DE60326822D1 - Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür - Google Patents

Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür

Info

Publication number
DE60326822D1
DE60326822D1 DE60326822T DE60326822T DE60326822D1 DE 60326822 D1 DE60326822 D1 DE 60326822D1 DE 60326822 T DE60326822 T DE 60326822T DE 60326822 T DE60326822 T DE 60326822T DE 60326822 D1 DE60326822 D1 DE 60326822D1
Authority
DE
Germany
Prior art keywords
manufacturing
piezoelectric element
method therefor
multilayer piezoelectric
multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60326822T
Other languages
English (en)
Inventor
Toshikatsu Kashiwaya
Mutsumi Kitagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60326822D1 publication Critical patent/DE60326822D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/1051—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section in stacking direction, e.g. polygonal, trapezoidal
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead based oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128—Assembling formed circuit to base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49131—Assembling to base an electrical component, e.g., capacitor, etc. by utilizing optical sighting device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49147—Assembling terminal to base
    • Y10T29/49151—Assembling terminal to base by deforming or shaping
DE60326822T 2002-02-08 2003-02-05 Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür Expired - Lifetime DE60326822D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002033165 2002-02-08
JP2002328503 2002-11-12
PCT/JP2003/001162 WO2003067673A1 (fr) 2002-02-08 2003-02-05 Element piezoelectrique multicouche et son procede de fabrication

Publications (1)

Publication Number Publication Date
DE60326822D1 true DE60326822D1 (de) 2009-05-07

Family

ID=27736471

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60326822T Expired - Lifetime DE60326822D1 (de) 2002-02-08 2003-02-05 Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür

Country Status (5)

Country Link
US (2) US6888292B2 (de)
EP (1) EP1473783B1 (de)
JP (1) JP4197494B2 (de)
DE (1) DE60326822D1 (de)
WO (1) WO2003067673A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4831051B2 (ja) * 2002-03-18 2011-12-07 セイコーエプソン株式会社 画像記録装置、圧電アクチュエータ、及び、液体噴射ヘッド
JP4702316B2 (ja) * 2002-03-18 2011-06-15 セイコーエプソン株式会社 圧電アクチュエータユニット、圧電素子、及び、その製造方法
JP3999156B2 (ja) 2003-03-31 2007-10-31 日本碍子株式会社 圧電／電歪膜型素子及び圧電／電歪磁器組成物
JP4777605B2 (ja) 2003-05-21 2011-09-21 日本碍子株式会社 多層型圧電／電歪素子
US7375911B1 (en) * 2003-11-25 2008-05-20 Maxtor Corporation Piezoelectric actuator and sensor for disk drive dual-stage servo systems
JP2005170693A (ja) * 2003-12-08 2005-06-30 Ngk Insulators Ltd 圧電／電歪磁器組成物、圧電／電歪体、及び圧電／電歪膜型素子
JP4782412B2 (ja) * 2004-12-24 2011-09-28 日本碍子株式会社 圧電／電歪体、圧電／電歪積層体、及び圧電／電歪膜型アクチュエータ
JP4782413B2 (ja) * 2004-12-24 2011-09-28 日本碍子株式会社 圧電／電歪体、圧電／電歪積層体、及び圧電／電歪膜型アクチュエータ
JP2006202990A (ja) * 2005-01-20 2006-08-03 Ngk Insulators Ltd 圧電素子
DE102005008514B4 (de) * 2005-02-24 2019-05-16 Tdk Corporation Mikrofonmembran und Mikrofon mit der Mikrofonmembran
JP2007001838A (ja) * 2005-06-27 2007-01-11 Ngk Insulators Ltd 圧電／電歪磁器組成物、圧電／電歪体、及び圧電／電歪膜型素子
JP2007123585A (ja) * 2005-10-28 2007-05-17 Kyocera Corp 圧電アクチュエータおよびその製造方法、並びにインクジェットヘッド
JP2010538475A (ja) 2007-08-31 2010-12-09 アプライド マテリアルズ インコーポレイテッド 多サイズの光起電デバイスを形成するための生産ラインモジュール
US7911113B1 (en) * 2009-09-02 2011-03-22 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and method of manufacturing piezoelectric/electrostrictive element
DE102010005906A1 (de) * 2010-01-27 2011-07-28 Epcos Ag, 81669 Piezoelektrisches Bauelement
US8324783B1 (en) 2012-04-24 2012-12-04 UltraSolar Technology, Inc. Non-decaying electric power generation from pyroelectric materials
JP6123944B2 (ja) * 2014-08-18 2017-05-10 株式会社村田製作所 圧電素子及び曲げ検出センサ
CN105718116A (zh) * 2016-02-01 2016-06-29 京东方科技集团股份有限公司 一种触控面板及其制备方法、触控显示屏

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4220029Y1 (de) 1965-03-15 1967-11-21
US3481874A (en) * 1965-10-19 1969-12-02 Nippon Electric Co Piezoelectric ceramic composition
JPS4417103Y1 (de) 1966-02-02 1969-07-23
JPS503519A (de) 1973-05-14 1975-01-14
JPS60102779A (ja) 1983-11-09 1985-06-06 Hitachi Metals Ltd 圧電磁器組成物
JP3024763B2 (ja) * 1988-07-26 2000-03-21 日立金属株式会社 積層型変位素子
JPH07315926A (ja) 1994-05-23 1995-12-05 Ngk Spark Plug Co Ltd 耐湿性に優れたセラミックフィルタ素子用圧電磁器組成物
US6140746A (en) 1995-04-03 2000-10-31 Seiko Epson Corporation Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film
JP3487068B2 (ja) 1995-04-03 2004-01-13 セイコーエプソン株式会社 圧電体薄膜およびその製造法ならびにそれを用いたインクジェット記録ヘッド
JP3320596B2 (ja) * 1995-09-27 2002-09-03 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
JP3209082B2 (ja) 1996-03-06 2001-09-17 セイコーエプソン株式会社 圧電体薄膜素子及びその製造方法、並びにこれを用いたインクジェット式記録ヘッド
JP3260116B2 (ja) 1997-05-12 2002-02-25 松下電器産業株式会社 圧電材料およびその製造方法およびそれを用いた圧電振動子および圧電発音体
JPH11191645A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 圧電／電歪膜型アクチュエータ
JP2000357826A (ja) 1999-04-13 2000-12-26 Seiko Epson Corp 圧電体素子の製造方法、圧電体素子、インクジェット式記録ヘッドおよびプリンタ
EP1089353B1 (de) * 1999-10-01 2006-11-08 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Bauelement
JP4100847B2 (ja) * 1999-12-28 2008-06-11 Ｔｄｋ株式会社 圧電セラミック組成物
JP2001358377A (ja) * 2000-02-10 2001-12-26 Toshiba Corp 超磁歪材料とその製造方法、およびそれを用いた磁歪アクチュエータと磁歪センサ
US6731049B2 (en) 2000-09-20 2004-05-04 Ngk Insulators, Ltd. Piezoelectric element and process for production thereof
JP3953806B2 (ja) 2001-12-20 2007-08-08 日本碍子株式会社 圧電素子、及びその製造方法
JP3868285B2 (ja) 2001-12-20 2007-01-17 日本碍子株式会社 圧電素子、及びその製造方法
US6610427B2 (en) 2000-09-20 2003-08-26 Ngk Insulators, Ltd. Piezoelectric element and process for production thereof
JP3512379B2 (ja) * 2000-09-20 2004-03-29 日本碍子株式会社 圧電体素子、及びその製造方法
JP4091260B2 (ja) 2001-02-28 2008-05-28 太陽誘電株式会社 圧電素子，それを利用した圧電駆動体及び電子機器
JP4777605B2 (ja) 2003-05-21 2011-09-21 日本碍子株式会社 多層型圧電／電歪素子

Also Published As

Publication number Publication date
JP4197494B2 (ja) 2008-12-17
JPWO2003067673A1 (ja) 2005-06-02
EP1473783A1 (de) 2004-11-03
US7484278B2 (en) 2009-02-03
EP1473783A4 (de) 2008-05-28
EP1473783B1 (de) 2009-03-25
US6888292B2 (en) 2005-05-03
US20050120529A1 (en) 2005-06-09
US20040051422A1 (en) 2004-03-18
WO2003067673A1 (fr) 2003-08-14

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