DE60109339D1 - Verfahren zum Drahtbonden - Google Patents

Verfahren zum Drahtbonden

Info

Publication number
DE60109339D1
DE60109339D1 DE60109339T DE60109339T DE60109339D1 DE 60109339 D1 DE60109339 D1 DE 60109339D1 DE 60109339 T DE60109339 T DE 60109339T DE 60109339 T DE60109339 T DE 60109339T DE 60109339 D1 DE60109339 D1 DE 60109339D1
Authority
DE
Germany
Prior art keywords
wire bonding
bonding
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60109339T
Other languages
English (en)
Other versions
DE60109339T2 (de
Inventor
Howard R Test
Gonzalo Amador
Willmar E Subido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE60109339D1 publication Critical patent/DE60109339D1/de
Application granted granted Critical
Publication of DE60109339T2 publication Critical patent/DE60109339T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
    • H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
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KR20010090525A (ko) 2001-10-18
EP1139413B1 (de) 2005-03-16
US20050106851A1 (en) 2005-05-19
EP1139413A3 (de) 2002-06-12
CN1317389A (zh) 2001-10-17
DE60109339T2 (de) 2006-01-12
JP2001319946A (ja) 2001-11-16
EP1139413A2 (de) 2001-10-04
US6800555B2 (en) 2004-10-05
KR100741592B1 (ko) 2007-07-20
CN1245272C (zh) 2006-03-15

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