DE60137717D1 - Mikrodüse und verfahren zur herstellung derselben - Google Patents

Mikrodüse und verfahren zur herstellung derselben

Info

Publication number
DE60137717D1
DE60137717D1 DE60137717T DE60137717T DE60137717D1 DE 60137717 D1 DE60137717 D1 DE 60137717D1 DE 60137717 T DE60137717 T DE 60137717T DE 60137717 T DE60137717 T DE 60137717T DE 60137717 D1 DE60137717 D1 DE 60137717D1
Authority
DE
Germany
Prior art keywords
nozzle
microscale
micro
production
microscale channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60137717T
Other languages
English (en)
Inventor
Per Ove Oehman
Per Andersson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amic AB
Gyros Patent AB
Original Assignee
Amic AB
Gyros Patent AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amic AB, Gyros Patent AB filed Critical Amic AB
Application granted granted Critical
Publication of DE60137717D1 publication Critical patent/DE60137717D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/162Manufacturing of the nozzle plates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49401Fluid pattern dispersing device making, e.g., ink jet
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/4998Combined manufacture including applying or shaping of fluent material
DE60137717T 2000-12-12 2001-12-12 Mikrodüse und verfahren zur herstellung derselben Expired - Lifetime DE60137717D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE0004594A SE0004594D0 (sv) 2000-12-12 2000-12-12 Microscale nozzie
PCT/SE2001/002753 WO2002047913A1 (en) 2000-12-12 2001-12-12 Microscale nozzle and method for manufacturing the same

Publications (1)

Publication Number Publication Date
DE60137717D1 true DE60137717D1 (de) 2009-04-02

Family

ID=20282200

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60137717T Expired - Lifetime DE60137717D1 (de) 2000-12-12 2001-12-12 Mikrodüse und verfahren zur herstellung derselben

Country Status (7)

Country Link
US (1) US7213339B2 (de)
EP (1) EP1349731B1 (de)
JP (1) JP2004522596A (de)
AT (1) ATE423007T1 (de)
DE (1) DE60137717D1 (de)
SE (1) SE0004594D0 (de)
WO (1) WO2002047913A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9808836D0 (en) * 1998-04-27 1998-06-24 Amersham Pharm Biotech Uk Ltd Microfabricated apparatus for cell based assays
GB9809943D0 (en) 1998-05-08 1998-07-08 Amersham Pharm Biotech Ab Microfluidic device
US7261859B2 (en) 1998-12-30 2007-08-28 Gyros Ab Microanalysis device
SE0001790D0 (sv) * 2000-05-12 2000-05-12 Aamic Ab Hydrophobic barrier
SE0004296D0 (sv) * 2000-11-23 2000-11-23 Gyros Ab Device and method for the controlled heating in micro channel systems
EP1384076B1 (de) 2001-03-19 2012-07-25 Gyros Patent Ab Charakterisierung von reaktionsvariablen
US6919058B2 (en) 2001-08-28 2005-07-19 Gyros Ab Retaining microfluidic microcavity and other microfluidic structures
US7105810B2 (en) 2001-12-21 2006-09-12 Cornell Research Foundation, Inc. Electrospray emitter for microfluidic channel
WO2003082730A1 (en) * 2002-03-31 2003-10-09 Gyros Ab Efficient mmicrofluidic devices
SE0300454D0 (sv) * 2003-02-19 2003-02-19 Aamic Ab Nozzles for electrospray ionization and methods of fabricating them
US7007710B2 (en) * 2003-04-21 2006-03-07 Predicant Biosciences, Inc. Microfluidic devices and methods
US7537807B2 (en) 2003-09-26 2009-05-26 Cornell University Scanned source oriented nanofiber formation
US7282705B2 (en) * 2003-12-19 2007-10-16 Agilent Technologies, Inc. Microdevice having an annular lining for producing an electrospray emitter
US20090010819A1 (en) * 2004-01-17 2009-01-08 Gyros Patent Ab Versatile flow path
WO2006075965A1 (en) * 2005-01-17 2006-07-20 Gyros Patent Ab A method for detecting an at least bivalent analyte using two affinity reactants
WO2010102199A1 (en) 2009-03-06 2010-09-10 Waters Technologies Corporation Electromechanical and fluidic interface to a microfluidic substrate

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4935624A (en) 1987-09-30 1990-06-19 Cornell Research Foundation, Inc. Thermal-assisted electrospray interface (TAESI) for LC/MS
GB2219129B (en) * 1988-05-26 1992-06-03 Plessey Co Plc Improvements in and relating to piezoelectric composites
JP3200881B2 (ja) * 1991-09-20 2001-08-20 セイコーエプソン株式会社 インクジェットヘッドの製造方法
JP2803697B2 (ja) * 1991-12-26 1998-09-24 富士電機株式会社 インクジェット記録ヘッドの製造方法
JP3097298B2 (ja) * 1992-04-17 2000-10-10 ブラザー工業株式会社 液滴噴射装置およびその製造方法
FR2727648B1 (fr) * 1994-12-01 1997-01-03 Commissariat Energie Atomique Procede de fabrication micromecanique de buses pour jets de liquide
US5575929A (en) 1995-06-05 1996-11-19 The Regents Of The University Of California Method for making circular tubular channels with two silicon wafers
US5872010A (en) * 1995-07-21 1999-02-16 Northeastern University Microscale fluid handling system
DE19638501A1 (de) * 1996-09-19 1998-04-02 Siemens Ag Verfahren zur Herstellung einer Kapillare
WO2000030167A1 (en) 1998-11-19 2000-05-25 California Institute Of Technology Polymer-based electrospray nozzle for mass spectrometry

Also Published As

Publication number Publication date
EP1349731B1 (de) 2009-02-18
US20040055136A1 (en) 2004-03-25
ATE423007T1 (de) 2009-03-15
WO2002047913A1 (en) 2002-06-20
EP1349731A1 (de) 2003-10-08
JP2004522596A (ja) 2004-07-29
US7213339B2 (en) 2007-05-08
SE0004594D0 (sv) 2000-12-12

Similar Documents

Publication Publication Date Title
DE60137717D1 (de) Mikrodüse und verfahren zur herstellung derselben
WO2002090245A3 (en) Methods of forming microstructure devices
DE60236385D1 (de) Getränkeherstellungsvorrichtung- und Verfahren
WO2005122284A3 (en) Semiconductor-on-diamond devices and methods of forming
WO2008070573A3 (en) Non-wetting coating on a fluid ejector
ATE209541T1 (de) Ein durch innenhochdruck umgeformten bauteil, sowie verfahren und vorrichtung zur dessen herstellung
ATE376881T1 (de) Herstellung von intergrierten fluidischen vorrichtungen
ATE448563T1 (de) Verfahren zur substratbehandlung und trockungs- sammelrohr
WO2003068373A3 (en) Micro-fluidic anti-microbial filter
WO2003032353A3 (en) Method for forming microstructures on a substrate using a mold
ATE437697T1 (de) Verfahren und vorrichtungen zur entfernung von organischen molekühlen aus biologischen gemischen unter verwendung von anionenaustausch
DE60230653D1 (de) Verfahren und vorrichtung zur herstellung eines mehrkernigen geformten artikels
WO2008127405A3 (en) Microfluidic device with a cylindrical microchannel and a method for fabricating same
EP1364702A3 (de) Verfahren zum herstellen einer Arrayplatte von Biomoleküle mit hydrophilen und hydrophoben Bereiche
WO2005075207A3 (en) Method and apparatus for removing gas from a printhead
WO2007100644A3 (en) Method and apparatus for using flex circuit technology to create a reference electrode channel
WO2001007506A3 (en) Microfabricated devices and method of manufacturing the same
WO2007024417A3 (en) Fluid processing device, system, kit, and method
CN101622542A (zh) 微芯片的制造方法
WO2007146956A3 (en) Hydrophilized substrate and method for hydrophilizing a hydrophobic surface of a substrate
DE60226389D1 (de) Piezoelektrisches Dünnfilmbauelement, dessen Herstellungsverfahren sowie Aktuator mit diesem
ATE359600T1 (de) Verfahren und vorrichtung zur vermeidung von kreuz-kontamination zwischen flüssigkeitsdüsen inoberflächennähe
EP1187182A3 (de) Verfahren und Vorrichtung zur Substrattrennung
ATE359983T1 (de) Verfahren zur herstellung eines werkzeugeinsatzes zum spritzgiessen eines teils mit einstufigen mikrostrukturen
EP1197987A3 (de) Methode und Apparat für die Proben-trennung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition