DE50308905D1 - Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität - Google Patents

Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität

Info

Publication number
DE50308905D1
DE50308905D1 DE50308905T DE50308905T DE50308905D1 DE 50308905 D1 DE50308905 D1 DE 50308905D1 DE 50308905 T DE50308905 T DE 50308905T DE 50308905 T DE50308905 T DE 50308905T DE 50308905 D1 DE50308905 D1 DE 50308905D1
Authority
DE
Germany
Prior art keywords
intensity
arrangement
spectral composition
respect
beam portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50308905T
Other languages
English (en)
Inventor
Ralf Wolleschensky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=31502464&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE50308905(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Application granted granted Critical
Publication of DE50308905D1 publication Critical patent/DE50308905D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4406—Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6445—Measuring fluorescence polarisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1282—Spectrum tailoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1286—Polychromator in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/447—Polarisation spectrometry
    • G01N15/01—
    • G01N15/149—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N2015/1493—Particle size
DE50308905T 2002-09-04 2003-07-19 Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität Expired - Lifetime DE50308905D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10241472.6A DE10241472B4 (de) 2002-09-04 2002-09-04 Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität

Publications (1)

Publication Number Publication Date
DE50308905D1 true DE50308905D1 (de) 2008-02-14

Family

ID=31502464

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10241472.6A Expired - Lifetime DE10241472B4 (de) 2002-09-04 2002-09-04 Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität
DE50308905T Expired - Lifetime DE50308905D1 (de) 2002-09-04 2003-07-19 Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10241472.6A Expired - Lifetime DE10241472B4 (de) 2002-09-04 2002-09-04 Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität

Country Status (5)

Country Link
US (2) US7298551B2 (de)
EP (2) EP1396739B1 (de)
JP (1) JP4109587B2 (de)
AT (1) ATE382875T1 (de)
DE (2) DE10241472B4 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6996264B2 (en) * 2002-10-18 2006-02-07 Leco Corporation Indentation hardness test system
JP4939806B2 (ja) * 2003-11-26 2012-05-30 オリンパス株式会社 レーザ走査型蛍光顕微鏡
DE102004030669A1 (de) * 2004-06-24 2006-01-19 Leica Microsystems Cms Gmbh Mikroskop
DE102004034961A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Lichtrastermikroskop mit linienförmiger Abtastung und Verwendung
DE102004034959A1 (de) * 2004-07-16 2006-02-16 Carl Zeiss Jena Gmbh Lichtrastermikroskop mit punktförmiger Lichtquellenverteilung und Verwendung
DE102004034987A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Lichtrastermikroskop und Verwendung
WO2006066139A2 (en) * 2004-12-19 2006-06-22 Ade Corporation System and method for inspecting a workpiece surface by analyzing scattered in a front quartersphere region above the workpiece
DE102005020545A1 (de) * 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Vorrichtung zur Steuerung von Lichtstrahlung
DE102005020543A1 (de) * 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Verfahren und Vorrichtung zur einstellbaren Veränderung von Licht
US20080230715A1 (en) * 2005-08-01 2008-09-25 Koninklijke Philips Electronics, N.V. Optical Imaging
DE102005058184A1 (de) * 2005-12-01 2007-06-14 Friedrich-Schiller-Universität Jena Verfahren und Anordnung zur Detektion von Fluoreszenz- bzw. Reflexionsspektren beliebig wählbarer Bereiche und Strukturen eines Objektes unter geringer Strahlenbelastung
DE102005058185A1 (de) * 2005-12-01 2007-06-14 Friedrich-Schiller-Universität Jena Verfahren und Anordnung zur Detektion von Fluoreszenz- oder Reflexionsspektren beliebig wählbarer Bereiche und Strukturen eines vom Fremdlicht überlagerten Objekts unter geringer Strahlenbelastung
DE102005059338A1 (de) * 2005-12-08 2007-06-14 Carl Zeiss Jena Gmbh Verfahren und Anordnung zur Untersuchung von Proben
US7916304B2 (en) * 2006-12-21 2011-03-29 Howard Hughes Medical Institute Systems and methods for 3-dimensional interferometric microscopy
CN101681033B (zh) * 2007-05-31 2011-10-05 株式会社尼康 可调谐滤光器、光源装置及光谱分布测定装置
DE102010033722A1 (de) 2010-08-07 2012-02-09 Carl Zeiss Microimaging Gmbh Anordnung und/oder Verfahren zur Eliminierung unerwünschter Strahlungsanteile aus detektiertem Licht von einer beleuchteten Probe
DE102010062341B4 (de) * 2010-12-02 2023-05-17 Carl Zeiss Microscopy Gmbh Vorrichtung zur Erhöhung der Tiefendiskriminierung optisch abbildender Systeme
DE102012017922B4 (de) * 2012-09-11 2024-03-14 Carl Zeiss Microscopy Gmbh Optikanordnung und Lichtmikroskop
DE102012019472B4 (de) 2012-09-28 2023-05-04 Carl Zeiss Microscopy Gmbh Optische Filtervorrichtung, insbesondere für Mikroskope, und Mikroskop
DE102012110429B4 (de) * 2012-10-31 2014-07-10 Phoenix Contact Gmbh & Co. Kg Vorrichtung und Verfahren zum Beleuchten einer Stoffoberfläche
DE102013219181B4 (de) * 2013-09-24 2018-05-09 Olympus Soft Imaging Solutions Gmbh Vorrichtung und Verfahren zur optischen Bestimmung von Partikeleigenschaften
US20150377777A1 (en) * 2014-06-29 2015-12-31 OPTICS 3D Ltd. Dual structured illumination modulated in phase and intensity
US20170219485A1 (en) * 2014-10-01 2017-08-03 Purdue Research Foundation Organism Identification
CN105629481B (zh) * 2014-11-05 2018-05-18 北京航天计量测试技术研究所 一种高能激光、探测成像光及远距离测距激光共光路结构
DE102015108383B4 (de) 2015-05-27 2020-01-30 Carl Zeiss Jena Gmbh Multichromatorvorrichtung, Beleuchtungsvorrichtung, bildgebende Vorrichtung und entsprechende Verfahren
EP3153906A1 (de) * 2015-10-07 2017-04-12 Deutsches Krebsforschungszentrum Fluoreszenzmikroskopinstrument mit einem aktiv geschalteten strahlengangseparator
CN105606217B (zh) * 2016-01-08 2017-10-20 西安交通大学 一种图像、光谱、偏振态一体化获取装置及方法
US11204322B2 (en) * 2016-06-20 2021-12-21 Plair S.a. Device and method for detecting and/or characterizing fluid-borne particles
CN106441569B (zh) * 2016-10-31 2018-03-13 佛山市顺德区蚬华多媒体制品有限公司 一种全光谱多维度的光源系统
CN106872037B (zh) * 2017-02-22 2019-03-01 西安交通大学 快照式紧凑小型化光场成像全偏振光谱探测装置及方法
CN106949967B (zh) * 2017-02-22 2019-03-01 西安交通大学 快照式紧凑通道调制型光场成像全偏振光谱探测装置及方法
CN106802184B (zh) * 2017-02-22 2019-03-01 西安交通大学 快照式紧凑噪声免疫型光场成像全偏振光谱探测装置及方法
US11294165B2 (en) * 2017-03-30 2022-04-05 The Board Of Trustees Of The Leland Stanford Junior University Modular, electro-optical device for increasing the imaging field of view using time-sequential capture
CN109669270B (zh) * 2018-12-29 2021-10-29 贝耐特光学科技（昆山）有限公司 一种光谱选择装置及光学设备
CN111537065A (zh) * 2020-04-30 2020-08-14 桂林电子科技大学 一种用于空间调制全偏振成像系统的带宽设计方法
JP2023025742A (ja) * 2021-08-11 2023-02-24 株式会社ディスコ 光照射装置

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS617426A (ja) 1984-06-21 1986-01-14 Shimadzu Corp 光度計
US4645300A (en) 1984-07-30 1987-02-24 Grumman Aerospace Corporation Fourier plane recursive optical filter
US4699466A (en) 1985-03-27 1987-10-13 Grumman Aerospace Corporation Optical RF filtering system
GB8600901D0 (en) 1986-01-15 1986-02-19 Cosmopolitan Textile Co Ltd Web-laying
US4767188A (en) * 1987-05-29 1988-08-30 Hughes Aircraft Company Multi-dimensional nanometric displacement positioner
US6091523A (en) 1989-02-07 2000-07-18 Northrop Grumman Corporation Multi-channel receiver
GB9015793D0 (en) * 1990-07-18 1990-09-05 Medical Res Council Confocal scanning optical microscope
US5414540A (en) * 1993-06-01 1995-05-09 Bell Communications Research, Inc. Frequency-selective optical switch employing a frequency dispersive element, polarization dispersive element and polarization modulating elements
US5587829A (en) 1994-08-29 1996-12-24 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for signal filtering
US5867604A (en) * 1995-08-03 1999-02-02 Ben-Levy; Meir Imaging measurement system
JP3131144B2 (ja) * 1996-03-29 2001-01-31 株式会社アドバンテスト 偏波モード分散の測定装置
US6167173A (en) 1997-01-27 2000-12-26 Carl Zeiss Jena Gmbh Laser scanning microscope
DE19758745C5 (de) 1997-01-27 2008-09-25 Carl Zeiss Jena Gmbh Laser-Scanning-Mikroskop
US6327019B1 (en) * 1997-02-07 2001-12-04 Tellium, Inc. Dual liquid-crystal wavelength-selective optical switch
US6175437B1 (en) 1998-12-18 2001-01-16 Electric Power Research Institute, Inc. Apparatus and method for high bandwidth laser-based data communication
US6441934B1 (en) * 1998-02-13 2002-08-27 Apa Optics, Inc. Multiplexer and demultiplexer for single mode optical fiber communication links
DE19906757B4 (de) * 1998-02-19 2004-07-15 Leica Microsystems Heidelberg Gmbh Mikroskop
US6510001B1 (en) 1998-02-19 2003-01-21 Leica Microsystems Heidelberg Gmbh Optical arrangement with a spectrally selective element
JPH11265326A (ja) 1998-03-16 1999-09-28 Pfps Kenkyukai:Kk 学習成果チェックシステムおよびその記録媒体
US6327068B1 (en) * 1998-05-27 2001-12-04 Yeda Research And Development Co. Ltd. Adaptive pulse compressor
DE19829981C2 (de) 1998-07-04 2002-10-17 Zeiss Carl Jena Gmbh Verfahren und Anordnung zur konfokalen Mikroskopie
DE19842288A1 (de) * 1998-08-04 2000-02-10 Zeiss Carl Jena Gmbh Einstellbare Einkopplung und/oder Detektion einer oder mehrerer Wellenlängen in einem Mikroskop
AU4012500A (en) 1999-03-18 2000-10-04 Lucid, Inc. System and method for enhancing confocal reflectance images of tissue specimens
US6555781B2 (en) 1999-05-10 2003-04-29 Nanyang Technological University Ultrashort pulsed laser micromachining/submicromachining using an acoustooptic scanning device with dispersion compensation
US6285500B1 (en) * 1999-06-29 2001-09-04 Corning Incorporated Wavelength selective switch
US20020122251A1 (en) * 1999-06-29 2002-09-05 Deboynton William L. Wavelength selective switch and variable optical attenuator
CN1390309A (zh) * 1999-09-14 2003-01-08 康宁股份有限公司 双光栅光滤波系统
US6529307B1 (en) * 2000-06-05 2003-03-04 Avanex Corporation Selective intensity modulation of channels in a multiplexed optical communication system
US6747795B2 (en) 2000-06-30 2004-06-08 The General Hospital Corporation Fiber-coupled multiplexed confocal microscope
DE10042840A1 (de) 2000-08-30 2002-03-14 Leica Microsystems Vorrichtung und Verfahren zur Anregung von Fluoreszenzmikroskopmarkern bei der Mehrphotonen-Rastermikroskopie
WO2002084379A1 (en) * 2001-04-13 2002-10-24 Corning Incorporated Dynamic spectral equalizer and wavelength selective switch having extremely low polarization dependent loss and polarization mode dispersion
DE10228374A1 (de) * 2002-06-25 2004-01-15 Leica Microsystems Heidelberg Gmbh Verfahren zur Mikroskopie und Mikroskop
DE10247247A1 (de) * 2002-10-10 2004-04-22 Leica Microsystems Heidelberg Gmbh Optische Anordnung und Mikroskop

Also Published As

Publication number Publication date
DE10241472B4 (de) 2019-04-11
US20040159797A1 (en) 2004-08-19
EP1396739A1 (de) 2004-03-10
US7298551B2 (en) 2007-11-20
DE10241472A1 (de) 2004-03-25
EP1396739B1 (de) 2008-01-02
ATE382875T1 (de) 2008-01-15
US7701632B2 (en) 2010-04-20
US20080049221A1 (en) 2008-02-28
EP1914572A1 (de) 2008-04-23
JP4109587B2 (ja) 2008-07-02
JP2004102274A (ja) 2004-04-02

Similar Documents

Publication Publication Date Title
DE50308905D1 (de) Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität
WO2006089089A3 (en) Refractive index matching in capillary illumination
DE60323984D1 (de) Verfahren und vorrichtung zur steuerung von umgebungslicht und lichteinheit
WO2006055735A3 (en) Scanner having spatial light modulator
WO2007076184A3 (en) Method and apparatus for intensity control of multiple light sources
WO2006119431A3 (en) Electromagnetic characterization of tissue
AU2002230842A1 (en) Optical methods and systems for tissue analysis
ATE463125T1 (de) Verfahren und system zur steuerung eines umgebungslichts und beleuchtungseinheit
WO2009090511A3 (en) Method and apparatus for light intensity control
WO2007137124A3 (en) Devices and methods for fluorescent inspection and/or removal of material in a sample
WO2006017811A3 (en) Multiple-color monochromatic light absorption and quantification of light absorption in a stained sample
EP1484601A3 (de) Optische Anordnung für ein Assay-Lesegerät
DK1608399T3 (da) Kompleks af sclerostin og noggin eller chordin og stoffer, som modulerer dannelsen af komplekset
WO2002029886A3 (en) Method and apparatus for substrate surface inspection using spectral profiling techniques
TW200707121A (en) Methods and devices for characterizing polarization of illumination system
WO2005028308A3 (en) Method and system for detecting foreign object debris
EP3112843A3 (de) Spektralbildgebungskamera und anwendungen
BR0311602A (pt) Processo para aplicar primer de adesão a uma janela
WO2007139912A3 (en) Optical system with non-circular aperture
WO2003065018A3 (en) System and method for inspection using dark and bright field illumination
TW200707617A (en) An apparatus for inspecting a wafer
ATE336021T1 (de) Anordnung und verfahren zum polarisationsoptischen interferenzkontrast
TW200634257A (en) Illumination system
EP1690122B8 (de) Beleuchtungsmodul zur evaneszenten beleuchtung und mikroskop
EP1376091A3 (de) Pilotton Multiplexing der Polarisationszustände in der Heterodynanalyse eines optischen Elements

Legal Events

Date Code Title Description
8363 Opposition against the patent