DE60332351D1 - Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalken - Google Patents
Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalkenInfo
- Publication number
- DE60332351D1 DE60332351D1 DE60332351T DE60332351T DE60332351D1 DE 60332351 D1 DE60332351 D1 DE 60332351D1 DE 60332351 T DE60332351 T DE 60332351T DE 60332351 T DE60332351 T DE 60332351T DE 60332351 D1 DE60332351 D1 DE 60332351D1
- Authority
- DE
- Germany
- Prior art keywords
- electrothermically
- bistabile
- microelectromechanical switch
- electro
- actuated microelectromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H37/00—Thermally-actuated switches
- H01H2037/008—Micromechanical switches operated thermally
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H37/00—Thermally-actuated switches
- H01H37/02—Details
- H01H37/32—Thermally-sensitive members
- H01H37/52—Thermally-sensitive members actuated due to deflection of bimetallic element
- H01H37/54—Thermally-sensitive members actuated due to deflection of bimetallic element wherein the bimetallic element is inherently snap acting
- H01H37/5409—Bistable switches; Resetting means
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/218,290 US6753582B2 (en) | 2002-08-14 | 2002-08-14 | Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
PCT/US2003/025632 WO2004017351A2 (en) | 2002-08-14 | 2003-08-13 | Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60332351D1 true DE60332351D1 (de) | 2010-06-10 |
Family
ID=31714519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60332351T Expired - Lifetime DE60332351D1 (de) | 2002-08-14 | 2003-08-13 | Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalken |
Country Status (10)
Country | Link |
---|---|
US (1) | US6753582B2 (de) |
EP (1) | EP1529301B1 (de) |
JP (1) | JP4143066B2 (de) |
CN (1) | CN1675728B (de) |
AT (1) | ATE466373T1 (de) |
AU (1) | AU2003274912A1 (de) |
DE (1) | DE60332351D1 (de) |
MY (1) | MY135407A (de) |
TW (1) | TWI310953B (de) |
WO (1) | WO2004017351A2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100513723B1 (ko) * | 2002-11-18 | 2005-09-08 | 삼성전자주식회사 | Mems스위치 |
US6985650B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
US6985651B2 (en) * | 2003-08-05 | 2006-01-10 | Xerox Corporation | Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same |
US6983088B2 (en) * | 2003-08-05 | 2006-01-03 | Xerox Corporation | Thermal actuator and an optical waveguide switch including the same |
GB2410371B (en) * | 2004-01-22 | 2007-04-04 | Microsaic Systems Ltd | Microengineered broadband electrical switches |
US7362199B2 (en) | 2004-03-31 | 2008-04-22 | Intel Corporation | Collapsible contact switch |
US7221817B2 (en) * | 2004-08-13 | 2007-05-22 | Xerox Corporation | Beam switch structures and methods |
US7046539B1 (en) * | 2004-11-02 | 2006-05-16 | Sandia Corporation | Mechanical memory |
US7312678B2 (en) * | 2005-01-05 | 2007-12-25 | Norcada Inc. | Micro-electromechanical relay |
KR100967210B1 (ko) | 2005-09-27 | 2010-07-05 | 삼성전자주식회사 | 형상 메모리 소자 |
CN1923670B (zh) * | 2006-09-21 | 2011-01-05 | 上海交通大学 | 用于直线推进的多弧结构的改性su8电热微执行器 |
JP2008103777A (ja) * | 2006-10-17 | 2008-05-01 | Ritsumeikan | マイクロメカニカル共振器 |
KR100882148B1 (ko) | 2007-06-22 | 2009-02-06 | 한국과학기술원 | 정전 구동기, 그 구동방법 및 이를 이용한 응용소자 |
US20090146773A1 (en) * | 2007-12-07 | 2009-06-11 | Honeywell International Inc. | Lateral snap acting mems micro switch |
US8232858B1 (en) * | 2008-02-20 | 2012-07-31 | Sandia Corporation | Microelectromechanical (MEM) thermal actuator |
TWI384518B (zh) * | 2008-04-15 | 2013-02-01 | Pei Zen Chang | 低吸附電壓之射頻微機電開關及其製造方法 |
DE102009018365A1 (de) * | 2009-04-23 | 2010-11-04 | Albert-Ludwigs-Universität Freiburg | Thermopneumatischer Aktor und Verfahren zum Herstellen eines solchen |
CN101719575B (zh) * | 2010-01-13 | 2012-08-29 | 上海交通大学 | 电热驱动的面内双稳态射频微开关 |
CN101814866B (zh) * | 2010-04-16 | 2012-08-01 | 大连理工大学 | 一种电热驱动微结构的制作方法 |
US9438139B2 (en) | 2012-08-06 | 2016-09-06 | Board Of Trustees Of Michigan State University | Energy harvesting devices for low frequency applications |
US10018238B2 (en) * | 2013-11-01 | 2018-07-10 | Sabanci University | Variable negative stiffness actuation |
US10480671B2 (en) | 2014-11-24 | 2019-11-19 | Genesis Advanced Technology Inc. | Control element with buckled member |
US10014462B2 (en) * | 2015-01-22 | 2018-07-03 | Carnegie Mellon University | Piezoelectric nanoelectromechanical relays |
FR3043269B1 (fr) * | 2015-10-29 | 2017-12-22 | Sagemcom Energy & Telecom Sas | Organe de coupure a commande thermique. compteur electrique equipe de l’organe de coupure. |
CN109103708B (zh) * | 2018-07-16 | 2024-04-05 | 河北科技大学 | 一种电插头可循环过热保护自动熔断器及其使用方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5994816A (en) * | 1996-12-16 | 1999-11-30 | Mcnc | Thermal arched beam microelectromechanical devices and associated fabrication methods |
US6310419B1 (en) * | 2000-04-05 | 2001-10-30 | Jds Uniphase Inc. | Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same |
US6407478B1 (en) * | 2000-08-21 | 2002-06-18 | Jds Uniphase Corporation | Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature |
-
2002
- 2002-08-14 US US10/218,290 patent/US6753582B2/en not_active Expired - Lifetime
-
2003
- 2003-07-15 TW TW092119235A patent/TWI310953B/zh active
- 2003-07-22 MY MYPI20032750A patent/MY135407A/en unknown
- 2003-08-13 WO PCT/US2003/025632 patent/WO2004017351A2/en active Application Filing
- 2003-08-13 AT AT03759192T patent/ATE466373T1/de not_active IP Right Cessation
- 2003-08-13 JP JP2004529474A patent/JP4143066B2/ja not_active Expired - Fee Related
- 2003-08-13 DE DE60332351T patent/DE60332351D1/de not_active Expired - Lifetime
- 2003-08-13 AU AU2003274912A patent/AU2003274912A1/en not_active Abandoned
- 2003-08-13 CN CN038192853A patent/CN1675728B/zh not_active Expired - Fee Related
- 2003-08-13 EP EP03759192A patent/EP1529301B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2005536031A (ja) | 2005-11-24 |
WO2004017351A3 (en) | 2004-07-29 |
WO2004017351A2 (en) | 2004-02-26 |
EP1529301B1 (de) | 2010-04-28 |
US6753582B2 (en) | 2004-06-22 |
CN1675728A (zh) | 2005-09-28 |
ATE466373T1 (de) | 2010-05-15 |
AU2003274912A8 (en) | 2004-03-03 |
US20040032000A1 (en) | 2004-02-19 |
MY135407A (en) | 2008-04-30 |
EP1529301A2 (de) | 2005-05-11 |
TWI310953B (en) | 2009-06-11 |
CN1675728B (zh) | 2010-12-08 |
AU2003274912A1 (en) | 2004-03-03 |
JP4143066B2 (ja) | 2008-09-03 |
TW200405379A (en) | 2004-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |