DE60115240D1 - Automatisierte werkzeugverwaltung in einer umgebung mit mehreren protokollen - Google Patents

Automatisierte werkzeugverwaltung in einer umgebung mit mehreren protokollen

Info

Publication number
DE60115240D1
DE60115240D1 DE60115240T DE60115240T DE60115240D1 DE 60115240 D1 DE60115240 D1 DE 60115240D1 DE 60115240 T DE60115240 T DE 60115240T DE 60115240 T DE60115240 T DE 60115240T DE 60115240 D1 DE60115240 D1 DE 60115240D1
Authority
DE
Germany
Prior art keywords
message
tool
interface unit
value
application interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60115240T
Other languages
English (en)
Other versions
DE60115240T2 (de
Inventor
Walter Ellis
Theodore Pendleton
Merritt Baylis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peer Intellectual Property Inc
Original Assignee
ASYST TECHNOLOGIES
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASYST TECHNOLOGIES, Asyst Technologies Inc filed Critical ASYST TECHNOLOGIES
Publication of DE60115240D1 publication Critical patent/DE60115240D1/de
Application granted granted Critical
Publication of DE60115240T2 publication Critical patent/DE60115240T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4185—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the network communication
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31174—Load, use different protocols, formats, emulators for different systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31175—Message comprises identification of sender, receiver, command and parameter
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31186—TCP-IP internet protocol
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31196—SOAP, describes available services and how to call them remotely
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31422—Upload, download programs, parameters from, to station to, from server
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32126—Hyperlink, access to program modules and to hardware modules in www, web server, browser
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34038—Web, http, ftp, internet, intranet server
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
DE60115240T 2000-07-07 2001-07-06 Automatisierte werkzeugverwaltung in einer umgebung mit mehreren protokollen Expired - Lifetime DE60115240T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US21681900P 2000-07-07 2000-07-07
US216819P 2000-07-07
US899833 2001-07-05
US09/899,833 US7403984B2 (en) 2000-02-01 2001-07-05 Automated tool management in a multi-protocol environment
PCT/US2001/021318 WO2002005043A2 (en) 2000-07-07 2001-07-06 Automated tool management in a multi-protocol environment

Publications (2)

Publication Number Publication Date
DE60115240D1 true DE60115240D1 (de) 2005-12-29
DE60115240T2 DE60115240T2 (de) 2006-08-03

Family

ID=26911367

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60115240T Expired - Lifetime DE60115240T2 (de) 2000-07-07 2001-07-06 Automatisierte werkzeugverwaltung in einer umgebung mit mehreren protokollen

Country Status (10)

Country Link
US (1) US7403984B2 (de)
EP (1) EP1299780B1 (de)
KR (1) KR100798565B1 (de)
CN (1) CN1386220B (de)
AT (1) ATE310979T1 (de)
AU (1) AU2001271852A1 (de)
CA (1) CA2383968A1 (de)
DE (1) DE60115240T2 (de)
MX (1) MXPA02002445A (de)
WO (1) WO2002005043A2 (de)

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Also Published As

Publication number Publication date
US7403984B2 (en) 2008-07-22
EP1299780A2 (de) 2003-04-09
MXPA02002445A (es) 2004-09-10
CN1386220B (zh) 2010-05-05
KR100798565B1 (ko) 2008-01-28
EP1299780B1 (de) 2005-11-23
AU2001271852A1 (en) 2002-01-21
DE60115240T2 (de) 2006-08-03
CN1386220A (zh) 2002-12-18
CA2383968A1 (en) 2002-01-17
US20020026514A1 (en) 2002-02-28
WO2002005043A3 (en) 2002-05-30
ATE310979T1 (de) 2005-12-15
KR20020055579A (ko) 2002-07-09
WO2002005043A2 (en) 2002-01-17

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Owner name: PEER INTELLECTUAL PROPERTY, INC., KITCHENER, O, CA