DE60009947D1 - Monolithischer druckkopf mit eingebautem äquipotentialem netzwerk und herstellungsverfahren - Google Patents

Monolithischer druckkopf mit eingebautem äquipotentialem netzwerk und herstellungsverfahren

Info

Publication number
DE60009947D1
DE60009947D1 DE60009947T DE60009947T DE60009947D1 DE 60009947 D1 DE60009947 D1 DE 60009947D1 DE 60009947 T DE60009947 T DE 60009947T DE 60009947 T DE60009947 T DE 60009947T DE 60009947 D1 DE60009947 D1 DE 60009947D1
Authority
DE
Germany
Prior art keywords
built
production method
print head
equipotential network
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60009947T
Other languages
English (en)
Other versions
DE60009947T2 (de
Inventor
Renato Conta
Mara Piano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olivetti Tecnost SpA
Original Assignee
Olivetti Tecnost SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olivetti Tecnost SpA filed Critical Olivetti Tecnost SpA
Publication of DE60009947D1 publication Critical patent/DE60009947D1/de
Application granted granted Critical
Publication of DE60009947T2 publication Critical patent/DE60009947T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1635Manufacturing processes dividing the wafer into individual chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • B41J2/1639Manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used
DE60009947T 1999-11-15 2000-11-14 Monolithischer druckkopf mit eingebautem äquipotentialem netzwerk und herstellungsverfahren Expired - Lifetime DE60009947T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT1999TO000987A IT1311361B1 (it) 1999-11-15 1999-11-15 Testina di stampa monilitica con rete equipotenziale integrata erelativo metodo di fabbricazione.
ITTO990987 1999-11-15
PCT/IT2000/000463 WO2001036203A1 (en) 1999-11-15 2000-11-14 Monolithic printhead with built-in equipotential network and associated manufacturing method

Publications (2)

Publication Number Publication Date
DE60009947D1 true DE60009947D1 (de) 2004-05-19
DE60009947T2 DE60009947T2 (de) 2005-04-07

Family

ID=11418215

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60009947T Expired - Lifetime DE60009947T2 (de) 1999-11-15 2000-11-14 Monolithischer druckkopf mit eingebautem äquipotentialem netzwerk und herstellungsverfahren

Country Status (8)

Country Link
US (2) US7070261B1 (de)
EP (1) EP1232063B1 (de)
AT (1) ATE264197T1 (de)
AU (1) AU1885201A (de)
DE (1) DE60009947T2 (de)
ES (1) ES2219421T3 (de)
IT (1) IT1311361B1 (de)
WO (1) WO2001036203A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1320026B1 (it) 2000-04-10 2003-11-12 Olivetti Lexikon Spa Testina di stampa monolitica a canali multipli di alimentazione delloinchiostro e relativo processo di fabbricazione.
IT1320599B1 (it) 2000-08-23 2003-12-10 Olivetti Lexikon Spa Testina di stampa monolitica con scanalatura autoallineata e relativoprocesso di fabbricazione.
US6504226B1 (en) * 2001-12-20 2003-01-07 Stmicroelectronics, Inc. Thin-film transistor used as heating element for microreaction chamber
JP2005035281A (ja) * 2003-06-23 2005-02-10 Canon Inc 液体吐出ヘッドの製造方法
ITTO20030841A1 (it) 2003-10-27 2005-04-28 Olivetti I Jet Spa Testina di stampa a getto d'inchiostro e suo processo di fabbricazione.
JP4208794B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
KR20090004725A (ko) * 2007-07-06 2009-01-12 엘지전자 주식회사 방송 수신기 및 방송 수신기의 데이터 처리 방법
BRPI0820756B1 (pt) * 2008-02-27 2019-04-09 Hewlett-Packard Development Company, L.P. Conjunto de cabeça de impressão de jato de tinta, dispositivo de impressão de jato de tinta e método para formar ranhuras
KR20140089650A (ko) 2013-01-03 2014-07-16 삼성디스플레이 주식회사 액정 표시 장치 및 그 제조 방법
DE102016112871A1 (de) * 2015-07-31 2017-02-02 Infineon Technologies Ag Mikrofiltrationsvorrichtung
CN112532072B (zh) * 2020-03-26 2022-03-29 南京南瑞继保电气有限公司 模块化多电平子模块、阀塔及交流耐压测试方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4630081A (en) * 1984-12-19 1986-12-16 Eaton Corporation MOMOM tunnel emission transistor
US5122812A (en) * 1991-01-03 1992-06-16 Hewlett-Packard Company Thermal inkjet printhead having driver circuitry thereon and method for making the same
JP3408292B2 (ja) * 1992-09-09 2003-05-19 ヒューレット・パッカード・カンパニー プリントヘッド
US6020618A (en) * 1994-03-30 2000-02-01 Denso Corporation Semiconductor device in which thin silicon portions are formed by electrochemical stop etching method
US5565084A (en) 1994-10-11 1996-10-15 Qnix Computer Co., Ltd. Electropolishing methods for etching substrate in self alignment
US5600174A (en) 1994-10-11 1997-02-04 The Board Of Trustees Of The Leeland Stanford Junior University Suspended single crystal silicon structures and method of making same
KR960021538A (ko) 1994-12-29 1996-07-18 김용현 전해연마법을 사용한 발열방식의 잉크젯 프린트 헤드 및 그 제작방법
US5716533A (en) 1997-03-03 1998-02-10 Xerox Corporation Method of fabricating ink jet printheads
JP2959515B2 (ja) * 1997-03-31 1999-10-06 日本電気株式会社 インクジェット印字ヘッド
KR100397227B1 (ko) * 1997-04-04 2003-09-13 유니버시티 오브 써던 캘리포니아 전기화학적 제조를 위한 전기도금 물품, 방법 및 장치
US6234608B1 (en) * 1997-06-05 2001-05-22 Xerox Corporation Magnetically actuated ink jet printing device
AUPP653598A0 (en) * 1998-10-16 1998-11-05 Silverbrook Research Pty Ltd Micromechanical device and method (ij46C)
US6019907A (en) 1997-08-08 2000-02-01 Hewlett-Packard Company Forming refill for monolithic inkjet printhead
US6286939B1 (en) * 1997-09-26 2001-09-11 Hewlett-Packard Company Method of treating a metal surface to increase polymer adhesion
US6171378B1 (en) * 1999-08-05 2001-01-09 Sandia Corporation Chemical preconcentrator
US6412919B1 (en) * 2000-09-05 2002-07-02 Hewlett-Packard Company Transistor drop ejectors in ink-jet print heads

Also Published As

Publication number Publication date
AU1885201A (en) 2001-05-30
ES2219421T3 (es) 2004-12-01
US20040207694A1 (en) 2004-10-21
ITTO990987A1 (it) 2001-05-15
EP1232063B1 (de) 2004-04-14
IT1311361B1 (it) 2002-03-12
ATE264197T1 (de) 2004-04-15
US7279111B2 (en) 2007-10-09
WO2001036203A1 (en) 2001-05-25
DE60009947T2 (de) 2005-04-07
ITTO990987A0 (it) 1999-11-15
EP1232063A1 (de) 2002-08-21
US7070261B1 (en) 2006-07-04

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Legal Events

Date Code Title Description
8332 No legal effect for de
8370 Indication related to discontinuation of the patent is to be deleted
8364 No opposition during term of opposition