DE502007005443D1 - Verfahren zur herstellung eines elektrischen widerstands auf einem substrat - Google Patents

Verfahren zur herstellung eines elektrischen widerstands auf einem substrat

Info

Publication number
DE502007005443D1
DE502007005443D1 DE502007005443T DE502007005443T DE502007005443D1 DE 502007005443 D1 DE502007005443 D1 DE 502007005443D1 DE 502007005443 T DE502007005443 T DE 502007005443T DE 502007005443 T DE502007005443 T DE 502007005443T DE 502007005443 D1 DE502007005443 D1 DE 502007005443D1
Authority
DE
Germany
Prior art keywords
substrate
layer
producing
resistor
palladium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502007005443T
Other languages
English (en)
Inventor
Walter Roethlingshoefer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of DE502007005443D1 publication Critical patent/DE502007005443D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/167Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/065Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
    • H01C17/06506Precursor compositions therefor, e.g. pastes, inks, glass frits
    • H01C17/06513Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
    • H01C17/06526Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/003Thick film resistors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1105Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/245Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4629Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49099Coating resistive material on a base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771Transition metal-base component
    • Y10T428/12861Group VIII or IB metal-base component
    • Y10T428/12944Ni-base component
DE502007005443T 2006-12-21 2007-11-02 Verfahren zur herstellung eines elektrischen widerstands auf einem substrat Active DE502007005443D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006060634A DE102006060634A1 (de) 2006-12-21 2006-12-21 Verfahren zur Herstellung eines elektrischen Widerstands auf einem Substrat
PCT/EP2007/061831 WO2008077671A1 (de) 2006-12-21 2007-11-02 Verfahren zur herstellung eines elektrischen widerstands auf einem substrat

Publications (1)

Publication Number Publication Date
DE502007005443D1 true DE502007005443D1 (de) 2010-12-02

Family

ID=39262787

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102006060634A Withdrawn DE102006060634A1 (de) 2006-12-21 2006-12-21 Verfahren zur Herstellung eines elektrischen Widerstands auf einem Substrat
DE502007005443T Active DE502007005443D1 (de) 2006-12-21 2007-11-02 Verfahren zur herstellung eines elektrischen widerstands auf einem substrat

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102006060634A Withdrawn DE102006060634A1 (de) 2006-12-21 2006-12-21 Verfahren zur Herstellung eines elektrischen Widerstands auf einem Substrat

Country Status (6)

Country Link
US (1) US8115589B2 (de)
EP (1) EP2127505B1 (de)
JP (1) JP4763833B2 (de)
AT (1) ATE485705T1 (de)
DE (2) DE102006060634A1 (de)
WO (1) WO2008077671A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017114891A1 (de) * 2017-07-04 2019-01-10 Rogers Germany Gmbh Verfahren zur Herstellung einer Durchkontaktierung in einer aus einer Keramik gefertigten Trägerschicht und Trägerschicht mit Durchkontaktierung

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3413240A (en) * 1965-03-25 1968-11-26 Du Pont Compositions
JPS5852900A (ja) * 1981-09-24 1983-03-29 株式会社日立製作所 セラミツク多層配線板の製造方法
JPH0691323B2 (ja) * 1989-02-25 1994-11-14 大陽誘電株式会社 低温焼成型セラミック多層配線基板
DE3915106A1 (de) 1989-05-09 1990-11-15 Haendler Metall & Masch Geraet zum ausstossen eines koerpers, insbesondere einer warenpackung
EP0415571A3 (de) * 1989-08-07 1991-03-13 Ford Motor Company Limited Dickschichtwiderstände und Verfahren zu ihrer Herstellung
GB8920745D0 (en) * 1989-09-13 1989-10-25 Ici Plc Thick film resistor/integrated circuit substrate and method of manufacture
US5221644A (en) * 1991-12-13 1993-06-22 Delco Electronics Corporation Thick film sense resistor composition and method of using the same
US5345212A (en) * 1993-07-07 1994-09-06 National Starch And Chemical Investment Holding Corporation Power surge resistor with palladium and silver composition
JPH07320534A (ja) 1994-05-26 1995-12-08 Mitsubishi Materials Corp 厚膜導体およびその形成方法ならびにその使用方法
JP3093601B2 (ja) 1994-09-28 2000-10-03 株式会社住友金属エレクトロデバイス セラミック回路基板
JP2896996B2 (ja) * 1996-08-27 1999-05-31 釜屋電機株式会社 低抵抗チップ抵抗器及びその製造方法
US6127052A (en) * 1997-06-10 2000-10-03 Canon Kabushiki Kaisha Substrate and method for producing it
JPH1117343A (ja) * 1997-06-24 1999-01-22 Tdk Corp セラミック基体の製造方法
US5889445A (en) * 1997-07-22 1999-03-30 Avx Corporation Multilayer ceramic RC device
JPH11195505A (ja) * 1997-12-26 1999-07-21 E I Du Pont De Nemours & Co 厚膜抵抗体及びその製造方法
DE19953594A1 (de) * 1998-11-20 2000-05-25 Matsushita Electric Ind Co Ltd Oberflächenmontierte elektronische Komponente
DE10144364A1 (de) * 2001-09-10 2003-04-03 Epcos Ag Elektrisches Vielschichtbauelement
US7127809B2 (en) 2004-03-18 2006-10-31 Northrop Grumman Corporation Method of forming one or more base structures on an LTCC cofired module

Also Published As

Publication number Publication date
US8115589B2 (en) 2012-02-14
JP4763833B2 (ja) 2011-08-31
DE102006060634A1 (de) 2008-06-26
ATE485705T1 (de) 2010-11-15
WO2008077671A1 (de) 2008-07-03
EP2127505B1 (de) 2010-10-20
EP2127505A1 (de) 2009-12-02
JP2010514175A (ja) 2010-04-30
US20100039213A1 (en) 2010-02-18

Similar Documents

Publication Publication Date Title
DE602005008346D1 (de) Organische lichtemittierende Vorrichtung mit einer Kathode, die eine Magnesium-Calcium Schicht enthält und Verfahren zur Herstellung dieser Vorrichtung
WO2010003066A3 (en) Transparent conducting electrode
ATE460135T1 (de) Beschichtungen zur verwendung auf medizinprodukten
DE112010000771T8 (de) Verfahren zum Schneiden eines Substrats und Verfahren zur Herstellung eines elektronischen Bauelements
NZ602497A (en) Enterobacter sp. 638 and methods of use thereof
ATE486366T1 (de) Verfahren zum herstellen einer halbleiter-auf- isolator-struktur
DE602005021199D1 (de) Elektronische Vorrichtung mit Abstandhalter und Verfahren zur Herstellung solch einer elektronischen Vorrichtung
DE502007001238D1 (de) Verfahren zum aufbringen einer metallischen deckschicht auf einen hochtemperatursupraleiter
DE602008002851D1 (de) Nanokristall, Verfahren zu seiner Herstellung und elektronische Vorrichtung damit
DE602006002146D1 (de) Aktivmatrixsubstrat, Verfahren zur Herstellung eines Aktivmatrixsubstrats, elektrooptische Vorrichtung und elektronische Vorrichtung
DE112007002099A5 (de) Solarzelle, Verfahren zur Herstellung von Solarzellen sowie elektrische Leiterbahn
HK1120887A1 (en) Method for on-line data migration based on oracle database
EP2166132A3 (de) Transparente, leitfähige Folie und Verfahren zu deren Herstellung
DE602007010152D1 (de) Mehrstufige schicht
DE602008002247D1 (de) Verfahren zur behandlung von pflanzlichem material mit einem enzym
DE602007010665D1 (de) Kontaktelement
ATE526575T1 (de) Verfahren zur herstellung eines sensors und nach diesem verfahren hergestellter sensor
EP2369452A3 (de) Verfahren zum Mustern eines Substrats und Verfahren zur Herstellung einer kapazitiven Berührungstafel
ATE515390T1 (de) Verfahren zur herstellung eines erwärmungselements durch ablagerung dünner schichten auf einem isolationssubstrat, daraus resultierendes element und benutzung des letzten
EP2442367A3 (de) Verbessertes Verfahren zur Herstellung von Metallkontakten
DE602008004946D1 (de) Abziehschicht mit druckempfänglicher Oberfläche und Verfahren zur Herstellung und Verwendung
TW200746238A (en) Method and apparatus for indicating directionality in integrated circuit manufacturing
EP2009561A3 (de) Ausfuehren intelligenten Indexens von Inhalt, als Verfahren, Signal, Datentraeger und System
WO2011037764A3 (en) Passivating glue layer to improve amorphous carbon to metal adhesion
DE102008006553A8 (de) Kunststoffscheiben mit elektrisch leitfähiger Struktur und Verfahren zur Herstellung derselben