DE3884292T2 - Bipolarer Transistor mit Heteroübergang. - Google Patents

Bipolarer Transistor mit Heteroübergang.

Info

Publication number
DE3884292T2
DE3884292T2 DE88305978T DE3884292T DE3884292T2 DE 3884292 T2 DE3884292 T2 DE 3884292T2 DE 88305978 T DE88305978 T DE 88305978T DE 3884292 T DE3884292 T DE 3884292T DE 3884292 T2 DE3884292 T2 DE 3884292T2
Authority
DE
Germany
Prior art keywords
heterojunction
bipolar transistor
bipolar
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88305978T
Other languages
English (en)
Other versions
DE3884292D1 (de
Inventor
Riichi C O Patent Divisi Katoh
Mamoru C O Patent Divis Kurata
Kouhei C O Patent Div Morizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE3884292D1 publication Critical patent/DE3884292D1/de
Application granted granted Critical
Publication of DE3884292T2 publication Critical patent/DE3884292T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73Bipolar junction transistors
    • H01L29/737Hetero-junction transistors
    • H01L29/7371Vertical transistors
DE88305978T 1987-07-02 1988-06-29 Bipolarer Transistor mit Heteroübergang. Expired - Fee Related DE3884292T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16586187 1987-07-02
JP63147374A JP2542676B2 (ja) 1987-07-02 1988-06-15 ヘテロ接合バイポ―ラトランジスタ

Publications (2)

Publication Number Publication Date
DE3884292D1 DE3884292D1 (de) 1993-10-28
DE3884292T2 true DE3884292T2 (de) 1994-02-17

Family

ID=26477940

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88305978T Expired - Fee Related DE3884292T2 (de) 1987-07-02 1988-06-29 Bipolarer Transistor mit Heteroübergang.

Country Status (4)

Country Link
US (1) US4933732A (de)
EP (1) EP0297886B1 (de)
JP (1) JP2542676B2 (de)
DE (1) DE3884292T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2851044B2 (ja) * 1988-03-30 1999-01-27 株式会社東芝 半導体装置の製造方法
US5198689A (en) * 1988-11-30 1993-03-30 Fujitsu Limited Heterojunction bipolar transistor
JP2860138B2 (ja) * 1989-03-29 1999-02-24 キヤノン株式会社 半導体装置およびこれを用いた光電変換装置
JPH02297942A (ja) * 1989-05-11 1990-12-10 Mitsubishi Electric Corp 半導体装置及びその製造方法
US5212103A (en) * 1989-05-11 1993-05-18 Mitsubishi Denki Kabushiki Kaisha Method of making a heterojunction bipolar transistor
JP2804095B2 (ja) * 1989-07-10 1998-09-24 株式会社東芝 ヘテロ接合バイボーラトランジスタ
EP0416166B1 (de) * 1989-09-08 1996-01-17 Siemens Aktiengesellschaft Verfahren zur Herstellung eines Heterobipolartransistors mit Separation des Kollektoranschlusses
US5340755A (en) * 1989-09-08 1994-08-23 Siemens Aktiegensellschaft Method of making planar heterobipolar transistor having trenched isolation of the collector terminal
JPH03105925A (ja) * 1989-09-19 1991-05-02 Fujitsu Ltd 半導体装置
JPH03218681A (ja) * 1989-11-24 1991-09-26 Toshiba Corp ヘテロ接合バイポーラトランジスタ
EP0445475B1 (de) * 1990-02-20 1998-08-26 Kabushiki Kaisha Toshiba Bipolartransistor mit Heteroübergang
KR950010283B1 (ko) * 1990-05-31 1995-09-12 캐논 가부시끼가이샤 매립전극을 가지는 반도체장치 및 그의 제조방법
EP0520482A3 (en) * 1991-06-28 1994-06-22 Texas Instruments Inc Multiple layer collector structure for bipolar transistors
US5270223A (en) * 1991-06-28 1993-12-14 Texas Instruments Incorporated Multiple layer wide bandgap collector structure for bipolar transistors
JPH05109753A (ja) * 1991-08-16 1993-04-30 Toshiba Corp バイポーラトランジスタ
US5365477A (en) * 1992-06-16 1994-11-15 The United States Of America As Represented By The Secretary Of The Navy Dynamic random access memory device
FR2692721B1 (fr) * 1992-06-17 1995-06-30 France Telecom Procede de realisation de transistor bipolaire a heterojonction et transistor obtenu.
JPH0815214B2 (ja) * 1993-03-12 1996-02-14 日本電気株式会社 量子細線構造
US5721437A (en) * 1993-06-08 1998-02-24 Sharp Kabushiki Kaisha Heterojunction-type bipolar transistor with ballast resistance layer
JP2958213B2 (ja) * 1993-06-08 1999-10-06 シャープ株式会社 ヘテロ接合バイポーラトランジスタ
DE19718624A1 (de) * 1997-05-02 1998-11-05 Daimler Benz Ag Heterobipolartransistor mit Mehrschicht-Emitterstruktur
DE19834491A1 (de) * 1998-07-31 2000-02-03 Daimler Chrysler Ag Anordnung und Verfahren zur Herstellung eines Heterobipolartransistors
US7038250B2 (en) * 2003-05-28 2006-05-02 Kabushiki Kaisha Toshiba Semiconductor device suited for a high frequency amplifier
US9461153B2 (en) 2011-11-16 2016-10-04 Skyworks Solutions, Inc. Devices and methods related to a barrier for metallization of a gallium based semiconductor
US9847407B2 (en) 2011-11-16 2017-12-19 Skyworks Solutions, Inc. Devices and methods related to a gallium arsenide Schottky diode having low turn-on voltage
JP2017011264A (ja) * 2015-06-22 2017-01-12 住友化学株式会社 半導体基板、半導体基板の製造方法およびヘテロ接合バイポーラトランジスタ
US11024728B2 (en) * 2019-02-15 2021-06-01 Qualcomm Incorporated Monolithic self-aligned heterojunction bipolar transistor (HBT) and complementary metal-oxide-semiconductor (CMOS)
KR102288129B1 (ko) 2020-02-06 2021-08-10 주식회사 토비스 버튼 복합 구조물

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4750025A (en) * 1981-12-04 1988-06-07 American Telephone And Telegraph Company, At&T Bell Laboratories Depletion stop transistor
US4593305A (en) * 1983-05-17 1986-06-03 Kabushiki Kaisha Toshiba Heterostructure bipolar transistor

Also Published As

Publication number Publication date
EP0297886B1 (de) 1993-09-22
US4933732A (en) 1990-06-12
EP0297886A3 (en) 1989-12-13
DE3884292D1 (de) 1993-10-28
JPH01103869A (ja) 1989-04-20
EP0297886A2 (de) 1989-01-04
JP2542676B2 (ja) 1996-10-09

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee