DE602006011811D1 - Druckwandler - Google Patents

Druckwandler

Info

Publication number
DE602006011811D1
DE602006011811D1 DE602006011811T DE602006011811T DE602006011811D1 DE 602006011811 D1 DE602006011811 D1 DE 602006011811D1 DE 602006011811 T DE602006011811 T DE 602006011811T DE 602006011811 T DE602006011811 T DE 602006011811T DE 602006011811 D1 DE602006011811 D1 DE 602006011811D1
Authority
DE
Germany
Prior art keywords
substrate
sensor cell
pressure
top surface
ltcc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006011811T
Other languages
English (en)
Inventor
Timothy A Vaz
Timothy M Betzner
Stephen P Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Delphi Technologies Inc
Original Assignee
Delphi Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delphi Technologies Inc filed Critical Delphi Technologies Inc
Publication of DE602006011811D1 publication Critical patent/DE602006011811D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4998—Combined manufacture including applying or shaping of fluent material
DE602006011811T 2005-05-09 2006-04-19 Druckwandler Active DE602006011811D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/124,832 US7243552B2 (en) 2005-05-09 2005-05-09 Pressure sensor assembly

Publications (1)

Publication Number Publication Date
DE602006011811D1 true DE602006011811D1 (de) 2010-03-11

Family

ID=36754307

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006011811T Active DE602006011811D1 (de) 2005-05-09 2006-04-19 Druckwandler

Country Status (4)

Country Link
US (2) US7243552B2 (de)
EP (2) EP1722208B1 (de)
AT (1) ATE456031T1 (de)
DE (1) DE602006011811D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7677109B2 (en) * 2008-02-27 2010-03-16 Honeywell International Inc. Pressure sense die pad layout and method for direct wire bonding to programmable compensation integrated circuit die
US8322225B2 (en) * 2009-07-10 2012-12-04 Honeywell International Inc. Sensor package assembly having an unconstrained sense die
US8230743B2 (en) 2010-08-23 2012-07-31 Honeywell International Inc. Pressure sensor
CN102322893B (zh) * 2011-05-30 2013-02-13 中国电子科技集团公司第四十九研究所 充油式温度压力复合传感器
GB2542332A (en) 2015-06-29 2017-03-22 Continental automotive systems inc Pressure sensor device with a MEMS piezoresistive element attached to an in-circuit ceramic board
CN209326840U (zh) 2018-12-27 2019-08-30 热敏碟公司 压力传感器及压力变送器
US10892229B2 (en) 2019-04-05 2021-01-12 Nxp Usa, Inc. Media shield with EMI capability for pressure sensor

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH592300A5 (de) 1975-07-08 1977-10-31 Keller Hans W
US5220838A (en) 1991-03-28 1993-06-22 The Foxboro Company Overpressure-protected, differential pressure sensor and method of making the same
US5285690A (en) 1992-01-24 1994-02-15 The Foxboro Company Pressure sensor having a laminated substrate
US5287746A (en) * 1992-04-14 1994-02-22 Rosemount Inc. Modular transmitter with flame arresting header
US5349491A (en) * 1992-11-06 1994-09-20 Kavlico Corporation Pre-stressed pressure transducer and method of forming same
US5438876A (en) * 1993-08-05 1995-08-08 The Foxboro Company Modular diaphragm pressure sensor with peripheral mounted electrical terminals
US5587601A (en) * 1995-06-05 1996-12-24 Kulite Semiconductor Products, Inc. Support structure for a semiconductor pressure transducer
US5661245A (en) 1995-07-14 1997-08-26 Sensym, Incorporated Force sensor assembly with integrated rigid, movable interface for transferring force to a responsive medium
US5740594A (en) * 1996-07-22 1998-04-21 Texas Instruments Incorporated Method for making a fluid pressure transducer
WO1998012528A1 (fr) * 1996-09-19 1998-03-26 Hokuriku Electric Industry Co., Ltd. Capteur de pression a capacite electrostatique
DE19830538A1 (de) 1998-07-08 2000-01-20 Siemens Ag Drucksensor-Anordnung, insbesondere zur Druckerfassung in einem ölbeaufschlagten Druckbereich eines Kraftfahrzeuggetriebes
JP3494594B2 (ja) 1999-08-05 2004-02-09 忠弘 大見 圧力検出器の取付け構造
US6441503B1 (en) * 2001-01-03 2002-08-27 Amkor Technology, Inc. Bond wire pressure sensor die package
US6993975B2 (en) 2003-11-03 2006-02-07 Delphi Technologies, Inc. Pressure sensor module having stress isolation platform

Also Published As

Publication number Publication date
US7243552B2 (en) 2007-07-17
US20060248957A1 (en) 2006-11-09
EP1901050B1 (de) 2012-06-13
US20070214894A1 (en) 2007-09-20
US7421773B2 (en) 2008-09-09
ATE456031T1 (de) 2010-02-15
EP1901050A3 (de) 2009-09-16
EP1722208A1 (de) 2006-11-15
EP1901050A2 (de) 2008-03-19
EP1722208B1 (de) 2010-01-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition