DE60307045D1 - Verfahren zum erzeugen eines bildes unter verwendung von einer antireflexunterschichtzusammensetzung - Google Patents

Verfahren zum erzeugen eines bildes unter verwendung von einer antireflexunterschichtzusammensetzung

Info

Publication number
DE60307045D1
DE60307045D1 DE60307045T DE60307045T DE60307045D1 DE 60307045 D1 DE60307045 D1 DE 60307045D1 DE 60307045 T DE60307045 T DE 60307045T DE 60307045 T DE60307045 T DE 60307045T DE 60307045 D1 DE60307045 D1 DE 60307045D1
Authority
DE
Germany
Prior art keywords
composition
image
antireflective
coating
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60307045T
Other languages
English (en)
Other versions
DE60307045T2 (de
Inventor
O Neisser
E Oberlander
A Toukhy
Raj Sakamuri
Shuji Ding-Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMD Performance Materials Corp
Original Assignee
AZ Electronic Materials USA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AZ Electronic Materials USA Corp filed Critical AZ Electronic Materials USA Corp
Application granted granted Critical
Publication of DE60307045D1 publication Critical patent/DE60307045D1/de
Publication of DE60307045T2 publication Critical patent/DE60307045T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2045—Exposure; Apparatus therefor using originals with apertures, e.g. stencil exposure masks
    • G03F7/2047—Exposure with radiation other than visible light or UV light, e.g. shadow printing, proximity printing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/151—Matting or other surface reflectivity altering material
DE60307045T 2002-01-09 2003-01-03 Verfahren zur Herstellung einer bildverwendenden Minimum-Antireflektrierenden Bodenbeschichtungszusammensetzung Expired - Lifetime DE60307045T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US42878 2002-01-09
US10/042,878 US7070914B2 (en) 2002-01-09 2002-01-09 Process for producing an image using a first minimum bottom antireflective coating composition
PCT/EP2003/000023 WO2003058348A1 (en) 2002-01-09 2003-01-03 Process for producing an image using a first minimum bottom antireflective coating composition

Publications (2)

Publication Number Publication Date
DE60307045D1 true DE60307045D1 (de) 2006-09-07
DE60307045T2 DE60307045T2 (de) 2007-02-22

Family

ID=21924226

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60307045T Expired - Lifetime DE60307045T2 (de) 2002-01-09 2003-01-03 Verfahren zur Herstellung einer bildverwendenden Minimum-Antireflektrierenden Bodenbeschichtungszusammensetzung

Country Status (10)

Country Link
US (2) US7070914B2 (de)
EP (3) EP1720066A3 (de)
JP (1) JP4482332B2 (de)
KR (4) KR20100099311A (de)
CN (2) CN101034259A (de)
AT (1) ATE334429T1 (de)
DE (1) DE60307045T2 (de)
MY (1) MY139535A (de)
TW (1) TWI252963B (de)
WO (1) WO2003058348A1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003140347A (ja) * 2001-11-02 2003-05-14 Tokyo Ohka Kogyo Co Ltd 厚膜ホトレジスト層積層体、厚膜レジストパターンの製造方法、および接続端子の製造方法
US20030215736A1 (en) * 2002-01-09 2003-11-20 Oberlander Joseph E. Negative-working photoimageable bottom antireflective coating
US7015291B2 (en) * 2002-04-01 2006-03-21 Daicel Chemical Industries, Ltd. Process for the production of high-molecular compounds for photoresist
US7108958B2 (en) 2002-07-31 2006-09-19 Brewer Science Inc. Photosensitive bottom anti-reflective coatings
US7364832B2 (en) 2003-06-11 2008-04-29 Brewer Science Inc. Wet developable hard mask in conjunction with thin photoresist for micro photolithography
EP1489460A3 (de) * 2003-06-20 2008-07-09 FUJIFILM Corporation Lichtempfindlicher Bogen mit einer Unterlage sowie einer ersten und einer zweiten lichtempfindlichen Schicht
US20050074688A1 (en) * 2003-10-03 2005-04-07 Toukhy Medhat A. Bottom antireflective coatings
JP5368674B2 (ja) * 2003-10-15 2013-12-18 ブルーワー サイエンス アイ エヌ シー． 現像液に可溶な材料および現像液に可溶な材料をビアファーストデュアルダマシン適用において用いる方法
US20050214674A1 (en) * 2004-03-25 2005-09-29 Yu Sui Positive-working photoimageable bottom antireflective coating
US20070207406A1 (en) * 2004-04-29 2007-09-06 Guerrero Douglas J Anti-reflective coatings using vinyl ether crosslinkers
US20050255410A1 (en) * 2004-04-29 2005-11-17 Guerrero Douglas J Anti-reflective coatings using vinyl ether crosslinkers
US7399581B2 (en) * 2005-02-24 2008-07-15 International Business Machines Corporation Photoresist topcoat for a photolithographic process
KR100662542B1 (ko) * 2005-06-17 2006-12-28 제일모직주식회사 반사방지 하드마스크 조성물 및 이를 이용하여 기판 상에패턴화된 재료 형상을 형성시키는 방법
US20070105040A1 (en) * 2005-11-10 2007-05-10 Toukhy Medhat A Developable undercoating composition for thick photoresist layers
US20070231736A1 (en) * 2006-03-28 2007-10-04 Chen Kuang-Jung J Bottom antireflective coating composition and method for use thereof
US7563563B2 (en) * 2006-04-18 2009-07-21 International Business Machines Corporation Wet developable bottom antireflective coating composition and method for use thereof
US7914974B2 (en) 2006-08-18 2011-03-29 Brewer Science Inc. Anti-reflective imaging layer for multiple patterning process
WO2008070060A2 (en) * 2006-12-06 2008-06-12 Fujifilm Electronic Materials U.S.A., Inc. Device manufacturing process utilizing a double pattering process
KR100932314B1 (ko) * 2007-08-24 2009-12-16 주식회사 하이닉스반도체 반도체 소자의 제조 방법
US20090098490A1 (en) * 2007-10-16 2009-04-16 Victor Pham Radiation-Sensitive, Wet Developable Bottom Antireflective Coating Compositions and Their Applications in Semiconductor Manufacturing
US8088548B2 (en) * 2007-10-23 2012-01-03 Az Electronic Materials Usa Corp. Bottom antireflective coating compositions
WO2009059031A2 (en) * 2007-10-30 2009-05-07 Brewer Science Inc. Photoimageable branched polymer
KR101585992B1 (ko) * 2007-12-20 2016-01-19 삼성전자주식회사 반사방지 코팅용 고분자, 반사방지 코팅용 조성물 및 이를 이용한 반도체 장치의 패턴 형성 방법
EP2245512B1 (de) 2008-01-29 2019-09-11 Brewer Science, Inc. On-track-prozess zur strukturierung einer hardmaske durch mehrere dunkelfeldbelichtungen
KR101697790B1 (ko) * 2008-04-23 2017-02-01 브레우어 사이언스 인코포레이션 마이크로리소그래피용 감광성 하드마스크
US8455176B2 (en) * 2008-11-12 2013-06-04 Az Electronic Materials Usa Corp. Coating composition
US20100136477A1 (en) * 2008-12-01 2010-06-03 Ng Edward W Photosensitive Composition
US9640396B2 (en) 2009-01-07 2017-05-02 Brewer Science Inc. Spin-on spacer materials for double- and triple-patterning lithography
JP5746824B2 (ja) * 2009-02-08 2015-07-08 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ 上塗りフォトレジストと共に使用するのに好適なコーティング組成物
US8632948B2 (en) * 2009-09-30 2014-01-21 Az Electronic Materials Usa Corp. Positive-working photoimageable bottom antireflective coating
US8323868B2 (en) * 2009-11-06 2012-12-04 International Business Machines Corporation Bilayer systems including a polydimethylglutarimide-based bottom layer and compositions thereof
CN102376602B (zh) * 2010-08-24 2014-05-21 中芯国际集成电路制造(上海)有限公司 用于测量底部抗反射涂层材料的挥发特性的方法
JP5278406B2 (ja) * 2010-11-02 2013-09-04 信越化学工業株式会社 パターン形成方法
JP5445430B2 (ja) * 2010-11-15 2014-03-19 信越化学工業株式会社 パターン形成方法
CN102890402B (zh) * 2011-07-19 2014-07-16 中芯国际集成电路制造(上海)有限公司 去除光感显影底部抗反射层缺陷的方法
WO2015130695A1 (en) * 2014-02-25 2015-09-03 Tokyo Electron Limited Chemical Amplification Methods and Techniques for Developable Bottom Anti-reflective Coatings and Dyed Implant Resists
KR101777852B1 (ko) * 2015-09-24 2017-09-13 한국표준과학연구원 투명기판의 제조방법 및 이를 이용한 표면증강 라만산란 기판의 제조방법
CN106058079B (zh) * 2016-08-18 2019-06-04 Tcl集团股份有限公司 一种像素bank及其制作方法、发光二极管
JP7182438B2 (ja) * 2017-12-21 2022-12-02 信越化学工業株式会社 反射防止膜、反射防止膜の製造方法、及び眼鏡型ディスプレイ
CN111487845A (zh) * 2019-01-29 2020-08-04 山东浪潮华光光电子股份有限公司 一种可以直接剥离的led管芯电极掩模图形的制作方法
EP3958291A1 (de) * 2020-08-21 2022-02-23 Ams Ag Verfahren zur herstellung einer abhebemaskenstruktur
CN115873175B (zh) * 2021-09-28 2023-09-12 上海新阳半导体材料股份有限公司 一种duv光刻用底部抗反射涂层及其制备方法和应用

Family Cites Families (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4491628A (en) 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
US4910122A (en) 1982-09-30 1990-03-20 Brewer Science, Inc. Anti-reflective coating
DE3246037A1 (de) * 1982-12-09 1984-06-14 Hoechst Ag, 6230 Frankfurt Lichtempfindliches gemisch, daraus hergestelltes lichtempfindliches kopiermaterial und verfahren zur herstellung einer druckform aus dem kopiermaterial
EP0134789B1 (de) 1983-01-24 1988-07-06 AT&T Corp. Zweischichten-uv-empfindliches schutzsystem für strukturierung von hochreflektiven trägern
JPS59226346A (ja) 1983-06-07 1984-12-19 Fuotopori Ouka Kk プリント回路の製造方法
US4521274A (en) 1984-05-24 1985-06-04 At&T Bell Laboratories Bilevel resist
US4557797A (en) 1984-06-01 1985-12-10 Texas Instruments Incorporated Resist process using anti-reflective coating
US4863827A (en) 1986-10-20 1989-09-05 American Hoechst Corporation Postive working multi-level photoresist
DE3817012A1 (de) 1988-05-19 1989-11-30 Basf Ag Positiv und negativ arbeitende strahlungsempfindliche gemische sowie verfahren zur herstellung von reliefmustern
US4985340A (en) * 1988-06-01 1991-01-15 Minnesota Mining And Manufacturing Company Energy curable compositions: two component curing agents
JPH0823694B2 (ja) * 1988-08-04 1996-03-06 富士写真フイルム株式会社 液状感光性樹脂組成物
DE3930086A1 (de) 1989-09-09 1991-03-21 Hoechst Ag Positiv arbeitendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial
DE3930087A1 (de) 1989-09-09 1991-03-14 Hoechst Ag Positiv arbeitendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial
EP0440374B1 (de) 1990-01-30 1997-04-16 Wako Pure Chemical Industries Ltd Chemisch verstärktes Photolack-Material
DE4112967A1 (de) 1991-04-20 1992-10-22 Hoechst Ag Substituierte 1-sulfonyloxy-2-pyridone, verfahren zu ihrer herstellung und ihre verwendung
DE4125260A1 (de) 1991-07-31 1993-02-04 Hoechst Ag Oligomere verbindungen mit saeurelabilen schutzgruppen und damit hergestelltes positiv arbeitendes strahlungsempfindliches gemisch
JP3000745B2 (ja) 1991-09-19 2000-01-17 富士通株式会社 レジスト組成物とレジストパターンの形成方法
JP3035721B2 (ja) 1991-10-16 2000-04-24 大日本印刷株式会社 レジストパターンの形成方法
US6165697A (en) 1991-11-15 2000-12-26 Shipley Company, L.L.C. Antihalation compositions
JP3067362B2 (ja) 1991-12-19 2000-07-17 ソニー株式会社 液晶パネルの製造方法
JP2694097B2 (ja) * 1992-03-03 1997-12-24 インターナショナル・ビジネス・マシーンズ・コーポレイション 反射防止コーティング組成物
US5389491A (en) 1992-07-15 1995-02-14 Matsushita Electric Industrial Co., Ltd. Negative working resist composition
US5294680A (en) * 1992-07-24 1994-03-15 International Business Machines Corporation Polymeric dyes for antireflective coatings
JP3503976B2 (ja) 1993-01-14 2004-03-08 株式会社東芝 パターン形成方法
DE4302681A1 (de) 1993-02-01 1994-08-04 Hoechst Ag Sulfonsäureester, damit hergestellte strahlungsempfindliche Gemische und deren Verwendung
JPH07159997A (ja) 1993-12-08 1995-06-23 Oki Electric Ind Co Ltd 放射線感応性樹脂組成物及びこれを用いたパターン形成方法
US5691101A (en) 1994-03-15 1997-11-25 Kabushiki Kaisha Toshiba Photosensitive composition
EP0675410B1 (de) 1994-03-28 1999-08-04 Wako Pure Chemical Industries Ltd Resistzusammensetzung für tiefe Ultraviolettbelichtung
US5581730A (en) 1994-07-06 1996-12-03 Advanced Micro Devices, Inc. Condition detector and prioritizer with associativity determination logic
US5871730A (en) 1994-07-29 1999-02-16 Universite De Sherbrooke Thermostable xylanase DNA, protein and methods of use
JPH08110638A (ja) 1994-10-13 1996-04-30 Hitachi Chem Co Ltd 感光性樹脂組成物およびレジスト像の製造法
US5663036A (en) 1994-12-13 1997-09-02 International Business Machines Corporation Microlithographic structure with an underlayer film comprising a thermolyzed azide
US5635333A (en) 1994-12-28 1997-06-03 Shipley Company, L.L.C. Antireflective coating process
JP3579946B2 (ja) 1995-02-13 2004-10-20 Ｊｓｒ株式会社 化学増幅型感放射線性樹脂組成物
JPH08293462A (ja) * 1995-02-21 1996-11-05 Seiko Epson Corp 半導体装置の製造方法
JPH08286384A (ja) 1995-04-14 1996-11-01 Hitachi Ltd パタン形成方法及びそれに用いるフォトレジスト材料
US5731386A (en) 1995-05-09 1998-03-24 Shipley Company, L.L.C. Polymer for positive acid catalyzed resists
JPH0955425A (ja) 1995-08-10 1997-02-25 Mitsubishi Electric Corp 多層Ａｌ配線構造を有する半導体装置およびその製造方法
US5693691A (en) 1995-08-21 1997-12-02 Brewer Science, Inc. Thermosetting anti-reflective coatings compositions
TW477913B (en) 1995-11-02 2002-03-01 Shinetsu Chemical Co Sulfonium salts and chemically amplified positive resist compositions
JPH09205057A (ja) 1996-01-25 1997-08-05 Hitachi Ltd 半導体装置の製造方法
DE69706288T2 (de) * 1996-03-07 2002-05-16 Clariant Finance Bvi Ltd Antireflexions-unterbeschichtungen durch brechungsindexmodifikation mit anomaler dispersion
AU725653B2 (en) 1996-03-07 2000-10-19 B.F. Goodrich Company, The Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
US5843624A (en) 1996-03-08 1998-12-01 Lucent Technologies Inc. Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material
JPH09260255A (ja) * 1996-03-25 1997-10-03 Nippon Telegr & Teleph Corp <Ntt> 投影露光方法
US5994006A (en) 1996-06-04 1999-11-30 Nikon Corporation Projection exposure methods
US5886102A (en) 1996-06-11 1999-03-23 Shipley Company, L.L.C. Antireflective coating compositions
US5652297A (en) 1996-08-16 1997-07-29 Hoechst Celanese Corporation Aqueous antireflective coatings for photoresist compositions
US5763135A (en) 1996-09-30 1998-06-09 Clariant Finance (Bvi) Limited Light sensitive composition containing an arylhydrazo dye
JP3655030B2 (ja) 1996-12-10 2005-06-02 東京応化工業株式会社 ネガ型化学増幅型レジスト組成物
KR100265597B1 (ko) 1996-12-30 2000-09-15 김영환 Arf 감광막 수지 및 그 제조방법
JP3852868B2 (ja) * 1997-02-06 2006-12-06 富士写真フイルム株式会社 反射防止膜材料組成物及びそれを用いたレジストパターン形成方法
US5939236A (en) 1997-02-07 1999-08-17 Shipley Company, L.L.C. Antireflective coating compositions comprising photoacid generators
US5981145A (en) 1997-04-30 1999-11-09 Clariant Finance (Bvi) Limited Light absorbing polymers
JP3031287B2 (ja) 1997-04-30 2000-04-10 日本電気株式会社 反射防止膜材料
US5882967A (en) * 1997-05-07 1999-03-16 International Business Machines Corporation Process for buried diode formation in CMOS
US6054254A (en) 1997-07-03 2000-04-25 Kabushiki Kaisha Toshiba Composition for underlying film and method of forming a pattern using the film
JPH1172925A (ja) * 1997-07-03 1999-03-16 Toshiba Corp 下層膜用組成物およびこれを用いたパターン形成方法
MY132894A (en) * 1997-08-25 2007-10-31 Ibm Layered resist system using tunable amorphous carbon film as a bottom layer and methods of fabrication thereof
US5919599A (en) * 1997-09-30 1999-07-06 Brewer Science, Inc. Thermosetting anti-reflective coatings at deep ultraviolet
CN1182440C (zh) 1997-09-30 2004-12-29 西门子公司 用于深紫外线光刻的层状结构以及形成光刻层状结构的方法
JP4053631B2 (ja) * 1997-10-08 2008-02-27 Ａｚエレクトロニックマテリアルズ株式会社 反射防止膜又は光吸収膜用組成物及びこれに用いる重合体
US5882996A (en) 1997-10-14 1999-03-16 Industrial Technology Research Institute Method of self-aligned dual damascene patterning using developer soluble arc interstitial layer
US5935760A (en) 1997-10-20 1999-08-10 Brewer Science Inc. Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
US6110641A (en) 1997-12-04 2000-08-29 Shipley Company, L.L.C. Radiation sensitive composition containing novel dye
US6090694A (en) * 1997-12-16 2000-07-18 Advanced Micro Devices, Inc. Local interconnect patterning and contact formation
US6338936B1 (en) 1998-02-02 2002-01-15 Taiyo Ink Manufacturing Co., Ltd. Photosensitive resin composition and method for formation of resist pattern by use thereof
US6268907B1 (en) * 1998-05-13 2001-07-31 International Business Machines Corporation Elimination of standing waves in photoresist
US6451498B1 (en) 1998-05-28 2002-09-17 Atotech Deutschland Gmbh Photosensitive composition
US6242161B1 (en) 1998-05-29 2001-06-05 Jsr Corporation Acrylic copolymer and reflection-preventing film-forming composition containing the same
TW457403B (en) * 1998-07-03 2001-10-01 Clariant Int Ltd Composition for forming a radiation absorbing coating containing blocked isocyanate compound and anti-reflective coating formed therefrom
KR20010023776A (ko) * 1998-07-10 2001-03-26 잔디해머,한스루돌프하우스 저면 반사 방지막용 조성물 및 이에 사용하기 위한 신규중합체 염료
US20010006759A1 (en) * 1998-09-08 2001-07-05 Charles R. Shipley Jr. Radiation sensitive compositions
JP2000089471A (ja) * 1998-09-14 2000-03-31 Sharp Corp レジストパターンの形成方法
US6114085A (en) 1998-11-18 2000-09-05 Clariant Finance (Bvi) Limited Antireflective composition for a deep ultraviolet photoresist
JP4284728B2 (ja) 1998-12-07 2009-06-24 Ｊｓｒ株式会社 反射防止膜、反射防止膜を含む積層体および反射防止膜の製造方法
US6251562B1 (en) 1998-12-23 2001-06-26 International Business Machines Corporation Antireflective polymer and method of use
KR100557608B1 (ko) 1999-02-10 2006-03-10 주식회사 하이닉스반도체 신규의 포토레지스트 가교제 및 이를 이용한 포토레지스트 조성물
US6316165B1 (en) 1999-03-08 2001-11-13 Shipley Company, L.L.C. Planarizing antireflective coating compositions
US6110653A (en) 1999-07-26 2000-08-29 International Business Machines Corporation Acid sensitive ARC and method of use
US6187506B1 (en) 1999-08-05 2001-02-13 Clariant Finance (Bvi) Limited Antireflective coating for photoresist compositions
KR100557594B1 (ko) 1999-08-17 2006-03-10 주식회사 하이닉스반도체 노광후 지연 안정성을 갖는 신규의 포토레지스트용 단량체, 그의 공중합체 및 이를 함유한 포토레지스트 조성물
KR100535149B1 (ko) * 1999-08-17 2005-12-07 주식회사 하이닉스반도체 신규의 포토레지스트용 공중합체 및 이를 이용한 포토레지스트조성물
KR100533379B1 (ko) * 1999-09-07 2005-12-06 주식회사 하이닉스반도체 유기 난반사 방지막용 조성물과 이의 제조방법
US6365322B1 (en) * 1999-12-07 2002-04-02 Clariant Finance (Bvi) Limited Photoresist composition for deep UV radiation
KR100359862B1 (ko) 1999-12-23 2002-11-09 주식회사 하이닉스반도체 난반사 방지막용 중합체와 그 제조방법
KR100549574B1 (ko) * 1999-12-30 2006-02-08 주식회사 하이닉스반도체 유기 반사 방지막용 중합체 및 그의 제조방법
US6323310B1 (en) * 2000-04-19 2001-11-27 Brewer Science, Inc. Anti-reflective coating compositions comprising polymerized aminoplasts
TW538056B (en) * 2000-07-11 2003-06-21 Samsung Electronics Co Ltd Resist composition comprising photosensitive polymer having lactone in its backbone
US6447980B1 (en) * 2000-07-19 2002-09-10 Clariant Finance (Bvi) Limited Photoresist composition for deep UV and process thereof
US6312870B1 (en) * 2000-07-19 2001-11-06 Arch Specialty Chemicals, Inc. t-butyl cinnamate polymers and their use in photoresist compositions
KR100734249B1 (ko) * 2000-09-07 2007-07-02 삼성전자주식회사 축합환의 방향족 환을 포함하는 보호기를 가지는 감광성폴리머 및 이를 포함하는 레지스트 조성물
JP2002169299A (ja) 2000-09-21 2002-06-14 Tokuyama Corp フォトレジスト現像液
US20040013971A1 (en) 2001-11-21 2004-01-22 Berger Larry L Antireflective layer for use in microlithography
US20030215736A1 (en) * 2002-01-09 2003-11-20 Oberlander Joseph E. Negative-working photoimageable bottom antireflective coating
US6844131B2 (en) 2002-01-09 2005-01-18 Clariant Finance (Bvi) Limited Positive-working photoimageable bottom antireflective coating

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DE60307045T2 (de) 2007-02-22
CN101034259A (zh) 2007-09-12
MY139535A (en) 2009-10-30
CN1615459A (zh) 2005-05-11
EP1466216A1 (de) 2004-10-13
EP1720066A2 (de) 2006-11-08
EP1720066A3 (de) 2009-06-03
EP1845415A2 (de) 2007-10-17
EP1845415B1 (de) 2014-04-30
KR20100099311A (ko) 2010-09-10
CN100342283C (zh) 2007-10-10
US7070914B2 (en) 2006-07-04
TWI252963B (en) 2006-04-11
JP2005526988A (ja) 2005-09-08
KR20070073983A (ko) 2007-07-10
KR101253021B1 (ko) 2013-04-15
KR20040075060A (ko) 2004-08-26
KR20120082465A (ko) 2012-07-23
EP1466216B1 (de) 2006-07-26
WO2003058348A1 (en) 2003-07-17
TW200301846A (en) 2003-07-16
ATE334429T1 (de) 2006-08-15
US20030129547A1 (en) 2003-07-10
US20060199103A1 (en) 2006-09-07
EP1845415A3 (de) 2009-05-27

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