions
US6360564B1 (en) 2000-01-20 2002-03-26 Corning Incorporated Sol-gel method of preparing powder for use in forming glass
EP1195360A1 (de) * 2000-09-01 2002-04-10 Degussa AG Verfahren zur Herstellung von SiO2-TiO2-Gläsern mit geringem thermischen Ausdehnungskoeffizient
DE10208371A1 (de) * 2002-02-27 2003-09-11 Degussa Dispersion, enthaltend Silicium-Titan-Mischoxidpulver, daraus herstellte Grünkörper und Glasformkörper
JP2004131373A (ja) * 2002-09-09 2004-04-30 Corning Inc シリカ・チタニア極端紫外線光学素子の製造方法
JP5367204B2 (ja) * 2003-04-03 2013-12-11 旭硝子株式会社 TiO2を含有するシリカガラスおよびEUVリソグラフィ用光学部材
US7155936B2 (en) * 2003-08-08 2007-01-02 Corning Incorporated Doped silica glass articles and methods of forming doped silica glass boules and articles
JP4492123B2 (ja) * 2004-01-05 2010-06-30 旭硝子株式会社 シリカガラス
DE102004024808B4 (de) * 2004-05-17 2006-11-09 Heraeus Quarzglas Gmbh & Co. Kg Quarzglasrohling für ein optisches Bauteil zur Übertragung extrem kurzwelliger ultravioletter Strahlung
JP4781003B2 (ja) * 2005-04-28 2011-09-28 信越石英株式会社 ナノインプリントスタンパー用シリカ・チタニアガラス
DE102007029403A1 (de) * 2006-06-28 2008-01-03 Corning Incorporated Glas mit sehr geringer Ausdehnung und Verfahren zu dessen Herstellung
KR101323303B1 (ko) * 2012-02-08 2013-10-30 주식회사 화승티엔씨 다공성 복합화합물 및 그 제조방법, 다공성 복합화합물을 함유한 시멘트 조성물

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1596839B1 (de) * 1966-05-07 1970-11-26 Jenaer Glaswerk Schott & Gen Verfahren zur Herstellung von Formkoerpern aus Glaesern bei einer Temperatur unterhalb der ueblichen Schmelztemperatur
US3678144A (en) * 1970-06-12 1972-07-18 Corning Glass Works Silicate bodies containing coprecipitated oxides
EP0107284B1 (de) * 1982-08-13 1988-11-23 United Kingdom Atomic Energy Authority Verfahren zur Herstellung von Dispersionen und Gelen

Also Published As

Publication number Publication date
EP0293064B1 (de) 1993-05-12
US4786618A (en) 1988-11-22
EP0293064A2 (de) 1988-11-30
DE3880886D1 (de) 1993-06-17
JPS63307140A (ja) 1988-12-14
EP0293064A3 (en) 1989-09-13

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee