DE68918156D1 - Flache Kühlungsstruktur für integrierte Schaltung. - Google Patents

Flache Kühlungsstruktur für integrierte Schaltung.

Info

Publication number
DE68918156D1
DE68918156D1 DE68918156T DE68918156T DE68918156D1 DE 68918156 D1 DE68918156 D1 DE 68918156D1 DE 68918156 T DE68918156 T DE 68918156T DE 68918156 T DE68918156 T DE 68918156T DE 68918156 D1 DE68918156 D1 DE 68918156D1
Authority
DE
Germany
Prior art keywords
integrated circuit
cooling structure
flat cooling
flat
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68918156T
Other languages
English (en)
Other versions
DE68918156T2 (de
Inventor
Kazuhiko Umezawa
Jun Kubokawa
Toshiaki Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63113222A external-priority patent/JP2845447B2/ja
Priority claimed from JP15552388A external-priority patent/JPH0732220B2/ja
Priority claimed from JP63253540A external-priority patent/JP2793204B2/ja
Priority claimed from JP63253539A external-priority patent/JPH0732222B2/ja
Priority claimed from JP1058720A external-priority patent/JPH0724349B2/ja
Application filed by NEC Corp filed Critical NEC Corp
Publication of DE68918156D1 publication Critical patent/DE68918156D1/de
Application granted granted Critical
Publication of DE68918156T2 publication Critical patent/DE68918156T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • H01L23/4735—Jet impingement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
DE68918156T 1988-05-09 1989-05-08 Flache Kühlungsstruktur für integrierte Schaltung. Expired - Fee Related DE68918156T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP63113222A JP2845447B2 (ja) 1988-05-09 1988-05-09 集積回路の冷却構造
JP15552388A JPH0732220B2 (ja) 1988-06-22 1988-06-22 集積回路の冷却構造
JP63253540A JP2793204B2 (ja) 1988-10-06 1988-10-06 集積回路の冷却構造
JP63253539A JPH0732222B2 (ja) 1988-10-06 1988-10-06 集積回路の冷却構造
JP1058720A JPH0724349B2 (ja) 1989-03-10 1989-03-10 集積回路の冷却構造

Publications (2)

Publication Number Publication Date
DE68918156D1 true DE68918156D1 (de) 1994-10-20
DE68918156T2 DE68918156T2 (de) 1995-01-12

Family

ID=27523462

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68918156T Expired - Fee Related DE68918156T2 (de) 1988-05-09 1989-05-08 Flache Kühlungsstruktur für integrierte Schaltung.

Country Status (4)

Country Link
US (1) US5023695A (de)
EP (1) EP0341950B1 (de)
CA (1) CA1303238C (de)
DE (1) DE68918156T2 (de)

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Also Published As

Publication number Publication date
EP0341950A2 (de) 1989-11-15
US5023695A (en) 1991-06-11
EP0341950A3 (en) 1990-03-21
EP0341950B1 (de) 1994-09-14
DE68918156T2 (de) 1995-01-12
CA1303238C (en) 1992-06-09

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