DE60044782D1 - Elektrisch entkoppelter mikrogefertigter kreisel - Google Patents

Elektrisch entkoppelter mikrogefertigter kreisel

Info

Publication number
DE60044782D1
DE60044782D1 DE60044782T DE60044782T DE60044782D1 DE 60044782 D1 DE60044782 D1 DE 60044782D1 DE 60044782 T DE60044782 T DE 60044782T DE 60044782 T DE60044782 T DE 60044782T DE 60044782 D1 DE60044782 D1 DE 60044782D1
Authority
DE
Germany
Prior art keywords
gyroscope
micro
made circle
drive
sense
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60044782T
Other languages
English (en)
Inventor
Scott G Adams
James Groves
Donato Cardarelli
Raymond Carroll
Charles R Dauwalter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MILLISENSOR SYSTEMS AND ACTUAT
Kionix Inc
Original Assignee
MILLISENSOR SYSTEMS AND ACTUAT
Kionix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MILLISENSOR SYSTEMS AND ACTUAT, Kionix Inc filed Critical MILLISENSOR SYSTEMS AND ACTUAT
Application granted granted Critical
Publication of DE60044782D1 publication Critical patent/DE60044782D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
DE60044782T 1999-09-17 2000-09-13 Elektrisch entkoppelter mikrogefertigter kreisel Expired - Lifetime DE60044782D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15463199P 1999-09-17 1999-09-17
PCT/US2000/025029 WO2001020259A1 (en) 1999-09-17 2000-09-13 Electrically decoupled micromachined gyroscope

Publications (1)

Publication Number Publication Date
DE60044782D1 true DE60044782D1 (de) 2010-09-16

Family

ID=22552111

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60044782T Expired - Lifetime DE60044782D1 (de) 1999-09-17 2000-09-13 Elektrisch entkoppelter mikrogefertigter kreisel

Country Status (8)

Country Link
US (1) US6626039B1 (de)
EP (1) EP1212585B1 (de)
JP (1) JP2003509670A (de)
KR (1) KR20020085877A (de)
AT (1) ATE476638T1 (de)
AU (1) AU7130800A (de)
DE (1) DE60044782D1 (de)
WO (1) WO2001020259A1 (de)

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Also Published As

Publication number Publication date
WO2001020259A1 (en) 2001-03-22
EP1212585A1 (de) 2002-06-12
ATE476638T1 (de) 2010-08-15
JP2003509670A (ja) 2003-03-11
EP1212585B1 (de) 2010-08-04
US6626039B1 (en) 2003-09-30
AU7130800A (en) 2001-04-17
KR20020085877A (ko) 2002-11-16

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