DE60138891D1 - Messung der wanddicke eines elektrisch leitenden objekts - Google Patents

Messung der wanddicke eines elektrisch leitenden objekts

Info

Publication number
DE60138891D1
DE60138891D1 DE60138891T DE60138891T DE60138891D1 DE 60138891 D1 DE60138891 D1 DE 60138891D1 DE 60138891 T DE60138891 T DE 60138891T DE 60138891 T DE60138891 T DE 60138891T DE 60138891 D1 DE60138891 D1 DE 60138891D1
Authority
DE
Germany
Prior art keywords
wall thickness
measuring
probe
signals
electrically conducted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60138891T
Other languages
English (en)
Inventor
Paulus Carolus Crouzen
Der Steen Johan Van
Mark Theodoor Looijer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shell Internationale Research Maatschappij BV
Original Assignee
Shell Internationale Research Maatschappij BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shell Internationale Research Maatschappij BV filed Critical Shell Internationale Research Maatschappij BV
Application granted granted Critical
Publication of DE60138891D1 publication Critical patent/DE60138891D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE60138891T 2000-08-24 2001-08-22 Messung der wanddicke eines elektrisch leitenden objekts Expired - Fee Related DE60138891D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00307298 2000-08-24
PCT/EP2001/009720 WO2002016863A1 (en) 2000-08-24 2001-08-22 Measuring the wall thickness of an electrically conductive object

Publications (1)

Publication Number Publication Date
DE60138891D1 true DE60138891D1 (de) 2009-07-16

Family

ID=8173218

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60138891T Expired - Fee Related DE60138891D1 (de) 2000-08-24 2001-08-22 Messung der wanddicke eines elektrisch leitenden objekts

Country Status (11)

Country Link
US (1) US6593737B2 (de)
EP (1) EP1311800B1 (de)
JP (1) JP2004507721A (de)
CN (1) CN1447902A (de)
AT (1) ATE433092T1 (de)
AU (1) AU2001287701A1 (de)
CA (1) CA2420309A1 (de)
DE (1) DE60138891D1 (de)
NO (1) NO20030814L (de)
RU (1) RU2260172C2 (de)
WO (1) WO2002016863A1 (de)

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SE527091C2 (sv) * 2003-12-31 2005-12-20 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek och elektriska ledningsförmåga hos ett mätobjekt
SE527125C2 (sv) * 2003-12-31 2005-12-27 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek eller ledningsförmåga med elektromagnetisk induktion
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CN101398298B (zh) * 2008-11-10 2010-09-29 清华大学 电磁超声测厚方法
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JP4975142B2 (ja) 2010-06-17 2012-07-11 トヨタ自動車株式会社 渦流計測用センサ及び渦流計測方法
FR2981741B1 (fr) * 2011-10-20 2013-11-29 Messier Bugatti Dowty Procede de mesure d'epaisseur d'une couche de revetement par induction de champs magnetiques
US9091664B2 (en) * 2012-06-07 2015-07-28 Thomas Krause Pulsed eddy current sensor for precision measurement at-large lift-offs on metallic surfaces
US9335151B2 (en) * 2012-10-26 2016-05-10 Applied Materials, Inc. Film measurement
CN104465481A (zh) * 2013-09-22 2015-03-25 盛美半导体设备（上海）有限公司 晶圆夹盘
CN104034250B (zh) * 2014-06-30 2016-08-24 山东中科普锐检测技术有限公司 涂层测厚仪温度补偿测量方法
FR3025306B1 (fr) * 2014-08-29 2020-07-10 Safran Procede non-destructif de mesure de l'epaisseur de barriere thermique et/ou de mur en superalliage d'aube creuse de turbomachine
US10073058B2 (en) 2015-02-11 2018-09-11 Structural Integrity Associates Dynamic pulsed eddy current probe
US10895555B2 (en) 2015-03-30 2021-01-19 Structural Integrity Associates, Inc. System for in-line inspection using a dynamic pulsed eddy current probe and method thereof
CN105509631B (zh) * 2015-12-07 2018-05-18 天津因科新创科技有限公司 一种脉冲涡流壁厚检测方法和装置
CN106197249A (zh) * 2016-09-30 2016-12-07 天津华海清科机电科技有限公司 Cmp过程中铜层厚度在线测量系统及其控制方法
CN109764800A (zh) * 2019-01-15 2019-05-17 西南石油大学 一种基于涡流热成像阵列的管道腐蚀壁厚检测系统
EP4053494A1 (de) 2021-03-02 2022-09-07 ABB Schweiz AG Dickenmessung unter verwendung eines gepulsten wirbelstromsystems

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Also Published As

Publication number Publication date
ATE433092T1 (de) 2009-06-15
EP1311800A1 (de) 2003-05-21
AU2001287701A1 (en) 2002-03-04
RU2260172C2 (ru) 2005-09-10
NO20030814D0 (no) 2003-02-21
CA2420309A1 (en) 2002-02-28
WO2002016863A1 (en) 2002-02-28
EP1311800B1 (de) 2009-06-03
US6593737B2 (en) 2003-07-15
US20020149359A1 (en) 2002-10-17
NO20030814L (no) 2003-04-22
JP2004507721A (ja) 2004-03-11
CN1447902A (zh) 2003-10-08

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee