DE60031869D1 - Kapazitiver druckwandler - Google Patents

Kapazitiver druckwandler

Info

Publication number
DE60031869D1
DE60031869D1 DE60031869T DE60031869T DE60031869D1 DE 60031869 D1 DE60031869 D1 DE 60031869D1 DE 60031869 T DE60031869 T DE 60031869T DE 60031869 T DE60031869 T DE 60031869T DE 60031869 D1 DE60031869 D1 DE 60031869D1
Authority
DE
Germany
Prior art keywords
druckwandler
capacitive
capacitive druckwandler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60031869T
Other languages
English (en)
Other versions
DE60031869T2 (de
Inventor
D Lucas
John Denner
Chris P Grudzien
Jeffrey Lischer
Kristen Weight
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE60031869D1 publication Critical patent/DE60031869D1/de
Publication of DE60031869T2 publication Critical patent/DE60031869T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE60031869T 1999-10-01 2000-09-28 Kapazitiver druckwandler Expired - Lifetime DE60031869T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US41032799A 1999-10-01 1999-10-01
US41071199A 1999-10-01 1999-10-01
US410327 1999-10-01
US410711 1999-10-01
US637980 2000-08-11
US09/637,980 US6568274B1 (en) 1998-02-04 2000-08-11 Capacitive based pressure sensor design
PCT/US2000/026721 WO2001025740A1 (en) 1999-10-01 2000-09-28 Capacitive pressure sensor

Publications (2)

Publication Number Publication Date
DE60031869D1 true DE60031869D1 (de) 2006-12-28
DE60031869T2 DE60031869T2 (de) 2007-09-13

Family

ID=27410845

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60031869T Expired - Lifetime DE60031869T2 (de) 1999-10-01 2000-09-28 Kapazitiver druckwandler

Country Status (6)

Country Link
US (1) US6568274B1 (de)
EP (2) EP1218713B1 (de)
JP (3) JP5133484B2 (de)
KR (2) KR20020044151A (de)
DE (1) DE60031869T2 (de)
WO (2) WO2001025742A1 (de)

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US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6568274B1 (en) 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
JP4162990B2 (ja) * 2000-08-11 2008-10-08 エム ケー エス インストルメンツ インコーポレーテッド 改良された、容量に基づく圧力センサの設計
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US6813954B2 (en) * 2001-05-25 2004-11-09 Panametrics, Inc. High sensitivity pressure sensor with long term stability
US7000482B2 (en) * 2002-06-24 2006-02-21 Mykrolis Corporation Variable capacitance measuring device
US6837111B2 (en) * 2002-06-24 2005-01-04 Mykrolis Corporation Variable capacitance measuring device
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7737321B2 (en) * 2003-09-23 2010-06-15 Elliott Nyle S colostomy alert device and method
US7290452B2 (en) * 2003-12-16 2007-11-06 Rosemount Inc. Remote process seal with improved stability in demanding applications
US7100453B2 (en) * 2003-12-30 2006-09-05 Honeywell International Inc. Modified dual diaphragm pressure sensor
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7121145B2 (en) * 2004-10-18 2006-10-17 Silverbrook Research Pty Ltd Capacitative pressure sensor
US7194901B2 (en) * 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
US7093494B2 (en) * 2004-10-18 2006-08-22 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US6968744B1 (en) * 2004-10-18 2005-11-29 Silverbrook Research Pty Ltd Capacitative pressure sensor with close electrodes
US7089790B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with laminated membrane
US7240560B2 (en) * 2004-10-18 2007-07-10 Silverbrook Research Pty Ltd Pressure sensor with remote power source
US7143652B2 (en) * 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
US7159467B2 (en) * 2004-10-18 2007-01-09 Silverbrook Research Pty Ltd Pressure sensor with conductive ceramic membrane
US7089797B2 (en) 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Temperature insensitive pressure sensor
US7234357B2 (en) * 2004-10-18 2007-06-26 Silverbrook Research Pty Ltd Wafer bonded pressure sensor
JP4683618B2 (ja) * 2005-02-10 2011-05-18 キヤノンアネルバ株式会社 隔膜型圧力センサ及びその製造方法
US7228744B2 (en) * 2005-05-09 2007-06-12 Delphi Technologies, Inc. Pressure transducer for gaseous hydrogen environment
US7451654B2 (en) * 2006-08-09 2008-11-18 Mks Instruments, Inc. Constant power dissipation in capacitance pressure transducers
US7454975B2 (en) * 2007-04-06 2008-11-25 Rosemount Inc. Expansion chamber for use with a pressure transmitter
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US7814798B2 (en) * 2008-09-17 2010-10-19 P I Components Corporation Diaphragm structure and method of manufacturing a diaphragm structure
FR2947629B1 (fr) * 2009-07-06 2012-03-30 Tronic S Microsystems Dispositif de mesure de pression et son procede de fabrication
US8621942B2 (en) * 2009-08-03 2014-01-07 Atmel Corporation Force sensor with compressible electrode
TWI372570B (en) * 2009-12-25 2012-09-11 Ind Tech Res Inst Capacitive sensor and manufacturing method thereof
CN102812342B (zh) 2010-02-02 2014-11-26 Mks仪器公司 电容式压力传感器
JP5365665B2 (ja) * 2011-06-23 2013-12-11 横河電機株式会社 センサユニット
US8534130B2 (en) * 2011-08-01 2013-09-17 Honeywell International Inc. Joint between a pressure sensor and a pressure port of a sensor assembly
JP5997771B2 (ja) 2011-09-29 2016-09-28 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 改良された電極構造体を有する静電容量型圧力センサ
JP5826943B2 (ja) 2011-10-11 2015-12-02 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 静電容量型圧力計アセンブリ
US9057659B2 (en) 2012-05-22 2015-06-16 Rosemount Inc. Pressure transmitter with hydrogen getter
JP6018945B2 (ja) 2012-10-05 2016-11-02 株式会社日立製作所 伝送装置及び伝送方法
US9442031B2 (en) 2013-06-28 2016-09-13 Rosemount Inc. High integrity process fluid pressure probe
CN104583742B (zh) * 2013-07-19 2016-12-28 罗斯蒙特公司 包括具有两件式隔离插塞的隔离组件的压力变送器
US10591373B2 (en) * 2013-08-01 2020-03-17 Mts Systems Corporation Load transducer having a biasing assembly
US9459170B2 (en) * 2013-09-26 2016-10-04 Rosemount Inc. Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure
EP2871456B1 (de) * 2013-11-06 2018-10-10 Invensense, Inc. Drucksensor und Herstellungsmethode für einen Drucksensor
US10288509B2 (en) 2013-11-25 2019-05-14 Horiba Stec, Co., Ltd. Capacitive pressure sensor with reduced sensitivity to temperature change
JP6059641B2 (ja) * 2013-11-25 2017-01-11 株式会社堀場エステック 静電容量型圧力センサ
EP2993454B1 (de) * 2013-11-25 2019-12-25 Horiba Stec, Co., Ltd. Kapazitiver drucksensor
JP6059642B2 (ja) * 2013-11-25 2017-01-11 株式会社堀場エステック 静電容量型圧力センサ
US9470594B2 (en) * 2014-01-17 2016-10-18 Sensata Technologies, Inc. Differential pressure sensor with dual output using a double-sided capacitive sensing element
DE102014012918B4 (de) 2014-09-05 2019-01-03 Heinz Plöchinger Dual-Kapazitäts-Manometer mit kleinem Messvolumen
US9638600B2 (en) 2014-09-30 2017-05-02 Rosemount Inc. Electrical interconnect for pressure sensor in a process variable transmitter
CN107843379B (zh) * 2017-12-13 2023-09-22 沈阳市传感技术研究所 装配式定电极的电容压力传感器
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
WO2020236661A1 (en) 2019-05-17 2020-11-26 Invensense, Inc. A pressure sensor with improve hermeticity
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
CN114088282A (zh) * 2021-11-24 2022-02-25 北京七星华创流量计有限公司 压力传感器
DE102022102437A1 (de) 2022-02-02 2023-08-03 Heinz Plöchinger Korrekturverfahren für Dual-Kapazitäts-Manometer

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Also Published As

Publication number Publication date
KR20020044151A (ko) 2002-06-14
JP2003527575A (ja) 2003-09-16
DE60031869T2 (de) 2007-09-13
KR20020044152A (ko) 2002-06-14
JP2003511664A (ja) 2003-03-25
EP1218715A1 (de) 2002-07-03
EP1218713B1 (de) 2006-11-15
JP2013007758A (ja) 2013-01-10
JP5133484B2 (ja) 2013-01-30
EP1218715B1 (de) 2012-11-07
EP1218713A1 (de) 2002-07-03
US6568274B1 (en) 2003-05-27
WO2001025742A1 (en) 2001-04-12
WO2001025740A1 (en) 2001-04-12
JP5384710B2 (ja) 2014-01-08

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