DE60312583D1 - Drucksensor und Verfahren zu seiner Herstellung - Google Patents

Drucksensor und Verfahren zu seiner Herstellung

Info

Publication number
DE60312583D1
DE60312583D1 DE60312583T DE60312583T DE60312583D1 DE 60312583 D1 DE60312583 D1 DE 60312583D1 DE 60312583 T DE60312583 T DE 60312583T DE 60312583 T DE60312583 T DE 60312583T DE 60312583 D1 DE60312583 D1 DE 60312583D1
Authority
DE
Germany
Prior art keywords
manufacture
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60312583T
Other languages
English (en)
Other versions
DE60312583T2 (de
Inventor
Chien-Hua Chen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE60312583D1 publication Critical patent/DE60312583D1/de
Publication of DE60312583T2 publication Critical patent/DE60312583T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
DE60312583T 2002-04-10 2003-04-02 Drucksensor und Verfahren zu seiner Herstellung Expired - Fee Related DE60312583T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US120944 2002-04-10
US10/120,944 US6662663B2 (en) 2002-04-10 2002-04-10 Pressure sensor with two membranes forming a capacitor

Publications (2)

Publication Number Publication Date
DE60312583D1 true DE60312583D1 (de) 2007-05-03
DE60312583T2 DE60312583T2 (de) 2008-05-29

Family

ID=28454012

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60312583T Expired - Fee Related DE60312583T2 (de) 2002-04-10 2003-04-02 Drucksensor und Verfahren zu seiner Herstellung

Country Status (5)

Country Link
US (2) US6662663B2 (de)
EP (1) EP1353161B1 (de)
JP (1) JP3682046B2 (de)
DE (1) DE60312583T2 (de)
TW (1) TW200305008A (de)

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US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
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US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9136136B2 (en) 2013-09-19 2015-09-15 Infineon Technologies Dresden Gmbh Method and structure for creating cavities with extreme aspect ratios
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9733139B2 (en) 2014-05-02 2017-08-15 Silicon Microstructures, Inc. Vertical membranes for pressure sensing applications
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
JP6296031B2 (ja) * 2015-09-28 2018-03-20 株式会社村田製作所 圧力センサ製造装置および圧力センサ製造方法
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11615257B2 (en) 2017-02-24 2023-03-28 Endotronix, Inc. Method for communicating with implant devices
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US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
WO2019240791A1 (en) * 2018-06-13 2019-12-19 Hewlett-Packard Development Company, L.P. Vacuum-based microphone sensor controller and indicator
US11206494B2 (en) 2018-10-05 2021-12-21 Knowles Electronics, Llc Microphone device with ingress protection
CN112840676B (zh) 2018-10-05 2022-05-03 美商楼氏电子有限公司 响应于声学信号来生成电信号的声学换能器和麦克风组件
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CN111885469B (zh) * 2020-07-09 2022-09-13 诺思(天津)微系统有限责任公司 Mems扬声器及其制造方法
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint

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Also Published As

Publication number Publication date
US7004034B2 (en) 2006-02-28
EP1353161B1 (de) 2007-03-21
DE60312583T2 (de) 2008-05-29
JP3682046B2 (ja) 2005-08-10
US20040060360A1 (en) 2004-04-01
US20030192383A1 (en) 2003-10-16
JP2003322576A (ja) 2003-11-14
US6662663B2 (en) 2003-12-16
EP1353161A1 (de) 2003-10-15
TW200305008A (en) 2003-10-16

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, US

8328 Change in the person/name/address of the agent

Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER & ZINKLER, 82049 P

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee