DE60223309D1 - Vibrationswellen-Antriebsvorrichtung - Google Patents

Vibrationswellen-Antriebsvorrichtung

Info

Publication number
DE60223309D1
DE60223309D1 DE60223309T DE60223309T DE60223309D1 DE 60223309 D1 DE60223309 D1 DE 60223309D1 DE 60223309 T DE60223309 T DE 60223309T DE 60223309 T DE60223309 T DE 60223309T DE 60223309 D1 DE60223309 D1 DE 60223309D1
Authority
DE
Germany
Prior art keywords
driving device
vibration wave
wave driving
vibration
wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60223309T
Other languages
English (en)
Other versions
DE60223309T2 (de
Inventor
Yuuji Ohno
Kenjiro Takemura
Takashi Maeno
Nobuyuki Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE60223309D1 publication Critical patent/DE60223309D1/de
Application granted granted Critical
Publication of DE60223309T2 publication Critical patent/DE60223309T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
DE60223309T 2001-03-12 2002-03-11 Vibrationswellen-Antriebsvorrichtung Expired - Lifetime DE60223309T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001068432A JP4726167B2 (ja) 2001-03-12 2001-03-12 振動波駆動装置
JP2001068432 2001-03-12

Publications (2)

Publication Number Publication Date
DE60223309D1 true DE60223309D1 (de) 2007-12-20
DE60223309T2 DE60223309T2 (de) 2008-08-28

Family

ID=18926624

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60223309T Expired - Lifetime DE60223309T2 (de) 2001-03-12 2002-03-11 Vibrationswellen-Antriebsvorrichtung

Country Status (4)

Country Link
US (1) US6819029B2 (de)
EP (1) EP1241715B1 (de)
JP (1) JP4726167B2 (de)
DE (1) DE60223309T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4027090B2 (ja) * 2001-12-27 2007-12-26 キヤノン株式会社 振動体および振動波駆動装置
JP4086690B2 (ja) 2003-03-19 2008-05-14 キヤノン株式会社 マニピュレータ
JP4756916B2 (ja) * 2005-05-31 2011-08-24 キヤノン株式会社 振動波モータ
KR101080667B1 (ko) * 2005-11-10 2011-11-08 가부시키가이샤 도요다 지도숏키 초음파 모터
US7884326B2 (en) * 2007-01-22 2011-02-08 Fei Company Manipulator for rotating and translating a sample holder
JP5184839B2 (ja) * 2007-08-01 2013-04-17 株式会社東芝 圧電モータおよびカメラ装置
EP2051280A1 (de) * 2007-10-18 2009-04-22 The Regents of the University of California Motorisierter Manipulator zur Positionierung einer TEM-Probe
JP6771939B2 (ja) 2016-04-25 2020-10-21 キヤノン株式会社 振動型アクチュエータ及び電子機器

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03183376A (ja) 1989-12-08 1991-08-09 Canon Inc 振動波モータ
JP2996477B2 (ja) 1990-02-05 1999-12-27 キヤノン株式会社 振動波駆動装置
JP2993702B2 (ja) 1990-04-02 1999-12-27 キヤノン株式会社 振動波駆動装置
JP2879955B2 (ja) 1990-08-03 1999-04-05 キヤノン株式会社 振動波駆動装置
JP2925272B2 (ja) 1990-08-31 1999-07-28 キヤノン株式会社 振動波モータ
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
JP3107933B2 (ja) 1992-12-03 2000-11-13 キヤノン株式会社 振動波駆動装置および振動波駆動装置を備えた装置
JP3059031B2 (ja) 1993-09-22 2000-07-04 キヤノン株式会社 振動波駆動装置及び振動波駆動装置を備えた装置
JPH07170768A (ja) * 1993-12-14 1995-07-04 Nikon Corp 超音波モータ
EP0661764B1 (de) 1993-12-27 1999-03-10 Canon Kabushiki Kaisha Vibrationswellenantrieb
DE69507857T2 (de) * 1994-07-05 1999-08-19 Nikon Corp Durch Vibrationen angetriebener Motor
JP3402816B2 (ja) 1994-12-22 2003-05-06 キヤノン株式会社 超音波モータの駆動回路
JP3432321B2 (ja) 1995-01-31 2003-08-04 太平洋セメント株式会社 積層セラミックス圧電体素子
JPH08280185A (ja) * 1995-04-07 1996-10-22 Nikon Corp 超音波アクチュエータ
JPH09219980A (ja) * 1995-12-04 1997-08-19 Nikon Corp 多自由度形駆動装置
JPH09322572A (ja) * 1996-05-30 1997-12-12 Nikon Corp 振動アクチュエータ
JP4026885B2 (ja) 1997-05-16 2007-12-26 キヤノン株式会社 圧電素子および振動型駆動装置
JPH11220891A (ja) 1997-11-27 1999-08-10 Canon Inc 振動型アクチュエータおよび振動型駆動装置
US6404104B1 (en) 1997-11-27 2002-06-11 Canon Kabushiki Kaisha Vibration type actuator and vibration type driving apparatus
JP2000324861A (ja) * 1999-05-14 2000-11-24 Canon Inc 振動型アクチュエータおよび振動波駆動装置
JP4328412B2 (ja) * 1999-05-14 2009-09-09 キヤノン株式会社 振動型アクチュエータおよび振動型駆動装置

Also Published As

Publication number Publication date
EP1241715A2 (de) 2002-09-18
EP1241715A3 (de) 2005-11-09
US20020145363A1 (en) 2002-10-10
EP1241715B1 (de) 2007-11-07
US6819029B2 (en) 2004-11-16
JP4726167B2 (ja) 2011-07-20
DE60223309T2 (de) 2008-08-28
JP2002272147A (ja) 2002-09-20

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Legal Events

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