DE60139627D1 - Detektormatrix mit vertikalem farbfilter und ihr herstellungsverfahren - Google Patents

Detektormatrix mit vertikalem farbfilter und ihr herstellungsverfahren

Info

Publication number
DE60139627D1
DE60139627D1 DE60139627T DE60139627T DE60139627D1 DE 60139627 D1 DE60139627 D1 DE 60139627D1 DE 60139627 T DE60139627 T DE 60139627T DE 60139627 T DE60139627 T DE 60139627T DE 60139627 D1 DE60139627 D1 DE 60139627D1
Authority
DE
Germany
Prior art keywords
manufacturing
color filter
detector matrix
vertical color
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60139627T
Other languages
English (en)
Inventor
Richard B Merrill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Foveon Inc
Original Assignee
Foveon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foveon Inc filed Critical Foveon Inc
Application granted granted Critical
Publication of DE60139627D1 publication Critical patent/DE60139627D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
    • H01L27/14645—Colour imagers
    • H01L27/14647—Multicolour imagers having a stacked pixel-element structure, e.g. npn, npnpn or MQW elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1462—Coatings
    • H01L27/14621—Colour filter arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
DE60139627T 2000-09-25 2001-09-20 Detektormatrix mit vertikalem farbfilter und ihr herstellungsverfahren Expired - Lifetime DE60139627D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US23524900P 2000-09-25 2000-09-25
US09/884,863 US6727521B2 (en) 2000-09-25 2001-06-18 Vertical color filter detector group and array
PCT/US2001/029488 WO2002027804A2 (en) 2000-09-25 2001-09-20 Vertical color filter detector group and array

Publications (1)

Publication Number Publication Date
DE60139627D1 true DE60139627D1 (de) 2009-10-01

Family

ID=26928728

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60139627T Expired - Lifetime DE60139627D1 (de) 2000-09-25 2001-09-20 Detektormatrix mit vertikalem farbfilter und ihr herstellungsverfahren

Country Status (8)

Country Link
US (3) US6727521B2 (de)
EP (1) EP1320893B1 (de)
JP (1) JP5201776B2 (de)
KR (1) KR100791752B1 (de)
AU (1) AU2001292885A1 (de)
DE (1) DE60139627D1 (de)
TW (1) TW517387B (de)
WO (1) WO2002027804A2 (de)

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