DE60335931D1 - Verfahren zur Herstellung einer Mikrostruktur, und Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes - Google Patents
Verfahren zur Herstellung einer Mikrostruktur, und Verfahren zur Herstellung eines FlüssigkeitsausstosskopfesInfo
- Publication number
- DE60335931D1 DE60335931D1 DE60335931T DE60335931T DE60335931D1 DE 60335931 D1 DE60335931 D1 DE 60335931D1 DE 60335931 T DE60335931 T DE 60335931T DE 60335931 T DE60335931 T DE 60335931T DE 60335931 D1 DE60335931 D1 DE 60335931D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- microstructure
- liquid ejection
- ejection head
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 2
- 239000007788 liquid Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002201971 | 2002-07-10 | ||
JP2003271623A JP4280574B2 (ja) | 2002-07-10 | 2003-07-07 | 液体吐出ヘッドの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60335931D1 true DE60335931D1 (de) | 2011-03-17 |
Family
ID=29738476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60335931T Expired - Lifetime DE60335931D1 (de) | 2002-07-10 | 2003-07-10 | Verfahren zur Herstellung einer Mikrostruktur, und Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes |
Country Status (7)
Country | Link |
---|---|
US (1) | US6986980B2 (de) |
EP (1) | EP1380425B1 (de) |
JP (1) | JP4280574B2 (de) |
KR (1) | KR100591654B1 (de) |
CN (1) | CN1257059C (de) |
DE (1) | DE60335931D1 (de) |
TW (1) | TWI221122B (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2849222B1 (fr) * | 2002-12-20 | 2005-10-21 | Commissariat Energie Atomique | Microstructure comportant une couche d'adherence et procede de fabrication d'une telle microstructure |
DE10353767B4 (de) * | 2003-11-17 | 2005-09-29 | Infineon Technologies Ag | Vorrichtung zur Häusung einer mikromechanischen Struktur und Verfahren zur Herstellung derselben |
DE10361075A1 (de) * | 2003-12-22 | 2005-07-28 | Pac Tech - Packaging Technologies Gmbh | Verfahren und Vorichtung zur Trocknung von Schaltungssubstraten |
JP4447974B2 (ja) * | 2004-06-28 | 2010-04-07 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
EP1763706B1 (de) * | 2004-06-28 | 2013-12-11 | Canon Kabushiki Kaisha | Verfahren zur herstellung eines flüssigkeits-entladungskopfes |
WO2006001531A1 (en) * | 2004-06-28 | 2006-01-05 | Canon Kabushiki Kaisha | Liquid discharge head manufacturing method, and liquid discharge head obtained using this method |
JP4761498B2 (ja) * | 2004-06-28 | 2011-08-31 | キヤノン株式会社 | 感光性樹脂組成物、ならびにこれを用いた段差パターンの製造方法及びインクジェットヘッドの製造方法 |
JP4533256B2 (ja) * | 2004-06-28 | 2010-09-01 | キヤノン株式会社 | 微細構造体の製造方法および液体吐出ヘッドの製造方法 |
CN100496984C (zh) * | 2004-06-28 | 2009-06-10 | 佳能株式会社 | 排液头的制造方法和使用这一方法获得的排液头 |
JP4484774B2 (ja) * | 2004-06-28 | 2010-06-16 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP5027991B2 (ja) * | 2004-12-03 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッドおよびその製造方法 |
EP1957282B1 (de) * | 2005-12-02 | 2013-04-10 | Canon Kabushiki Kaisha | Verfahren zur herstellung eines flüssigkeitsausstosskopfs |
US8438729B2 (en) * | 2006-03-09 | 2013-05-14 | Canon Kabushiki Kaisha | Method of producing liquid discharge head |
US8376525B2 (en) * | 2006-09-08 | 2013-02-19 | Canon Kabushiki Kaisha | Liquid discharge head and method of manufacturing the same |
JP2008290413A (ja) * | 2007-05-28 | 2008-12-04 | Canon Inc | 液体吐出ヘッドの製造方法 |
US8039195B2 (en) * | 2008-02-08 | 2011-10-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Si device making method by using a novel material for packing and unpacking process |
US8137573B2 (en) * | 2008-06-19 | 2012-03-20 | Canon Kabushiki Kaisha | Liquid ejection head, method for manufacturing liquid ejection head, and method for manufacturing structure |
JP5069186B2 (ja) * | 2008-07-29 | 2012-11-07 | ソニー株式会社 | 液滴吐出ヘッド及び液滴吐出装置 |
KR20100060423A (ko) * | 2008-11-27 | 2010-06-07 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
US8499453B2 (en) * | 2009-11-26 | 2013-08-06 | Canon Kabushiki Kaisha | Method of manufacturing liquid discharge head, and method of manufacturing discharge port member |
FR2953991B1 (fr) * | 2009-12-10 | 2012-01-06 | Commissariat Energie Atomique | Procede de realisation d'un revetement de surface controle tridimensionnellement dans une cavite |
US11175279B2 (en) | 2010-05-03 | 2021-11-16 | Creatv Microtech, Inc. | Polymer microfilters, devices comprising the same, methods of manufacturing the same, and uses thereof |
EP3777994A1 (de) | 2010-05-03 | 2021-02-17 | Creatv Microtech, Inc. | Polymermikrofilter und verfahren zur herstellung davon |
US8434229B2 (en) * | 2010-11-24 | 2013-05-07 | Canon Kabushiki Kaisha | Liquid ejection head manufacturing method |
CN103252997B (zh) * | 2012-02-16 | 2015-12-16 | 珠海纳思达珠海赛纳打印科技股份有限公司 | 一种液体喷头及其制造方法 |
US9308726B2 (en) * | 2012-02-16 | 2016-04-12 | Xerox Corporation | Printhead fluid paths formed with sacrificial material patterned using additive manufacturing processes |
US9599852B1 (en) * | 2013-08-05 | 2017-03-21 | Lensvector, Inc. | Manufacturing of liquid crystal lenses using carrier substrate |
CN106716257B (zh) * | 2014-09-30 | 2019-12-24 | 富士胶片株式会社 | 图案形成方法、抗蚀剂图案及电子元件的制造方法 |
CN116113884A (zh) * | 2020-09-07 | 2023-05-12 | 富士胶片株式会社 | 固化物的制造方法、层叠体的制造方法及电子器件的制造方法 |
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CA969692A (en) | 1969-09-15 | 1975-06-17 | Richard A. Jones | Catalysed thermosetting polymeric coatings and inks |
DE3540480A1 (de) * | 1985-11-15 | 1987-05-21 | Hoechst Ag | Durch strahlung polymerisierbares gemisch, daraus hergestelltes aufzeichnungsmaterial und verfahren zur herstellung von reliefaufzeichnungen |
US4882595A (en) * | 1987-10-30 | 1989-11-21 | Hewlett-Packard Company | Hydraulically tuned channel architecture |
US4835086A (en) * | 1988-02-12 | 1989-05-30 | Hoechst Celanese Corporation | Polysulfone barrier layer for bi-level photoresists |
US4906552A (en) * | 1988-02-22 | 1990-03-06 | Hughes Aircraft Company | Two layer dye photoresist process for sub-half micrometer resolution photolithography |
JPH0631444B2 (ja) | 1989-06-07 | 1994-04-27 | 東洋鋼板株式会社 | 半田用複層めっき鋼板 |
JPH0740808B2 (ja) | 1990-10-17 | 1995-05-10 | 井関農機株式会社 | トラクターの油圧昇降制御装置 |
DE69127801T2 (de) | 1990-12-19 | 1998-02-05 | Canon Kk | Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf |
JP2694054B2 (ja) | 1990-12-19 | 1997-12-24 | キヤノン株式会社 | 液体噴射記録ヘッド、その製造方法、及び液体噴射記録ヘッドを備えた記録装置 |
JPH0645242A (ja) | 1992-07-24 | 1994-02-18 | Hitachi Ltd | レジスト塗布方法及びその装置 |
JP3143307B2 (ja) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
EP0715957B1 (de) | 1994-12-05 | 1999-05-26 | Canon Kabushiki Kaisha | Verfahren zur Herstellung eines Tintenstrahlkopfes |
DE69603639T2 (de) * | 1995-03-31 | 2000-04-13 | Canon Kk | Verfahren zum Herstellen eines Tintenstrahlkopfes |
US6113214A (en) * | 1995-06-08 | 2000-09-05 | Canon Kabushiki Kaisha | Ink jet recording head having components made from the same material, recording apparatus using the head, and method for manufacturing such head and ink jet recording apparatus |
US6158843A (en) | 1997-03-28 | 2000-12-12 | Lexmark International, Inc. | Ink jet printer nozzle plates with ink filtering projections |
JP3373147B2 (ja) * | 1998-02-23 | 2003-02-04 | シャープ株式会社 | フォトレジスト膜及びそのパターン形成方法 |
JP4497633B2 (ja) | 1999-03-15 | 2010-07-07 | キヤノン株式会社 | 撥液体層の形成方法及び液体吐出ヘッドの製造方法 |
US6582890B2 (en) * | 2001-03-05 | 2003-06-24 | Sandia Corporation | Multiple wavelength photolithography for preparing multilayer microstructures |
JP4532785B2 (ja) | 2001-07-11 | 2010-08-25 | キヤノン株式会社 | 構造体の製造方法、および液体吐出ヘッドの製造方法 |
JP2003300323A (ja) * | 2002-04-11 | 2003-10-21 | Canon Inc | インクジェットヘッド及びその製造方法 |
JP2004042389A (ja) * | 2002-07-10 | 2004-02-12 | Canon Inc | 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド |
-
2003
- 2003-07-07 JP JP2003271623A patent/JP4280574B2/ja not_active Expired - Fee Related
- 2003-07-09 US US10/615,302 patent/US6986980B2/en not_active Expired - Fee Related
- 2003-07-10 DE DE60335931T patent/DE60335931D1/de not_active Expired - Lifetime
- 2003-07-10 KR KR1020030046719A patent/KR100591654B1/ko not_active IP Right Cessation
- 2003-07-10 EP EP03015760A patent/EP1380425B1/de not_active Expired - Lifetime
- 2003-07-10 TW TW092118905A patent/TWI221122B/zh not_active IP Right Cessation
- 2003-07-10 CN CNB031467830A patent/CN1257059C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1380425A1 (de) | 2004-01-14 |
CN1475350A (zh) | 2004-02-18 |
TWI221122B (en) | 2004-09-21 |
EP1380425B1 (de) | 2011-02-02 |
US20040131957A1 (en) | 2004-07-08 |
KR20040005695A (ko) | 2004-01-16 |
JP2004046217A (ja) | 2004-02-12 |
CN1257059C (zh) | 2006-05-24 |
KR100591654B1 (ko) | 2006-06-20 |
TW200401714A (en) | 2004-02-01 |
JP4280574B2 (ja) | 2009-06-17 |
US6986980B2 (en) | 2006-01-17 |
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