DE602004014678D1 - Herstellungsverfahren für einen Flüssigkeitsausstosskopf - Google Patents

Herstellungsverfahren für einen Flüssigkeitsausstosskopf

Info

Publication number
DE602004014678D1
DE602004014678D1 DE602004014678T DE602004014678T DE602004014678D1 DE 602004014678 D1 DE602004014678 D1 DE 602004014678D1 DE 602004014678 T DE602004014678 T DE 602004014678T DE 602004014678 T DE602004014678 T DE 602004014678T DE 602004014678 D1 DE602004014678 D1 DE 602004014678D1
Authority
DE
Germany
Prior art keywords
manufacturing
liquid ejection
ejection head
head
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004014678T
Other languages
English (en)
Inventor
Hirokazu Komuro
Fumio Murooka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602004014678D1 publication Critical patent/DE602004014678D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
DE602004014678T 2003-06-23 2004-06-21 Herstellungsverfahren für einen Flüssigkeitsausstosskopf Active DE602004014678D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003178549 2003-06-23
JP2004163739A JP2005035281A (ja) 2003-06-23 2004-06-01 液体吐出ヘッドの製造方法

Publications (1)

Publication Number Publication Date
DE602004014678D1 true DE602004014678D1 (de) 2008-08-14

Family

ID=33422187

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004014678T Active DE602004014678D1 (de) 2003-06-23 2004-06-21 Herstellungsverfahren für einen Flüssigkeitsausstosskopf

Country Status (7)

Country Link
US (1) US7250113B2 (de)
EP (1) EP1491342B1 (de)
JP (1) JP2005035281A (de)
KR (1) KR100560593B1 (de)
CN (1) CN1321820C (de)
DE (1) DE602004014678D1 (de)
TW (1) TWI252176B (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007290160A (ja) * 2006-04-21 2007-11-08 Canon Inc 液体吐出ヘッド
JP4850637B2 (ja) * 2006-09-04 2012-01-11 キヤノン株式会社 液体吐出ヘッドの製造方法および液体吐出ヘッド
JP5193501B2 (ja) * 2007-05-31 2013-05-08 株式会社ミマキエンジニアリング インクジェットヘッド用のノズルプレートの製造方法
JP5219439B2 (ja) * 2007-09-06 2013-06-26 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
JP5031493B2 (ja) * 2007-09-06 2012-09-19 キヤノン株式会社 インクジェットヘッド用基板の製造方法
JP5031492B2 (ja) * 2007-09-06 2012-09-19 キヤノン株式会社 インクジェットヘッド基板の製造方法
JP4480182B2 (ja) * 2007-09-06 2010-06-16 キヤノン株式会社 インクジェット記録ヘッド用基板及びインクジェット記録ヘッドの製造方法
JP2009061664A (ja) * 2007-09-06 2009-03-26 Canon Inc インクジェットヘッド用基板の製造方法
US8197705B2 (en) * 2007-09-06 2012-06-12 Canon Kabushiki Kaisha Method of processing silicon substrate and method of manufacturing liquid discharge head
US8152279B2 (en) * 2008-06-18 2012-04-10 Canon Kabushiki Kaisha Liquid ejection head having substrate with nickel-containing layer
US8012773B2 (en) * 2009-06-11 2011-09-06 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head
JP5693068B2 (ja) 2010-07-14 2015-04-01 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP5800534B2 (ja) * 2011-03-09 2015-10-28 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
US8771531B2 (en) 2011-04-19 2014-07-08 Canon Kabushiki Kaisha Method of producing substrate for liquid ejection head
JP2013230589A (ja) * 2012-04-27 2013-11-14 Canon Inc 液体吐出ヘッドの製造方法
JP5980020B2 (ja) * 2012-07-10 2016-08-31 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
CN106553453A (zh) * 2016-12-06 2017-04-05 苏州工业园区纳米产业技术研究院有限公司 热气泡式喷墨打印头及其制作方法
JP6942537B2 (ja) 2017-06-29 2021-09-29 キヤノン株式会社 液体吐出ヘッド
JP7309358B2 (ja) * 2018-12-17 2023-07-18 キヤノン株式会社 液体吐出ヘッド及びその製造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045430B2 (ja) 1977-10-01 1985-10-09 キヤノン株式会社 画像形成方法
US4263601A (en) * 1977-10-01 1981-04-21 Canon Kabushiki Kaisha Image forming process
KR960021538A (ko) * 1994-12-29 1996-07-18 김용현 전해연마법을 사용한 발열방식의 잉크젯 프린트 헤드 및 그 제작방법
JP3361916B2 (ja) * 1995-06-28 2003-01-07 シャープ株式会社 微小構造の形成方法
JPH1013849A (ja) 1996-06-20 1998-01-16 Fujitsu General Ltd Ｐｄｐのガンマ補正方式
KR100311880B1 (ko) * 1996-11-11 2001-12-20 미다라이 후지오 관통구멍의제작방법,관통구멍을갖는실리콘기판,이기판을이용한디바이스,잉크제트헤드의제조방법및잉크제트헤드
DK0841167T3 (da) 1996-11-11 2005-01-24 Canon Kk Fremgangsmåde til fremstilling af gennemgående hul og anvendelse af den nævnte fremgangsmåde til fremstilling af et siliciumsubstrat, der har et gennemgående hul, og en anordning, der anvender et sådant substrat, fremgangsmåde til fremstilling.....
JP3408130B2 (ja) * 1997-12-19 2003-05-19 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
US6450621B1 (en) * 1998-09-17 2002-09-17 Canon Kabushiki Kaisha Semiconductor device having inkjet recording capability and method for manufacturing the same, inkjet head using semiconductor device, recording apparatus, and information-processing system
IT1310099B1 (it) 1999-07-12 2002-02-11 Olivetti Lexikon Spa Testina di stampa monolitica e relativo processo di fabbricazione.
IT1311361B1 (it) 1999-11-15 2002-03-12 Olivetti Lexikon Spa Testina di stampa monilitica con rete equipotenziale integrata erelativo metodo di fabbricazione.
US6431687B1 (en) * 2000-12-18 2002-08-13 Industrial Technology Research Institute Manufacturing method of monolithic integrated thermal bubble inkjet print heads and the structure for the same
CN1168603C (zh) * 2001-05-09 2004-09-29 研能科技股份有限公司 喷墨头芯片制造方法
JP4095368B2 (ja) * 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
JP3937804B2 (ja) * 2001-10-30 2007-06-27 キヤノン株式会社 貫通孔を有する構造体の製造方法
KR100499132B1 (ko) * 2002-10-24 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법

Also Published As

Publication number Publication date
CN1572505A (zh) 2005-02-02
KR100560593B1 (ko) 2006-03-17
TW200526420A (en) 2005-08-16
JP2005035281A (ja) 2005-02-10
EP1491342A1 (de) 2004-12-29
KR20050000347A (ko) 2005-01-03
US20040259372A1 (en) 2004-12-23
US7250113B2 (en) 2007-07-31
TWI252176B (en) 2006-04-01
CN1321820C (zh) 2007-06-20
EP1491342B1 (de) 2008-07-02

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Legal Events

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8364 No opposition during term of opposition