DE60219360D1 - Bikonvexe festimmersionslinse - Google Patents
Bikonvexe festimmersionslinseInfo
- Publication number
- DE60219360D1 DE60219360D1 DE60219360T DE60219360T DE60219360D1 DE 60219360 D1 DE60219360 D1 DE 60219360D1 DE 60219360 T DE60219360 T DE 60219360T DE 60219360 T DE60219360 T DE 60219360T DE 60219360 D1 DE60219360 D1 DE 60219360D1
- Authority
- DE
- Germany
- Prior art keywords
- festimmersionslinse
- bikonvexe
- convex
- curvature
- radius
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007654 immersion Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1378—Separate aberration correction lenses; Cylindrical lenses to generate astigmatism; Beam expanders
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/052,011 US6594086B1 (en) | 2002-01-16 | 2002-01-16 | Bi-convex solid immersion lens |
US52011 | 2002-01-16 | ||
PCT/US2002/039538 WO2003062864A2 (en) | 2002-01-16 | 2002-12-11 | Bi-convex solid immersion lens |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60219360D1 true DE60219360D1 (de) | 2007-05-16 |
DE60219360T2 DE60219360T2 (de) | 2007-12-13 |
Family
ID=21974831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60219360T Expired - Lifetime DE60219360T2 (de) | 2002-01-16 | 2002-12-11 | Bikonvexe festimmersionslinse |
Country Status (9)
Country | Link |
---|---|
US (4) | US6594086B1 (de) |
EP (1) | EP1466194B1 (de) |
JP (1) | JP4195921B2 (de) |
KR (3) | KR100870214B1 (de) |
CN (1) | CN1610843A (de) |
AT (1) | ATE358826T1 (de) |
DE (1) | DE60219360T2 (de) |
TW (1) | TWI249622B (de) |
WO (1) | WO2003062864A2 (de) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6594086B1 (en) * | 2002-01-16 | 2003-07-15 | Optonics, Inc. (A Credence Company) | Bi-convex solid immersion lens |
US7426171B2 (en) * | 2002-11-18 | 2008-09-16 | Sony Corporation | Optical lens, condenser lens, optical pickup, and optical recording/reproducing apparatus |
TWI269886B (en) * | 2003-03-20 | 2007-01-01 | Hamamatsu Photonics Kk | Microscope and specimen observation method |
US7423816B2 (en) * | 2003-03-20 | 2008-09-09 | Hamamatsu Photonics K.K. | Solid immersion lens and microscope |
US7221502B2 (en) * | 2003-03-20 | 2007-05-22 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
US7046449B2 (en) * | 2003-03-20 | 2006-05-16 | Hamamatsu Photonics K.K. | Solid immersion lens and sample observation method using it |
DE10343722A1 (de) * | 2003-09-17 | 2005-04-14 | Carl Zeiss Jena Gmbh | Festkörper-Immersionslinsen-Spektroskopie und -Mikroskopie |
US6961186B2 (en) * | 2003-09-26 | 2005-11-01 | Takumi Technology Corp. | Contact printing using a magnified mask image |
US7042647B2 (en) * | 2003-10-02 | 2006-05-09 | Credence Systems Corporation | Scanning optical system |
US7046418B2 (en) * | 2003-10-08 | 2006-05-16 | Gentex Corporation | Reversible electrodeposition devices and associated electrochemical media |
EP1679541B1 (de) | 2003-10-31 | 2012-04-11 | Hamamatsu Photonics K.K. | Probenbeobachtungsverfahren und mikroskop und festimmersionslinse und optische kontaktflüssigkeit zur verwendung darin |
US7576928B2 (en) * | 2003-10-31 | 2009-08-18 | Hamamatsu Photonics K.K. | Solid immersion lens holder |
US20050094258A1 (en) * | 2003-10-31 | 2005-05-05 | Hamamatsu Photonics K.K. | Solid immersion lens moving device and microscope using the same |
JP4643994B2 (ja) * | 2005-01-19 | 2011-03-02 | 浜松ホトニクス株式会社 | 固浸レンズホルダ |
US7110172B2 (en) * | 2004-02-27 | 2006-09-19 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
US7312921B2 (en) * | 2004-02-27 | 2007-12-25 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
JP4577023B2 (ja) * | 2004-03-15 | 2010-11-10 | ソニー株式会社 | ソリッドイマージョンレンズ、集光レンズ、光学ピックアップ装置、光記録再生装置及びソリッドイマージョンレンズの形成方法 |
CN100359578C (zh) * | 2004-09-14 | 2008-01-02 | 索尼株式会社 | 固体浸没透镜以及制造该固体浸没透镜的方法 |
JP2006114196A (ja) * | 2004-09-14 | 2006-04-27 | Sony Corp | ソリッドイマージョンレンズとこれを用いた集光レンズ、光学ピックアップ装置、光記録再生装置及びソリッドイマージョンレンズの形成方法 |
JP2006112808A (ja) * | 2004-10-12 | 2006-04-27 | Fujikura Ltd | 表面プラズモンセンサー |
US7314767B2 (en) * | 2005-05-27 | 2008-01-01 | Credence Systems Corporation | Method for local wafer thinning and reinforcement |
US7659981B2 (en) * | 2005-08-26 | 2010-02-09 | Dcg Systems, Inc. | Apparatus and method for probing integrated circuits using polarization difference probing |
US7450245B2 (en) | 2005-06-29 | 2008-11-11 | Dcg Systems, Inc. | Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system |
US7616312B2 (en) | 2005-06-29 | 2009-11-10 | Dcg Systems, Inc. | Apparatus and method for probing integrated circuits using laser illumination |
US7733100B2 (en) * | 2005-08-26 | 2010-06-08 | Dcg Systems, Inc. | System and method for modulation mapping |
JP5045148B2 (ja) * | 2006-04-27 | 2012-10-10 | セイコーエプソン株式会社 | プラスチック偏光レンズ |
FR2902226B1 (fr) | 2006-06-12 | 2010-01-29 | Commissariat Energie Atomique | Composant optique fonctionnant en transmission en champ proche |
US20070291361A1 (en) * | 2006-06-19 | 2007-12-20 | Credence Systems Corporation | Lens housing with integrated thermal management |
CN101126491B (zh) * | 2006-08-18 | 2011-03-23 | 鸿富锦精密工业(深圳)有限公司 | 发光二极管模组 |
US7660054B2 (en) * | 2007-06-29 | 2010-02-09 | Intel Corporation | Thermally controlled sold immersion lens fixture |
US8424594B2 (en) * | 2007-12-10 | 2013-04-23 | Presto Engineering, Inc. | Apparatus for thermal control in the analysis of electronic devices |
US8553322B2 (en) * | 2008-11-04 | 2013-10-08 | Dcg Systems, Inc. | Variable magnification optics with spray cooling |
SG166089A1 (en) | 2009-05-01 | 2010-11-29 | Dcg Systems Inc | Systems and method for laser voltage imaging state mapping |
US8072699B2 (en) * | 2009-06-17 | 2011-12-06 | Semicaps Pte Ltd | Solid immersion lens optics assembly |
US8767199B2 (en) * | 2010-10-15 | 2014-07-01 | Infrared Laboratories, Inc. | Inspection system utilizing solid immersion lenses |
CN102540408A (zh) * | 2011-12-26 | 2012-07-04 | 吉林大学 | 超半球型电光固浸透镜 |
JP6312664B2 (ja) * | 2012-06-26 | 2018-04-18 | ケーエルエー−テンカー コーポレイション | 近接場計測 |
TWI512867B (zh) * | 2012-12-14 | 2015-12-11 | Yayatech Co Ltd | 晶圓切割道之檢測方法及其檢測治具 |
US9030658B1 (en) | 2013-05-07 | 2015-05-12 | Checkpoint Technologies, Llc | Multi-resolution optical probing system having reliable temperature control and mechanical isolation |
US8873032B1 (en) | 2013-05-07 | 2014-10-28 | CheckPoint Technologies, LLC. | Optical probing system having reliable temperature control |
US9182580B1 (en) | 2013-08-30 | 2015-11-10 | Checkpoint Technologies, Llc | Optical probe system having accurate positional and orientational adjustments for multiple optical objectives |
US9217855B1 (en) | 2013-08-30 | 2015-12-22 | Checkpoint Technologies, Llc | Multi-magnification high sensitivity optical system for probing electronic devices |
KR102352024B1 (ko) * | 2014-03-11 | 2022-01-14 | 디씨지 시스템스 인코포레이티드 | Sil 팁을 플로팅하는 것을 자체 정정 |
KR102400976B1 (ko) * | 2014-09-26 | 2022-05-24 | 하마마츠 포토닉스 가부시키가이샤 | 고침 렌즈 홀더 및 화상 취득 장치 |
US9417281B1 (en) | 2014-09-30 | 2016-08-16 | Checkpoint Technologies Llc | Adjustable split-beam optical probing (ASOP) |
KR20170011708A (ko) * | 2015-07-24 | 2017-02-02 | 엘지전자 주식회사 | 광학 렌즈 및 이를 포함하는 백라이트 유닛과 디스플레이 디바이스 |
KR102133320B1 (ko) * | 2015-10-09 | 2020-07-14 | 에이에스엠엘 네델란즈 비.브이. | 검사 및 계측을 위한 방법 및 장치 |
WO2020008613A1 (ja) * | 2018-07-06 | 2020-01-09 | オリンパス株式会社 | 対物光学系 |
JP2022517107A (ja) * | 2019-01-14 | 2022-03-04 | ユニヴァーシティ オブ ワシントン | ソリッドイマージョンメニスカスレンズのための装置、システム及び方法 |
US11329722B2 (en) | 2020-03-27 | 2022-05-10 | Relative Dynamics Incorporated | Optical terminals |
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-
2002
- 2002-01-16 US US10/052,011 patent/US6594086B1/en not_active Expired - Lifetime
- 2002-12-11 JP JP2003562674A patent/JP4195921B2/ja not_active Expired - Fee Related
- 2002-12-11 AT AT02806615T patent/ATE358826T1/de not_active IP Right Cessation
- 2002-12-11 WO PCT/US2002/039538 patent/WO2003062864A2/en active Application Filing
- 2002-12-11 KR KR1020047007230A patent/KR100870214B1/ko not_active IP Right Cessation
- 2002-12-11 EP EP02806615A patent/EP1466194B1/de not_active Expired - Lifetime
- 2002-12-11 KR KR1020087015284A patent/KR20080064912A/ko not_active Application Discontinuation
- 2002-12-11 DE DE60219360T patent/DE60219360T2/de not_active Expired - Lifetime
- 2002-12-11 CN CNA028227859A patent/CN1610843A/zh active Pending
- 2002-12-11 KR KR1020077015713A patent/KR100872751B1/ko not_active IP Right Cessation
- 2002-12-25 TW TW091137365A patent/TWI249622B/zh not_active IP Right Cessation
-
2003
- 2003-05-19 US US10/440,866 patent/US6778327B2/en not_active Expired - Lifetime
-
2004
- 2004-07-01 US US10/883,542 patent/US7227702B2/en not_active Expired - Lifetime
-
2007
- 2007-05-08 US US11/746,036 patent/US7492529B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US7227702B2 (en) | 2007-06-05 |
TW200302354A (en) | 2003-08-01 |
KR100872751B1 (ko) | 2008-12-08 |
US20070205795A1 (en) | 2007-09-06 |
ATE358826T1 (de) | 2007-04-15 |
WO2003062864A2 (en) | 2003-07-31 |
TWI249622B (en) | 2006-02-21 |
KR20080064912A (ko) | 2008-07-09 |
JP2005515514A (ja) | 2005-05-26 |
EP1466194B1 (de) | 2007-04-04 |
KR20070087002A (ko) | 2007-08-27 |
US7492529B2 (en) | 2009-02-17 |
KR100870214B1 (ko) | 2008-11-27 |
US6594086B1 (en) | 2003-07-15 |
EP1466194A2 (de) | 2004-10-13 |
KR20040075862A (ko) | 2004-08-30 |
WO2003062864A3 (en) | 2003-10-16 |
DE60219360T2 (de) | 2007-12-13 |
US20030202255A1 (en) | 2003-10-30 |
US20040240074A1 (en) | 2004-12-02 |
US6778327B2 (en) | 2004-08-17 |
JP4195921B2 (ja) | 2008-12-17 |
CN1610843A (zh) | 2005-04-27 |
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