DE60116407D1 - Amorphe oxidhaltige Kohlenstoffschicht - Google Patents

Amorphe oxidhaltige Kohlenstoffschicht

Info

Publication number
DE60116407D1
DE60116407D1 DE60116407T DE60116407T DE60116407D1 DE 60116407 D1 DE60116407 D1 DE 60116407D1 DE 60116407 T DE60116407 T DE 60116407T DE 60116407 T DE60116407 T DE 60116407T DE 60116407 D1 DE60116407 D1 DE 60116407D1
Authority
DE
Germany
Prior art keywords
carbon layer
containing carbon
amorphous oxide
amorphous
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60116407T
Other languages
English (en)
Other versions
DE60116407T2 (de
Inventor
Masaki Moronuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Riken Corp
Original Assignee
Riken Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000135366A external-priority patent/JP4612147B2/ja
Priority claimed from JP2000283326A external-priority patent/JP2002097573A/ja
Application filed by Riken Corp filed Critical Riken Corp
Application granted granted Critical
Publication of DE60116407D1 publication Critical patent/DE60116407D1/de
Publication of DE60116407T2 publication Critical patent/DE60116407T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
DE60116407T 2000-05-09 2001-05-05 Amorphe oxidhaltige Kohlenstoffschicht Expired - Lifetime DE60116407T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000135366A JP4612147B2 (ja) 2000-05-09 2000-05-09 非晶質硬質炭素膜及びその製造方法
JP2000135366 2000-05-09
JP2000283326A JP2002097573A (ja) 2000-09-19 2000-09-19 摺動部材
JP2000283326 2000-09-19

Publications (2)

Publication Number Publication Date
DE60116407D1 true DE60116407D1 (de) 2006-03-30
DE60116407T2 DE60116407T2 (de) 2006-07-06

Family

ID=26591514

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60116407T Expired - Lifetime DE60116407T2 (de) 2000-05-09 2001-05-05 Amorphe oxidhaltige Kohlenstoffschicht

Country Status (10)

Country Link
US (1) US6821497B2 (de)
EP (1) EP1154035B1 (de)
KR (1) KR100404006B1 (de)
CN (1) CN1229517C (de)
AR (1) AR028432A1 (de)
BR (1) BR0101812B1 (de)
DE (1) DE60116407T2 (de)
ES (1) ES2256110T3 (de)
ID (1) ID30201A (de)
TW (1) TWI268962B (de)

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US6802457B1 (en) * 1998-09-21 2004-10-12 Caterpillar Inc Coatings for use in fuel system components
US6715693B1 (en) * 2000-02-15 2004-04-06 Caterpillar Inc Thin film coating for fuel injector components
EP1486695B1 (de) * 2001-09-27 2011-04-06 Kabushiki Kaisha Toyota Chuo Kenkyusho Gleitelement mit hohem reibungskoeffizienten
EP1479946B1 (de) * 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Kolben für eine Brennkraftmaschine
JP4247535B2 (ja) * 2003-11-11 2009-04-02 Ｈｏｙａ株式会社 ロードアンロード方式用磁気ディスク、ロードアンロード方式用磁気ディスクの製造方法及びロードアンロード方式用磁気ディスクの評価方法
WO2005054539A1 (en) * 2003-12-02 2005-06-16 N.V. Bekaert S.A. A layered structure
CA2556782C (en) * 2004-02-27 2013-06-04 Japan Science And Technology Agency Carbon-based thin film, process for producing the same and member using the thin film
TW200609186A (en) * 2004-09-03 2006-03-16 Asia Optical Co Inc The molding core of glass molding
US20060159848A1 (en) * 2005-01-20 2006-07-20 Yucong Wang Method of making wear-resistant components
CA2511254C (en) * 2005-08-04 2007-04-24 Westport Research Inc. High-pressure gas compressor and method of operating a high-pressure gas compressor
JP5176337B2 (ja) * 2006-05-12 2013-04-03 株式会社デンソー 皮膜構造及びその形成方法
JP5033432B2 (ja) * 2007-01-30 2012-09-26 株式会社豊田自動織機 摺動部品
US20090087673A1 (en) * 2007-09-28 2009-04-02 Taylor Steven C Method for coating fuel system components
KR100895023B1 (ko) * 2007-11-05 2009-04-24 주식회사 나래나노텍 개선된 도액 펌핑장치 및 이를 구비한 노즐 장치 및 코팅장치
DE102008042896A1 (de) * 2008-10-16 2010-04-22 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring oder Zylinderlaufbuchse eines Verbrennungsmotors
JP5182130B2 (ja) * 2008-12-24 2013-04-10 株式会社豊田自動織機 圧縮機における摺動部材
DE102009013855A1 (de) * 2009-03-19 2010-09-23 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring
US9062274B2 (en) * 2009-07-03 2015-06-23 Kabushiki Kaisha Toyota Chuo Kenkyusho Low friction sliding member
IL205090A0 (en) * 2010-04-14 2010-11-30 Iscar Ltd Hard carbon coating and method of forming the same
KR101149447B1 (ko) * 2010-12-02 2012-05-24 삼성전기주식회사 코이닝 장치
DE102012200969A1 (de) * 2012-01-24 2013-07-25 BSH Bosch und Siemens Hausgeräte GmbH Bauteil für ein Haushaltsgerät
WO2013137060A1 (ja) * 2012-03-14 2013-09-19 株式会社リケン シリンダとピストンリングとの組合せ
WO2014059226A1 (en) * 2012-10-11 2014-04-17 Federal-Mogul Corporation Chemical vapor deposition of wear resistant coatings onto piston ring running face, side face, and inner diameter in one coating run
US10329509B2 (en) 2015-01-29 2019-06-25 Jtekt Corporation Amorphous hydrocarbon based film, and sliding member and sliding system with said film
US9928994B2 (en) * 2015-02-03 2018-03-27 Lam Research Corporation Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films
US9520295B2 (en) * 2015-02-03 2016-12-13 Lam Research Corporation Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems
US10619739B2 (en) * 2015-07-31 2020-04-14 Nippon Piston Ring Co., Ltd Piston ring
US10626834B2 (en) 2016-05-03 2020-04-21 GM Global Technology Operations LLC Fuel injector for an internal combustion engine
DE102019204718A1 (de) * 2019-04-03 2020-10-08 Robert Bosch Gmbh Verfahren zur Herstellung eines Bauteils sowie ein nach dem Verfahren hergestelltes Bauteil
CN110387529B (zh) * 2019-07-05 2021-08-10 中国人民解放军空军勤务学院 一种用于液压阀杆表面防护的复合涂层及其制备方法
CN116334564A (zh) * 2023-03-14 2023-06-27 纳狮新材料有限公司杭州分公司 润滑表面的方法及自催化复合碳基薄膜固液复合润滑体系

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* Cited by examiner, † Cited by third party
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EP0221531A3 (de) * 1985-11-06 1992-02-19 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Isoliertes gut wärmeleitendes Substrat und sein Herstellungsverfahren
DE3706340A1 (de) * 1987-02-27 1988-09-08 Winter & Sohn Ernst Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis
US5087434A (en) * 1989-04-21 1992-02-11 The Pennsylvania Research Corporation Synthesis of diamond powders in the gas phase
US5266409A (en) * 1989-04-28 1993-11-30 Digital Equipment Corporation Hydrogenated carbon compositions
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
KR0134942B1 (ko) * 1993-06-11 1998-06-15 이다가끼 유끼오 비정질 경질 탄소막 및 그 제조 방법
BE1008229A3 (nl) * 1993-10-29 1996-02-20 Vito Werkwijze voor het aanbrengen van een tegen slijtage beschermende laag op een substraat.
US5618619A (en) * 1994-03-03 1997-04-08 Monsanto Company Highly abrasion-resistant, flexible coatings for soft substrates
US5569487A (en) * 1995-01-23 1996-10-29 General Electric Company Capacitor dielectrics of silicon-doped amorphous hydrogenated carbon
TW366367B (en) 1995-01-26 1999-08-11 Ibm Sputter deposition of hydrogenated amorphous carbon film
AU7371496A (en) * 1995-10-03 1997-05-07 Advanced Refractory Technologies, Inc. Diamond-like nanocomposite thin films for automotive powertrain component coatings
EP1067210A3 (de) * 1996-09-06 2002-11-13 Sanyo Electric Co., Ltd. Verfahren zur Abscheidung eines harten Kohlenstoff-Filmes auf einem Substrat und Klinge für einen elektrischen Rasierer

Also Published As

Publication number Publication date
KR20010104660A (ko) 2001-11-26
EP1154035A1 (de) 2001-11-14
ES2256110T3 (es) 2006-07-16
DE60116407T2 (de) 2006-07-06
CN1229517C (zh) 2005-11-30
TWI268962B (en) 2006-12-21
EP1154035B1 (de) 2006-01-04
BR0101812A (pt) 2001-12-18
KR100404006B1 (ko) 2003-11-03
AR028432A1 (es) 2003-05-07
CN1328172A (zh) 2001-12-26
US6821497B2 (en) 2004-11-23
ID30201A (id) 2001-11-15
BR0101812B1 (pt) 2012-03-06
US20020022129A1 (en) 2002-02-21

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