DE3888813T2 - Spektralphotometer mit Verwendung eines konkaven holographischen Beugungsgitters. - Google Patents

Spektralphotometer mit Verwendung eines konkaven holographischen Beugungsgitters.

Info

Publication number
DE3888813T2
DE3888813T2 DE3888813T DE3888813T DE3888813T2 DE 3888813 T2 DE3888813 T2 DE 3888813T2 DE 3888813 T DE3888813 T DE 3888813T DE 3888813 T DE3888813 T DE 3888813T DE 3888813 T2 DE3888813 T2 DE 3888813T2
Authority
DE
Germany
Prior art keywords
spectrophotometer
diffraction grating
holographic diffraction
concave holographic
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3888813T
Other languages
English (en)
Other versions
DE3888813D1 (de
Inventor
James J Sullivan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE3888813D1 publication Critical patent/DE3888813D1/de
Publication of DE3888813T2 publication Critical patent/DE3888813T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1838—Holographic gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
DE3888813T 1987-12-30 1988-12-14 Spektralphotometer mit Verwendung eines konkaven holographischen Beugungsgitters. Expired - Fee Related DE3888813T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/139,884 US4815849A (en) 1987-12-30 1987-12-30 Spectrometer using concave holographic diffraction grating

Publications (2)

Publication Number Publication Date
DE3888813D1 DE3888813D1 (de) 1994-05-05
DE3888813T2 true DE3888813T2 (de) 1994-09-08

Family

ID=22488729

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3888813T Expired - Fee Related DE3888813T2 (de) 1987-12-30 1988-12-14 Spektralphotometer mit Verwendung eines konkaven holographischen Beugungsgitters.

Country Status (5)

Country Link
US (1) US4815849A (de)
EP (1) EP0322654B1 (de)
JP (1) JP2760825B2 (de)
DE (1) DE3888813T2 (de)
HK (1) HK90694A (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5493393A (en) * 1989-03-17 1996-02-20 The Boeing Company Planar waveguide spectrograph
US5262840A (en) * 1990-01-30 1993-11-16 Sequa Corporation Multispectral reflectometer
US5517302A (en) * 1990-01-30 1996-05-14 Stearns; Thornton Multispectral reflectometer
US5050992A (en) * 1990-04-13 1991-09-24 Hughes Aircraft Company Dispersive holographic spectrometer
WO1992005412A1 (en) * 1990-09-14 1992-04-02 Oplatek Oy Spectrometric construction method of light
US5530565A (en) * 1992-11-30 1996-06-25 Kaiser Optical Systems, Inc. Holographic transmission bandpass filter
JP2630229B2 (ja) * 1993-11-04 1997-07-16 日本電気株式会社 分光計
US5675411A (en) * 1996-05-10 1997-10-07 General Atomics Broad-band spectrometer with high resolution
GB2360971A (en) * 2000-04-03 2001-10-10 Suisse Electronique Microtech Technique for microstructuring replication moulds
KR20020013061A (ko) * 2000-08-10 2002-02-20 조기환 다중 슬릿을 이용한 분광 측정 방법과 이를 이용한 다중채널 분광기
NO321629B1 (no) * 2000-11-30 2006-06-12 Tomra Systems Asa Anordning for bruk ved spektroskopi
US7251028B2 (en) * 2005-02-28 2007-07-31 Princeton Lightwave, Inc Scanning spectrum analyzer
FR2907552A1 (fr) * 2006-10-23 2008-04-25 Bernard Pierre Andre Genot Systeme d'analyse spectrophotometrique a detecteur mobile
US7817274B2 (en) * 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
US8345226B2 (en) 2007-11-30 2013-01-01 Jingyun Zhang Spectrometers miniaturized for working with cellular phones and other portable electronic devices
JP5669434B2 (ja) * 2009-05-09 2015-02-12 キヤノン株式会社 回折素子及び回折素子の製造方法及びそれを用いた分光器
US9863756B1 (en) * 2014-10-07 2018-01-09 Kla-Tencor Corporation Line scan spectroscopic white light interferometry for semiconductor inspection and metrology
US10386232B2 (en) * 2017-12-15 2019-08-20 Horiba Instruments Incorporated Compact spectroscopic optical instrument
US11385182B2 (en) * 2018-05-11 2022-07-12 National Research Council Of Canada Hybrid laser-induced breakdown spectroscopy system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2334947A1 (fr) * 1975-12-10 1977-07-08 Instruments Sa Spectographe a champ plan pour un domaine spectral etendu utilisant un reseau holographique concave
DE2651086B2 (de) * 1976-11-09 1978-11-09 Hewlett-Packard Gmbh, 7030 Boeblingen Photometer
FR2396961A2 (fr) * 1977-07-08 1979-02-02 Instruments Sa Spectrographe a champ plan pour un domaine spectral etendu, utilisant un reseau holographique concave
JPS58225321A (ja) * 1982-06-25 1983-12-27 Hitachi Ltd 凹面回折格子分光器
FR2531213A1 (fr) * 1982-07-28 1984-02-03 Centre Nat Rech Scient Procede de focalisation des reseaux de diffraction spheriques holographiques travaillant par reflexion, objectifs dispersifs et spectrometres en faisant application

Also Published As

Publication number Publication date
US4815849A (en) 1989-03-28
DE3888813D1 (de) 1994-05-05
JPH01213530A (ja) 1989-08-28
HK90694A (en) 1994-09-09
EP0322654A2 (de) 1989-07-05
JP2760825B2 (ja) 1998-06-04
EP0322654A3 (de) 1991-09-18
EP0322654B1 (de) 1994-03-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D.STAATES DELA

8339 Ceased/non-payment of the annual fee