Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
  • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
  • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
  • H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
  • H01P7/00—Resonators of the waveguide type
  • H01P7/10—Dielectric resonators
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
  • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
  • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
  • H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
  • H01P7/00—Resonators of the waveguide type
  • H01P7/06—Cavity resonators
  • H01P7/065—Cavity resonators integrated in a substrate

Priority Applications (1)

Applications Claiming Priority (3)

Publications (1)

Family

ID=7705942

Family Applications (3)

Family Applications Before (1)

Family Applications After (1)

Country Status (8)

Families Citing this family (2)

Family Cites Families (7)

• 2001
  • 2001-11-09 DE DE10156255A patent/DE10156255A1/de not_active Withdrawn
• 2002
  • 2002-08-09 KR KR10-2004-7006504A patent/KR20040053236A/ko active IP Right Grant
  • 2002-08-09 HU HU0302318A patent/HUP0302318A3/hu unknown
  • 2002-08-09 US US10/250,743 patent/US6909163B2/en not_active Expired - Fee Related
  • 2002-08-09 JP JP2003543106A patent/JP2005509296A/ja active Pending
  • 2002-08-09 WO PCT/DE2002/002940 patent/WO2003041173A1/de active IP Right Grant
  • 2002-08-09 ES ES02754516T patent/ES2278038T3/es not_active Expired - Lifetime
  • 2002-08-09 EP EP02754516A patent/EP1449255B1/de not_active Expired - Lifetime
  • 2002-08-09 DE DE50208916T patent/DE50208916D1/de not_active Expired - Fee Related
  • 2002-08-09 DE DE10295163T patent/DE10295163D2/de not_active Expired - Lifetime

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