DE602007002987D1 - Dli-mocvd-verfahren zur herstellung von elektroden für elektrochemische reaktoren - Google Patents

Dli-mocvd-verfahren zur herstellung von elektroden für elektrochemische reaktoren

Info

Publication number
DE602007002987D1
DE602007002987D1 DE602007002987T DE602007002987T DE602007002987D1 DE 602007002987 D1 DE602007002987 D1 DE 602007002987D1 DE 602007002987 T DE602007002987 T DE 602007002987T DE 602007002987 T DE602007002987 T DE 602007002987T DE 602007002987 D1 DE602007002987 D1 DE 602007002987D1
Authority
DE
Germany
Prior art keywords
dli
electrodes
preparation
mocvd process
electrochemical reactors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007002987T
Other languages
English (en)
Inventor
Sophie Mailley
Philippe Capron
Stephanie Thollon
Thierry Krebs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602007002987D1 publication Critical patent/DE602007002987D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8825—Methods for deposition of the catalytic active composition
    • H01M4/8867—Vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/88—Processes of manufacture
    • H01M4/8803—Supports for the deposition of the catalytic active composition
    • H01M4/8807—Gas diffusion layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/023—Porous and characterised by the material
    • H01M8/0234—Carbonaceous material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M2008/1095—Fuel cells with polymeric electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90—Selection of catalytic material
    • H01M4/92—Metals of platinum group
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
DE602007002987T 2006-02-03 2007-01-15 Dli-mocvd-verfahren zur herstellung von elektroden für elektrochemische reaktoren Active DE602007002987D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0650399A FR2897070B1 (fr) 2006-02-03 2006-02-03 Procede dli-mocvd pour la fabrication d'electrodes pour reacteurs electrochimiques, electrodes obtenues par ce procede et pile a combustible et accumulateur mettant en oeuvre de telles electrodes
PCT/FR2007/050651 WO2007088292A1 (fr) 2006-02-03 2007-01-15 Procédé dli-mocvd pour la fabrication d'électrodes pour réacteurs électrochimiques

Publications (1)

Publication Number Publication Date
DE602007002987D1 true DE602007002987D1 (de) 2009-12-10

Family

ID=37027635

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007002987T Active DE602007002987D1 (de) 2006-02-03 2007-01-15 Dli-mocvd-verfahren zur herstellung von elektroden für elektrochemische reaktoren

Country Status (9)

Country Link
US (1) US8071161B2 (de)
EP (1) EP1982371B1 (de)
JP (1) JP5179380B2 (de)
KR (1) KR101346430B1 (de)
AT (1) ATE447242T1 (de)
DE (1) DE602007002987D1 (de)
ES (1) ES2333276T3 (de)
FR (1) FR2897070B1 (de)
WO (1) WO2007088292A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2919308B1 (fr) * 2007-07-23 2009-12-11 Commissariat Energie Atomique Procede de preparation d'un materiau nanocomposite par depot chimique en phase vapeur.
US20090145781A1 (en) * 2007-12-11 2009-06-11 Gm Global Technology Operations, Inc. Method of treating nanoparticles using a proton exchange membrane and liquid electrolyte cell
FR2928662B1 (fr) * 2008-03-11 2011-08-26 Arkema France Procede et systeme de depot d'un metal ou metalloide sur des nanotubes de carbone
JP4466760B2 (ja) * 2008-04-11 2010-05-26 トヨタ自動車株式会社 電極触媒の製造方法
FR2940980B1 (fr) 2009-01-15 2011-07-29 Centre Nat Rech Scient Complexes metalliques pour le depot chimique en phase vapeur de platine
WO2011130174A1 (en) * 2010-04-15 2011-10-20 Novellus Systems, Inc. Gas and liquid injection methods and apparatus
GB201116025D0 (en) * 2011-09-16 2011-10-26 Surface Innovations Ltd Method
FR2985740A1 (fr) 2012-01-17 2013-07-19 Commissariat Energie Atomique Depot chimique en phase vapeur de ptsi a partir de complexes organometalliques de pt.
FR2995618A1 (fr) 2012-09-19 2014-03-21 Centre Nat Rech Scient Procede de traitement de surface de monocristaux de materiaux
FR3026024B1 (fr) 2014-09-24 2018-06-15 Commissariat A L'energie Atomique Et Aux Energies Alternatives Module catalytique presentant une efficacite amelioree au vieillissement
JP7296123B2 (ja) * 2017-09-05 2023-06-22 国立大学法人北海道大学 金属酸化物－多孔体複合体の製造方法及び多孔質炭素材料と金属酸化物との複合体

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US5783716A (en) * 1996-06-28 1998-07-21 Advanced Technology Materials, Inc. Platinum source compositions for chemical vapor deposition of platinum
US6673127B1 (en) * 1997-01-22 2004-01-06 Denora S.P.A. Method of forming robust metal, metal oxide, and metal alloy layers on ion-conductive polymer membranes
IT1291603B1 (it) 1997-04-18 1999-01-11 De Nora Spa Elettrodi a diffusione gassosa per cella a combustibile a membrana polimerica
US6103077A (en) 1998-01-02 2000-08-15 De Nora S.P.A. Structures and methods of manufacture for gas diffusion electrodes and electrode components
US6461675B2 (en) * 1998-07-10 2002-10-08 Cvc Products, Inc. Method for forming a copper film on a substrate
US6610436B1 (en) * 1998-09-11 2003-08-26 Gore Enterprise Holdings Catalytic coatings and fuel cell electrodes and membrane electrode assemblies made therefrom
US6287717B1 (en) * 1998-11-13 2001-09-11 Gore Enterprise Holdings, Inc. Fuel cell membrane electrode assemblies with improved power outputs
TW515129B (en) * 2000-09-29 2002-12-21 Sony Corp Method for manufacturing gas diffusion electrode and method for manufacturing electrochemical device
WO2003015199A1 (en) 2000-10-27 2003-02-20 Microcoating Technologies, Inc. Fuel cell having improved catalytic layer
EP1382080A2 (de) * 2000-11-30 2004-01-21 MTI Microfuel Cells, Inc. Brennstoffzellenmembran und system mit integrierter gastrennung
US7060384B2 (en) * 2001-09-28 2006-06-13 Matsushita Electric Industrial Co., Ltd. Polymer electrolyte fuel cell
JP3704512B2 (ja) * 2002-07-02 2005-10-12 本田技研工業株式会社 燃料電池スタックの組み立て方法
US6991871B2 (en) * 2002-08-27 2006-01-31 Honda Giken Kogyo Kabushiki Kaisha Fuel cell
EP1570539A2 (de) * 2002-10-31 2005-09-07 Carbon Nanotechnologies, Inc. Brennstoffzellen-elektrode enthaltend kohlenstoff-nanoröhren
US20040167014A1 (en) * 2002-11-13 2004-08-26 The Regents Of The Univ. Of California, Office Of Technology Transfer, University Of California Nanostructured proton exchange membrane fuel cells
US20050112450A1 (en) * 2003-09-08 2005-05-26 Intematix Corporation Low platinum fuel cell catalysts and method for preparing the same
GB0400166D0 (en) * 2004-01-06 2004-02-11 Ic Innovations Ltd Catalyst
WO2006014403A2 (en) * 2004-06-30 2006-02-09 Georgia Tech Research Corporation Microstructures and methods of fabrication thereof
US20060068099A1 (en) * 2004-09-30 2006-03-30 Sharp Laboratories Of America, Inc. Grading PrxCa1-xMnO3 thin films by metalorganic chemical vapor deposition
US7608334B2 (en) * 2005-03-29 2009-10-27 3M Innovative Properties Company Oxidatively stable microlayers of gas diffusion layers
FR2897205B1 (fr) * 2006-02-03 2009-06-05 Commissariat Energie Atomique Cathode pour reacteur electrochimique, reacteur electrochimique integrant de telles cathodes et procede de fabrication d'une telle cathode
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Also Published As

Publication number Publication date
KR101346430B1 (ko) 2014-01-02
EP1982371A1 (de) 2008-10-22
US8071161B2 (en) 2011-12-06
FR2897070A1 (fr) 2007-08-10
KR20080091490A (ko) 2008-10-13
JP2009525575A (ja) 2009-07-09
ATE447242T1 (de) 2009-11-15
US20100215845A1 (en) 2010-08-26
EP1982371B1 (de) 2009-10-28
JP5179380B2 (ja) 2013-04-10
ES2333276T3 (es) 2010-02-18
FR2897070B1 (fr) 2008-12-19
WO2007088292A1 (fr) 2007-08-09

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