DE68907127T2 - Optische Positionsmessung. - Google Patents

Optische Positionsmessung.

Info

Publication number
DE68907127T2
DE68907127T2 DE89304753T DE68907127T DE68907127T2 DE 68907127 T2 DE68907127 T2 DE 68907127T2 DE 89304753 T DE89304753 T DE 89304753T DE 68907127 T DE68907127 T DE 68907127T DE 68907127 T2 DE68907127 T2 DE 68907127T2
Authority
DE
Germany
Prior art keywords
position measurement
optical position
optical
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89304753T
Other languages
English (en)
Other versions
DE68907127D1 (de
Inventor
Roger Martin Langdon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
General Electric Co
Original Assignee
General Electric Co PLC
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC, General Electric Co filed Critical General Electric Co PLC
Publication of DE68907127D1 publication Critical patent/DE68907127D1/de
Application granted granted Critical
Publication of DE68907127T2 publication Critical patent/DE68907127T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/78Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
    • G01S3/782Systems for determining direction or deviation from predetermined direction
DE89304753T 1988-05-10 1989-05-10 Optische Positionsmessung. Expired - Fee Related DE68907127T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8811027A GB2218505B (en) 1988-05-10 1988-05-10 Optical position measurement

Publications (2)

Publication Number Publication Date
DE68907127D1 DE68907127D1 (de) 1993-07-22
DE68907127T2 true DE68907127T2 (de) 1993-09-30

Family

ID=10636646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89304753T Expired - Fee Related DE68907127T2 (de) 1988-05-10 1989-05-10 Optische Positionsmessung.

Country Status (4)

Country Link
US (1) US5026162A (de)
EP (1) EP0342016B1 (de)
DE (1) DE68907127T2 (de)
GB (1) GB2218505B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215159B (en) * 1988-02-26 1992-10-14 James Donald Campbell Allan Detecting change in location of a moving source of electromagnetic radiation
US5200795A (en) * 1989-08-31 1993-04-06 The Board Of Trustees Of The Leland Stanford Junior University Passive quadrature phase detection system for coherent fiber optic systems
GB2236178B (en) * 1989-09-20 1993-09-01 Marconi Gec Ltd Monitoring arrangements
GB8921268D0 (en) * 1989-09-20 1990-04-25 Marconi Gec Ltd Orientation monitoring apparatus
DE59102268D1 (de) * 1991-05-24 1994-08-25 Heidenhain Gmbh Dr Johannes Vorrichtung zum Ein- und/oder Auskoppeln von Lichtstrahlen mit einem integriert-optischen Baustein.
JPH0560511A (ja) * 1991-09-02 1993-03-09 Mitsubishi Electric Corp ヘテロダイン干渉計
JP3302139B2 (ja) * 1993-10-27 2002-07-15 キヤノン株式会社 移動体の直進精度測定装置
US5900936A (en) * 1996-03-18 1999-05-04 Massachusetts Institute Of Technology Method and apparatus for detecting relative displacement using a light source
DE10242749A1 (de) * 2002-09-13 2004-04-08 Bergische Universität Wuppertal Dreidimensionales interferometrisches Positions-Messsystem
TWI354093B (en) * 2007-12-31 2011-12-11 Ind Tech Res Inst Dual-receiving ultrasonic distance measuring equip
US9291918B2 (en) * 2011-03-08 2016-03-22 Nikon Corporation Light source assembly that generates heterodyne output beams
WO2014095209A1 (en) * 2012-12-17 2014-06-26 Waterford Institute Of Technology Position detector
WO2020209855A1 (en) * 2019-04-11 2020-10-15 Hewlett-Packard Development Company, L.P. Three dimensional imaging

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3881105A (en) * 1969-12-05 1975-04-29 Philips Corp Apparatus for determining the position of an object in an arbitrary cross-section of a beam of radiation
NL7010130A (de) * 1970-07-09 1972-01-11
DE2240968A1 (de) * 1972-08-21 1974-03-07 Leitz Ernst Gmbh Optisches verfahren zur messung der relativen verschiebung eines beugungsgitters sowie einrichtungen zu seiner durchfuehrung
US4725146A (en) * 1983-09-30 1988-02-16 Novon, Inc. Method and apparatus for sensing position

Also Published As

Publication number Publication date
DE68907127D1 (de) 1993-07-22
US5026162A (en) 1991-06-25
GB8811027D0 (en) 1988-06-15
GB2218505A (en) 1989-11-15
GB2218505B (en) 1992-02-19
EP0342016A3 (en) 1990-10-24
EP0342016A2 (de) 1989-11-15
EP0342016B1 (de) 1993-06-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee