DE68907127T2 - Optische Positionsmessung. - Google Patents
Optische Positionsmessung.Info
- Publication number
- DE68907127T2 DE68907127T2 DE89304753T DE68907127T DE68907127T2 DE 68907127 T2 DE68907127 T2 DE 68907127T2 DE 89304753 T DE89304753 T DE 89304753T DE 68907127 T DE68907127 T DE 68907127T DE 68907127 T2 DE68907127 T2 DE 68907127T2
- Authority
- DE
- Germany
- Prior art keywords
- position measurement
- optical position
- optical
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S3/00—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
- G01S3/78—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
- G01S3/782—Systems for determining direction or deviation from predetermined direction
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8811027A GB2218505B (en) | 1988-05-10 | 1988-05-10 | Optical position measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68907127D1 DE68907127D1 (de) | 1993-07-22 |
DE68907127T2 true DE68907127T2 (de) | 1993-09-30 |
Family
ID=10636646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89304753T Expired - Fee Related DE68907127T2 (de) | 1988-05-10 | 1989-05-10 | Optische Positionsmessung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5026162A (de) |
EP (1) | EP0342016B1 (de) |
DE (1) | DE68907127T2 (de) |
GB (1) | GB2218505B (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2215159B (en) * | 1988-02-26 | 1992-10-14 | James Donald Campbell Allan | Detecting change in location of a moving source of electromagnetic radiation |
US5200795A (en) * | 1989-08-31 | 1993-04-06 | The Board Of Trustees Of The Leland Stanford Junior University | Passive quadrature phase detection system for coherent fiber optic systems |
GB2236178B (en) * | 1989-09-20 | 1993-09-01 | Marconi Gec Ltd | Monitoring arrangements |
GB8921268D0 (en) * | 1989-09-20 | 1990-04-25 | Marconi Gec Ltd | Orientation monitoring apparatus |
DE59102268D1 (de) * | 1991-05-24 | 1994-08-25 | Heidenhain Gmbh Dr Johannes | Vorrichtung zum Ein- und/oder Auskoppeln von Lichtstrahlen mit einem integriert-optischen Baustein. |
JPH0560511A (ja) * | 1991-09-02 | 1993-03-09 | Mitsubishi Electric Corp | ヘテロダイン干渉計 |
JP3302139B2 (ja) * | 1993-10-27 | 2002-07-15 | キヤノン株式会社 | 移動体の直進精度測定装置 |
US5900936A (en) * | 1996-03-18 | 1999-05-04 | Massachusetts Institute Of Technology | Method and apparatus for detecting relative displacement using a light source |
DE10242749A1 (de) * | 2002-09-13 | 2004-04-08 | Bergische Universität Wuppertal | Dreidimensionales interferometrisches Positions-Messsystem |
TWI354093B (en) * | 2007-12-31 | 2011-12-11 | Ind Tech Res Inst | Dual-receiving ultrasonic distance measuring equip |
US9291918B2 (en) * | 2011-03-08 | 2016-03-22 | Nikon Corporation | Light source assembly that generates heterodyne output beams |
WO2014095209A1 (en) * | 2012-12-17 | 2014-06-26 | Waterford Institute Of Technology | Position detector |
WO2020209855A1 (en) * | 2019-04-11 | 2020-10-15 | Hewlett-Packard Development Company, L.P. | Three dimensional imaging |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3881105A (en) * | 1969-12-05 | 1975-04-29 | Philips Corp | Apparatus for determining the position of an object in an arbitrary cross-section of a beam of radiation |
NL7010130A (de) * | 1970-07-09 | 1972-01-11 | ||
DE2240968A1 (de) * | 1972-08-21 | 1974-03-07 | Leitz Ernst Gmbh | Optisches verfahren zur messung der relativen verschiebung eines beugungsgitters sowie einrichtungen zu seiner durchfuehrung |
US4725146A (en) * | 1983-09-30 | 1988-02-16 | Novon, Inc. | Method and apparatus for sensing position |
-
1988
- 1988-05-10 GB GB8811027A patent/GB2218505B/en not_active Expired - Fee Related
-
1989
- 1989-05-09 US US07/349,229 patent/US5026162A/en not_active Expired - Fee Related
- 1989-05-10 EP EP89304753A patent/EP0342016B1/de not_active Expired - Lifetime
- 1989-05-10 DE DE89304753T patent/DE68907127T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE68907127D1 (de) | 1993-07-22 |
US5026162A (en) | 1991-06-25 |
GB8811027D0 (en) | 1988-06-15 |
GB2218505A (en) | 1989-11-15 |
GB2218505B (en) | 1992-02-19 |
EP0342016A3 (en) | 1990-10-24 |
EP0342016A2 (de) | 1989-11-15 |
EP0342016B1 (de) | 1993-06-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |