DE60122834D1 - Torsions-Kipp-Komponente - Google Patents

Torsions-Kipp-Komponente

Info

Publication number: DE60122834D1
Authority: DE; Germany
Prior art keywords: torsion; tilt component; tilt; component
Prior art date: 2000-07-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE60122834T

Other languages

English (en)

Other versions

DE60122834T2 (de

Inventor

Hiroshi Miyajima

Toshiharu Hidaka

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Olympus Corp

Original Assignee

Olympus Optical Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-07-10

Filing date

2001-07-06

Publication date

2006-10-19

2001-07-06 Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd

2006-10-19 Publication of DE60122834D1 publication Critical patent/DE60122834D1/de

2007-05-16 Application granted granted Critical

2007-05-16 Publication of DE60122834T2 publication Critical patent/DE60122834T2/de

2021-07-07 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

DE60122834T 2000-07-10 2001-07-06 Torsions-Kipp-Komponente Expired - Fee Related DE60122834T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2000208999A JP2002023097A (ja)	2000-07-10	2000-07-10	ねじり揺動体
JP2000208999		2000-07-10

Publications (2)

Publication Number	Publication Date
DE60122834D1 true DE60122834D1 (de)	2006-10-19
DE60122834T2 DE60122834T2 (de)	2007-05-16

Family

ID=18705481

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60122834T Expired - Fee Related DE60122834T2 (de)	2000-07-10	2001-07-06	Torsions-Kipp-Komponente

Country Status (4)

Country	Link
US (2)	US20020135846A1 (de)
EP (1)	EP1172677B8 (de)
JP (1)	JP2002023097A (de)
DE (1)	DE60122834T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7170665B2 (en) *	2002-07-24	2007-01-30	Olympus Corporation	Optical unit provided with an actuator
JP3862623B2 (ja) *	2002-07-05	2006-12-27	キヤノン株式会社	光偏向器及びその製造方法
JP2007111847A (ja) *	2005-10-24	2007-05-10	Olympus Corp	アクチュエータ
FR2897200A1 (fr) *	2006-02-06	2007-08-10	Commissariat Energie Atomique	Inducteur integre sur semi-conducteur
JP2008015256A (ja) *	2006-07-06	2008-01-24	Toyota Central Res & Dev Lab Inc	光偏向器
JP4277921B2 (ja) *	2007-06-05	2009-06-10	セイコーエプソン株式会社	アクチュエータ、光スキャナおよび画像形成装置
JP5554895B2 (ja) *	2008-02-20	2014-07-23	キヤノン株式会社	揺動構造体、及び揺動構造体を用いた揺動体装置
JP2014182227A (ja) *	2013-03-18	2014-09-29	Seiko Epson Corp	光スキャナー、画像表示装置およびヘッドマウントディスプレイ
JP6546370B1 (ja)	2017-12-01	2019-07-17	浜松ホトニクス株式会社	アクチュエータ装置
CN116203717A (zh) *	2018-05-11	2023-06-02	浜松光子学株式会社	光学装置
WO2019216424A1 (ja) *	2018-05-11	2019-11-14	浜松ホトニクス株式会社	光学デバイス

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4421381A (en) *	1980-04-04	1983-12-20	Yokogawa Hokushin Electric Corp.	Mechanical vibrating element
US5629790A (en)	1993-10-18	1997-05-13	Neukermans; Armand P.	Micromachined torsional scanner
US5488862A (en) *	1993-10-18	1996-02-06	Armand P. Neukermans	Monolithic silicon rate-gyro with integrated sensors
JP2722314B2 (ja) *	1993-12-20	1998-03-04	日本信号株式会社	プレーナー型ガルバノミラー及びその製造方法
US6188504B1 (en) *	1996-06-28	2001-02-13	Olympus Optical Co., Ltd.	Optical scanner
JP4414498B2 (ja) *	1997-12-09	2010-02-10	オリンパス株式会社	光偏向器
JPH11305162A (ja) *	1998-04-27	1999-11-05	Olympus Optical Co Ltd	光スキャナ

2000
- 2000-07-10 JP JP2000208999A patent/JP2002023097A/ja not_active Withdrawn
2001
- 2001-07-02 US US09/897,244 patent/US20020135846A1/en not_active Abandoned
- 2001-07-06 DE DE60122834T patent/DE60122834T2/de not_active Expired - Fee Related
- 2001-07-06 EP EP01116416A patent/EP1172677B8/de not_active Expired - Lifetime
2003
- 2003-05-19 US US10/440,680 patent/US6813049B2/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP1172677A2 (de)	2002-01-16
DE60122834T2 (de)	2007-05-16
EP1172677B8 (de)	2006-11-15
US6813049B2 (en)	2004-11-02
EP1172677B1 (de)	2006-09-06
US20020135846A1 (en)	2002-09-26
EP1172677A3 (de)	2005-02-16
JP2002023097A (ja)	2002-01-23
US20030218787A1 (en)	2003-11-27

Legal Events

Date	Code	Title	Description
2007-09-27	8364	No opposition during term of opposition
2011-05-19	8339	Ceased/non-payment of the annual fee

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