DE60107518D1 - Spiegelstruktur - Google Patents
SpiegelstrukturInfo
- Publication number
- DE60107518D1 DE60107518D1 DE60107518T DE60107518T DE60107518D1 DE 60107518 D1 DE60107518 D1 DE 60107518D1 DE 60107518 T DE60107518 T DE 60107518T DE 60107518 T DE60107518 T DE 60107518T DE 60107518 D1 DE60107518 D1 DE 60107518D1
- Authority
- DE
- Germany
- Prior art keywords
- mirror structure
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3542—Non-blocking switch, e.g. with multiple potential paths between multiple inputs and outputs, the establishment of one switching path not preventing the establishment of further switching paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US672380 | 2000-09-28 | ||
US09/672,380 US6300665B1 (en) | 2000-09-28 | 2000-09-28 | Structure for an optical switch on a silicon on insulator substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60107518D1 true DE60107518D1 (de) | 2005-01-05 |
DE60107518T2 DE60107518T2 (de) | 2005-05-12 |
Family
ID=24698303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60107518T Expired - Lifetime DE60107518T2 (de) | 2000-09-28 | 2001-09-07 | Spiegelstruktur |
Country Status (4)
Country | Link |
---|---|
US (1) | US6300665B1 (de) |
EP (1) | EP1193526B1 (de) |
JP (1) | JP4920844B2 (de) |
DE (1) | DE60107518T2 (de) |
Families Citing this family (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6215222B1 (en) * | 1999-03-30 | 2001-04-10 | Agilent Technologies, Inc. | Optical cross-connect switch using electrostatic surface actuators |
US6430333B1 (en) * | 1999-04-15 | 2002-08-06 | Solus Micro Technologies, Inc. | Monolithic 2D optical switch and method of fabrication |
US6753638B2 (en) | 2000-02-03 | 2004-06-22 | Calient Networks, Inc. | Electrostatic actuator for micromechanical systems |
WO2001077001A2 (en) | 2000-04-11 | 2001-10-18 | Sandia Corporation | Microelectromechanical apparatus for elevating and tilting a platform |
US6632373B1 (en) * | 2000-09-28 | 2003-10-14 | Xerox Corporation | Method for an optical switch on a substrate |
US6466356B1 (en) * | 2000-09-28 | 2002-10-15 | Xerox Corporation | Structure for an optical switch on a silicon substrate |
US6504643B1 (en) * | 2000-09-28 | 2003-01-07 | Xerox Corporation | Structure for an optical switch on a substrate |
US6632374B1 (en) * | 2000-09-28 | 2003-10-14 | Xerox Corporation | Method for an optical switch on a silicon on insulator substrate |
US6706202B1 (en) * | 2000-09-28 | 2004-03-16 | Xerox Corporation | Method for shaped optical MEMS components with stressed thin films |
US6501588B1 (en) * | 2000-09-28 | 2002-12-31 | Xerox Corporation | Method for an optical switch on a silicon substrate |
US6825967B1 (en) | 2000-09-29 | 2004-11-30 | Calient Networks, Inc. | Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same |
US20020176658A1 (en) * | 2000-10-13 | 2002-11-28 | John Prohaska | Re-configurable wavelength and dispersion selective device |
US6394617B1 (en) * | 2000-12-29 | 2002-05-28 | Avanex Corporation | Method and apparatus for latched bimorph optical switchs |
US6785038B2 (en) * | 2001-01-17 | 2004-08-31 | Optical Coating Laboratory, Inc. | Optical cross-connect with magnetic micro-electro-mechanical actuator cells |
US6603894B1 (en) * | 2001-01-26 | 2003-08-05 | Tellium, Inc. | MEMS mirror arrays and external lens system in an optical switch |
US6912078B2 (en) | 2001-03-16 | 2005-06-28 | Corning Incorporated | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
US6490384B2 (en) * | 2001-04-04 | 2002-12-03 | Yoon-Joong Yong | Light modulating system using deformable mirror arrays |
US6891240B2 (en) | 2002-04-30 | 2005-05-10 | Xerox Corporation | Electrode design and positioning for controlled movement of a moveable electrode and associated support structure |
US7006720B2 (en) * | 2002-04-30 | 2006-02-28 | Xerox Corporation | Optical switching system |
US7041528B2 (en) * | 2002-07-16 | 2006-05-09 | Analog Devices, Inc. | Method for forming a micro-mechanical component in a semiconductor wafer, and a semiconductor wafer comprising a micro-mechanical component formed therein |
US7208809B2 (en) * | 2002-09-19 | 2007-04-24 | Nippon Telegraph And Telephone Corporation | Semiconductor device having MEMS |
US6960849B1 (en) | 2003-03-31 | 2005-11-01 | Sandia Corporation | Three-dimensional microelectromechanical tilting platform operated by gear-driven racks |
US6934438B2 (en) * | 2003-04-07 | 2005-08-23 | Agilent Technologies, Inc. | Closed loop alignment system for fiber optic cross-connect switches |
US7274740B2 (en) * | 2003-06-25 | 2007-09-25 | Sharp Laboratories Of America, Inc. | Wireless video transmission system |
US7110636B2 (en) * | 2003-07-11 | 2006-09-19 | Sumitomo Electric Industries, Ltd. | Optical device control apparatus and optical device control method |
US9325998B2 (en) | 2003-09-30 | 2016-04-26 | Sharp Laboratories Of America, Inc. | Wireless video transmission system |
US7643195B2 (en) * | 2003-11-01 | 2010-01-05 | Silicon Quest Kabushiki-Kaisha | Mirror device |
US8018850B2 (en) | 2004-02-23 | 2011-09-13 | Sharp Laboratories Of America, Inc. | Wireless video transmission system |
US7072090B2 (en) * | 2004-04-22 | 2006-07-04 | Micronic Laser Systems Ab | Addressing of an SLM |
US7771803B2 (en) | 2004-10-27 | 2010-08-10 | Palo Alto Research Center Incorporated | Oblique parts or surfaces |
US7784076B2 (en) | 2004-10-30 | 2010-08-24 | Sharp Laboratories Of America, Inc. | Sender-side bandwidth estimation for video transmission with receiver packet buffer |
US8356327B2 (en) * | 2004-10-30 | 2013-01-15 | Sharp Laboratories Of America, Inc. | Wireless video transmission system |
US7797723B2 (en) * | 2004-10-30 | 2010-09-14 | Sharp Laboratories Of America, Inc. | Packet scheduling for video transmission with sender queue control |
US7046411B1 (en) | 2005-04-29 | 2006-05-16 | Sandia Corporation | Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom |
US20060261436A1 (en) * | 2005-05-19 | 2006-11-23 | Freescale Semiconductor, Inc. | Electronic device including a trench field isolation region and a process for forming the same |
US7159397B1 (en) | 2005-06-07 | 2007-01-09 | Sandia Corporation | Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom |
US20070067480A1 (en) * | 2005-09-19 | 2007-03-22 | Sharp Laboratories Of America, Inc. | Adaptive media playout by server media processing for robust streaming |
US7517769B2 (en) * | 2005-12-28 | 2009-04-14 | Palo Alto Research Center Incorporated | Integrateable capacitors and microcoils and methods of making thereof |
US20070145523A1 (en) * | 2005-12-28 | 2007-06-28 | Palo Alto Research Center Incorporated | Integrateable capacitors and microcoils and methods of making thereof |
US9544602B2 (en) * | 2005-12-30 | 2017-01-10 | Sharp Laboratories Of America, Inc. | Wireless video transmission system |
US7652994B2 (en) * | 2006-03-31 | 2010-01-26 | Sharp Laboratories Of America, Inc. | Accelerated media coding for robust low-delay video streaming over time-varying and bandwidth limited channels |
US7491622B2 (en) | 2006-04-24 | 2009-02-17 | Freescale Semiconductor, Inc. | Process of forming an electronic device including a layer formed using an inductively coupled plasma |
US7670895B2 (en) | 2006-04-24 | 2010-03-02 | Freescale Semiconductor, Inc | Process of forming an electronic device including a semiconductor layer and another layer adjacent to an opening within the semiconductor layer |
US7528078B2 (en) | 2006-05-12 | 2009-05-05 | Freescale Semiconductor, Inc. | Process of forming electronic device including a densified nitride layer adjacent to an opening within a semiconductor layer |
US8861597B2 (en) * | 2006-09-18 | 2014-10-14 | Sharp Laboratories Of America, Inc. | Distributed channel time allocation for video streaming over wireless networks |
US7652993B2 (en) * | 2006-11-03 | 2010-01-26 | Sharp Laboratories Of America, Inc. | Multi-stream pro-active rate adaptation for robust video transmission |
US7356216B1 (en) * | 2006-12-20 | 2008-04-08 | The Boeing Company | Optical cross-connect |
DE102009000099A1 (de) * | 2009-01-09 | 2010-07-22 | Carl Zeiss Smt Ag | Mikrospiegelarray mit Doppelbiegebalken Anordnung und elektronischer Aktorik |
DE102008001248A1 (de) * | 2008-04-18 | 2009-11-05 | Robert Bosch Gmbh | Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil |
DE102008050446B4 (de) * | 2008-10-08 | 2011-07-28 | Carl Zeiss SMT GmbH, 73447 | Verfahren und Vorrichtungen zur Ansteuerung von Mikrospiegeln |
DE102010028111B4 (de) * | 2010-04-22 | 2016-01-21 | Technische Universität Dresden | Mikromechanisches Element |
JP2016527545A (ja) * | 2013-06-27 | 2016-09-08 | オプリンク コミュニケーションズ エルエルシー | Memsファイバ光スイッチ |
US10969576B2 (en) * | 2016-04-01 | 2021-04-06 | Intel Corporation | Piezo actuators for optical beam steering applications |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0756532B2 (ja) * | 1984-07-31 | 1995-06-14 | テキサス インスツルメンツ インコーポレイテツド | 空間光変調器の製造方法 |
GB2275787A (en) * | 1993-03-05 | 1994-09-07 | British Aerospace | Silicon micro-mirror unit |
JPH0990249A (ja) * | 1995-09-25 | 1997-04-04 | Olympus Optical Co Ltd | 光偏向子及びその製造方法 |
JPH1114933A (ja) * | 1997-06-24 | 1999-01-22 | Toshiba Corp | ガルバノミラーおよびこれを用いた光ディスク装置 |
US5867302A (en) * | 1997-08-07 | 1999-02-02 | Sandia Corporation | Bistable microelectromechanical actuator |
JPH1151967A (ja) * | 1997-08-08 | 1999-02-26 | Mitsubishi Electric Corp | 多軸加速度センサ及びその製造方法 |
US6091050A (en) * | 1997-11-17 | 2000-07-18 | Roxburgh Limited | Thermal microplatform |
JP2000164105A (ja) * | 1998-11-25 | 2000-06-16 | Omron Corp | マイクロマシン、マイクロアクチュエータ及びマイクロリレー |
JP2000162538A (ja) * | 1998-11-30 | 2000-06-16 | Mitsubishi Electric Corp | マイクロミラー装置 |
-
2000
- 2000-09-28 US US09/672,380 patent/US6300665B1/en not_active Expired - Lifetime
-
2001
- 2001-09-07 EP EP01307608A patent/EP1193526B1/de not_active Expired - Lifetime
- 2001-09-07 DE DE60107518T patent/DE60107518T2/de not_active Expired - Lifetime
- 2001-09-20 JP JP2001286788A patent/JP4920844B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP4920844B2 (ja) | 2012-04-18 |
US6300665B1 (en) | 2001-10-09 |
EP1193526A1 (de) | 2002-04-03 |
EP1193526B1 (de) | 2004-12-01 |
DE60107518T2 (de) | 2005-05-12 |
JP2002156593A (ja) | 2002-05-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |