DE602005013349D1 - Optisches siliziumbauelement - Google Patents

Optisches siliziumbauelement

Info

Publication number
DE602005013349D1
DE602005013349D1 DE602005013349T DE602005013349T DE602005013349D1 DE 602005013349 D1 DE602005013349 D1 DE 602005013349D1 DE 602005013349 T DE602005013349 T DE 602005013349T DE 602005013349 T DE602005013349 T DE 602005013349T DE 602005013349 D1 DE602005013349 D1 DE 602005013349D1
Authority
DE
Germany
Prior art keywords
silicon component
optical silicon
optical
component
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602005013349T
Other languages
English (en)
Inventor
Thomas R Keyser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602005013349D1 publication Critical patent/DE602005013349D1/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking
DE602005013349T 2004-01-12 2005-01-11 Optisches siliziumbauelement Expired - Fee Related DE602005013349D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/755,212 US7672558B2 (en) 2004-01-12 2004-01-12 Silicon optical device
PCT/US2005/001117 WO2005071455A2 (en) 2004-01-12 2005-01-11 Silicon optical device

Publications (1)

Publication Number Publication Date
DE602005013349D1 true DE602005013349D1 (de) 2009-04-30

Family

ID=34739536

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005013349T Expired - Fee Related DE602005013349D1 (de) 2004-01-12 2005-01-11 Optisches siliziumbauelement

Country Status (6)

Country Link
US (1) US7672558B2 (de)
EP (1) EP1704433B1 (de)
JP (1) JP2007519041A (de)
DE (1) DE602005013349D1 (de)
TW (1) TW200537144A (de)
WO (1) WO2005071455A2 (de)

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US20080101744A1 (en) * 2006-10-31 2008-05-01 Honeywell International Inc. Optical Waveguide Sensor Devices and Methods For Making and Using Them
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Also Published As

Publication number Publication date
JP2007519041A (ja) 2007-07-12
TW200537144A (en) 2005-11-16
EP1704433B1 (de) 2009-03-18
WO2005071455A2 (en) 2005-08-04
WO2005071455A3 (en) 2005-10-06
US20050152658A1 (en) 2005-07-14
US7672558B2 (en) 2010-03-02
EP1704433A2 (de) 2006-09-27

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