DE60004020D1 - Verfahren und vorrichtung zur analyse einer hochdynamischen wellenfront - Google Patents

Verfahren und vorrichtung zur analyse einer hochdynamischen wellenfront

Info

Publication number
DE60004020D1
DE60004020D1 DE60004020T DE60004020T DE60004020D1 DE 60004020 D1 DE60004020 D1 DE 60004020D1 DE 60004020 T DE60004020 T DE 60004020T DE 60004020 T DE60004020 T DE 60004020T DE 60004020 D1 DE60004020 D1 DE 60004020D1
Authority
DE
Germany
Prior art keywords
subaperature
spot
analyzing
spi
localization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60004020T
Other languages
English (en)
Other versions
DE60004020T2 (de
Inventor
Jean-Francois Levecq
Henri Bucourt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IMAGINE OPTIC ORSAY
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IMAGINE OPTIC ORSAY
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Publication date
Application filed by IMAGINE OPTIC ORSAY filed Critical IMAGINE OPTIC ORSAY
Publication of DE60004020D1 publication Critical patent/DE60004020D1/de
Application granted granted Critical
Publication of DE60004020T2 publication Critical patent/DE60004020T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
DE60004020T 1999-01-15 2000-01-14 Verfahren und vorrichtung zur analyse einer hochdynamischen wellenfront Expired - Lifetime DE60004020T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9900366A FR2788597B1 (fr) 1999-01-15 1999-01-15 Procede et dispositif d'analyse de front d'onde a grande dynamique
FR9900366 1999-01-15
PCT/FR2000/000063 WO2000042401A2 (fr) 1999-01-15 2000-01-14 Procede et dispositif d'analyse d'un front d'onde a grande dynamique

Publications (2)

Publication Number Publication Date
DE60004020D1 true DE60004020D1 (de) 2003-08-28
DE60004020T2 DE60004020T2 (de) 2004-06-03

Family

ID=9540875

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60004020T Expired - Lifetime DE60004020T2 (de) 1999-01-15 2000-01-14 Verfahren und vorrichtung zur analyse einer hochdynamischen wellenfront

Country Status (9)

Country Link
US (1) US6750957B1 (de)
EP (1) EP1157261B1 (de)
JP (1) JP2002535608A (de)
AT (1) ATE245808T1 (de)
AU (1) AU3053600A (de)
DE (1) DE60004020T2 (de)
FR (1) FR2788597B1 (de)
IL (1) IL144323A0 (de)
WO (1) WO2000042401A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19938203A1 (de) * 1999-08-11 2001-02-15 Aesculap Meditec Gmbh Verfahren und Vorrichtung zur Korrektur von Sehfehlern des menschlichen Auges
US6199986B1 (en) * 1999-10-21 2001-03-13 University Of Rochester Rapid, automatic measurement of the eye's wave aberration
US20030107814A1 (en) * 2001-12-11 2003-06-12 Altmann Griffith E. Method and apparatus for improving the dynamic range and accuracy of a Shack-Hartmann wavefront sensor
DE10333813A1 (de) 2003-07-24 2005-02-17 Technovision GmbH Gesellschaft für die Entwicklung medizinischer Technologie Online-Wellenfrontmessung und Anzeige
FR2879736B1 (fr) * 2004-12-20 2007-02-02 Essilor Int Procede et dispositif de mesure sans contact de la courbure d'un objet ophtalmique
US20070077071A1 (en) * 2005-09-30 2007-04-05 Mikhail Belenkiy System for measuring atmospheric turbulence
US8158917B2 (en) * 2005-12-13 2012-04-17 Agency For Science Technology And Research Optical wavefront sensor and optical wavefront sensing method
AU2007226795B2 (en) * 2006-03-14 2012-02-23 Amo Manufacturing Usa, Llc Spatial frequency wavefront sensor system and method
DE102008003916A1 (de) 2007-01-23 2008-07-24 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die Mikrolithographie mit Messvorrichtung sowie Verfahren zum Messen einer Bestrahlungsstärkeverteilung
FR2913493B1 (fr) * 2007-03-08 2009-04-17 Essilor Int Procede d'analyse pour la mesure sans contact des courbures locales d'un objet ophtalmique
JP6080427B2 (ja) 2012-08-10 2017-02-15 キヤノン株式会社 シャック・ハルトマンセンサとそれを利用した波面計測方法
DE102014010667B4 (de) 2014-07-18 2017-07-13 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co Verfahren und Vorrichtung zur Messung der Form einer Wellenfront eines optischen Strahlungsfeldes
JP6508896B2 (ja) * 2014-08-08 2019-05-08 キヤノン株式会社 光波面センサにおける光スポット重心位置取得方法、光波面計測方法およびプログラム
US10546117B1 (en) * 2016-11-15 2020-01-28 Symantec Corporation Systems and methods for managing security programs

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2945489B2 (ja) * 1991-01-11 1999-09-06 浜松ホトニクス株式会社 画像検出装置
JP2534170B2 (ja) * 1991-07-11 1996-09-11 三菱電機株式会社 鏡面形状測定装置
US5233174A (en) * 1992-03-11 1993-08-03 Hughes Danbury Optical Systems, Inc. Wavefront sensor having a lenslet array as a null corrector
US5493391A (en) * 1994-07-11 1996-02-20 Sandia Corporation One dimensional wavefront distortion sensor comprising a lens array system
JPH0915057A (ja) * 1995-06-26 1997-01-17 Mitsubishi Electric Corp 波面センサ並びに波面計測方法
US5629765A (en) * 1995-12-15 1997-05-13 Adaptive Optics Associates, Inc. Wavefront measuring system with integral geometric reference (IGR)
US6271914B1 (en) * 1996-11-25 2001-08-07 Autonomous Technologies Corporation Objective measurement and correction of optical systems using wavefront analysis
DE19705119A1 (de) * 1997-02-11 1998-08-13 Johannes Prof Dr Schwider Verfahren zur Erhöhung der Meßdynamik des Shack-Hartmann Sensors
US6548797B1 (en) * 2000-10-20 2003-04-15 Nikon Corporation Apparatus and method for measuring a wavefront using a screen with apertures adjacent to a multi-lens array

Also Published As

Publication number Publication date
JP2002535608A (ja) 2002-10-22
ATE245808T1 (de) 2003-08-15
WO2000042401A3 (fr) 2001-08-16
WO2000042401A2 (fr) 2000-07-20
AU3053600A (en) 2000-08-01
US6750957B1 (en) 2004-06-15
FR2788597B1 (fr) 2001-02-23
DE60004020T2 (de) 2004-06-03
IL144323A0 (en) 2002-05-23
FR2788597A1 (fr) 2000-07-21
EP1157261B1 (de) 2003-07-23
EP1157261A2 (de) 2001-11-28

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