DE68924065D1 - Vorrichtung und verfahren zur reinigung von wasserstofffluorid. - Google Patents

Vorrichtung und verfahren zur reinigung von wasserstofffluorid.

Info

Publication number
DE68924065D1
DE68924065D1 DE68924065T DE68924065T DE68924065D1 DE 68924065 D1 DE68924065 D1 DE 68924065D1 DE 68924065 T DE68924065 T DE 68924065T DE 68924065 T DE68924065 T DE 68924065T DE 68924065 D1 DE68924065 D1 DE 68924065D1
Authority
DE
Germany
Prior art keywords
acid
exchange material
anionic
cationic
predetermined level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68924065T
Other languages
English (en)
Other versions
DE68924065T2 (de
Inventor
John Davison
Chung-Tseng Hsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Athens Corp
Original Assignee
Athens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Athens Corp filed Critical Athens Corp
Publication of DE68924065D1 publication Critical patent/DE68924065D1/de
Application granted granted Critical
Publication of DE68924065T2 publication Critical patent/DE68924065T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C01B7/197—Separation; Purification by adsorption
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C01B7/197—Separation; Purification by adsorption
    • C01B7/198—Separation; Purification by adsorption by solid ion-exchangers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G49/00—Compounds of iron
    • C01G49/02—Oxides; Hydroxides
    • C01G49/08—Ferroso-ferric oxide (Fe3O4)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/902—Materials removed
    • Y10S210/915—Fluorine containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S423/00—Chemistry of inorganic compounds
    • Y10S423/09—Reaction techniques
    • Y10S423/14—Ion exchange; chelation or liquid/liquid ion extraction
DE68924065T 1988-05-20 1989-05-09 Vorrichtung und verfahren zur reinigung von wasserstofffluorid. Expired - Fee Related DE68924065T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/196,327 US4952386A (en) 1988-05-20 1988-05-20 Method and apparatus for purifying hydrogen fluoride
PCT/US1989/001978 WO1989011321A1 (en) 1988-05-20 1989-05-09 Method and apparatus for purifying hydrogen fluoride

Publications (2)

Publication Number Publication Date
DE68924065D1 true DE68924065D1 (de) 1995-10-05
DE68924065T2 DE68924065T2 (de) 1996-05-02

Family

ID=22724944

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68924065T Expired - Fee Related DE68924065T2 (de) 1988-05-20 1989-05-09 Vorrichtung und verfahren zur reinigung von wasserstofffluorid.

Country Status (6)

Country Link
US (1) US4952386A (de)
EP (1) EP0417194B1 (de)
JP (1) JPH03504374A (de)
AT (1) ATE127097T1 (de)
DE (1) DE68924065T2 (de)
WO (1) WO1989011321A1 (de)

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US5722442A (en) * 1994-01-07 1998-03-03 Startec Ventures, Inc. On-site generation of ultra-high-purity buffered-HF for semiconductor processing
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EP0836536A4 (de) * 1995-06-05 1999-12-15 Startec Ventures Inc Herstellung am ort von ultrahochreinem gepuffertem wasserstofffluorid für halbleiterbehandlung
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JP2002514968A (ja) * 1995-06-05 2002-05-21 スターテック・ベンチャーズ・インコーポレーテッド 半導体プロセス用超高純度過酸化水素のオンサイト生成
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US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6735498B2 (en) * 1999-05-11 2004-05-11 Kim Marie Hertz Automated newspaper rack inventory and alert management system
SG93879A1 (en) 1999-08-25 2003-01-21 Mykrolis Corp Filtration and purification system for aqueous acids
EP1216096A1 (de) * 1999-08-25 2002-06-26 Mykrolis Corporation System zur filtrierung und reinigung von ph-neutralen lösungen
KR100338322B1 (ko) * 1999-08-27 2002-05-27 문영환 반도체 제조공정에서 발생되는 불화수소 가스의 정화방법
US6325932B1 (en) * 1999-11-30 2001-12-04 Mykrolis Corporation Apparatus and method for pumping high viscosity fluid
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US7184857B1 (en) 2002-02-28 2007-02-27 Kim Marie Hertz Automated news rack inventory and alert management system
AU2003901583A0 (en) 2003-04-04 2003-05-01 Orica Australia Pty Ltd A process
JP3801187B2 (ja) * 2003-08-28 2006-07-26 セイコーエプソン株式会社 薬液再処理方法及び、蛍石の製造方法
US6998054B2 (en) * 2003-12-31 2006-02-14 The Boc Group, Inc. Selective fluoride and ammonia removal by chromatographic separation of wastewater
US7291272B2 (en) * 2004-05-07 2007-11-06 Orica Australia Pty Ltd. Inorganic contaminant removal from water
EP1776190B1 (de) 2004-07-28 2017-08-23 IXOM Operations Pty Ltd Pfropfenströmungsregenerationsverfahren
US8292598B2 (en) 2004-11-23 2012-10-23 Entegris, Inc. System and method for a variable home position dispense system
EP1952022B1 (de) 2005-11-21 2014-11-12 Entegris, Inc. System und verfahren für eine pumpe mit reduziertem formfaktor
US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US8025486B2 (en) 2005-12-02 2011-09-27 Entegris, Inc. System and method for valve sequencing in a pump
CN101356488B (zh) * 2005-12-02 2012-05-16 恩特格里公司 与泵控制器对接的i/o系统、方法和设备
JP5302002B2 (ja) * 2005-12-02 2013-10-02 インテグリス・インコーポレーテッド Ｏリング無し薄型取付部品および取付部品アセンブリ
CN102705209B (zh) * 2005-12-02 2015-09-30 恩特格里公司 用于泵中压力补偿的系统和方法
US20070128061A1 (en) * 2005-12-02 2007-06-07 Iraj Gashgaee Fixed volume valve system
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
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TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7684446B2 (en) * 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
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US7547421B2 (en) 2006-10-18 2009-06-16 Ecolab Inc. Apparatus and method for making a peroxycarboxylic acid
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WO2009110549A1 (ja) * 2008-03-07 2009-09-11 三井・デュポンフロロケミカル株式会社 電子部品の洗浄方法および洗浄システム
JPWO2009110548A1 (ja) * 2008-03-07 2011-07-14 三井・デュポンフロロケミカル株式会社 電子部品の洗浄方法および洗浄システム
TWI434725B (zh) * 2011-03-08 2014-04-21 Asia Union Electronical Chemical Corp 利用氫氧基化合物和離子交換樹脂吸附以純化氟酸系蝕刻液的處理方法
MX357878B (es) 2014-12-18 2018-07-27 Mexichem Fluor Sa De Capital Variable Proceso para la purificación del ácido fluorhídrico incluyendo la obtención del subproducto ácido arsenioso.
KR101701172B1 (ko) * 2015-02-17 2017-02-13 한국화학연구원 불화수소 흡착제 및 이를 이용한 불화수소의 선택적 제거방법
KR20200103636A (ko) * 2017-10-25 2020-09-02 디디피 스페셜티 일렉트로닉 머티리얼즈 유에스, 인크. 저나트륨 수지의 제조
CN111701397B (zh) * 2020-07-03 2021-12-21 攀钢集团攀枝花钢铁研究院有限公司 脱除有机胺脱硫溶液中硫酸根离子和氯离子及减少有机胺溶液损失的工艺
CN116161621B (zh) * 2023-04-23 2023-07-04 联仕(昆山)化学材料有限公司 一种电子级盐酸的提纯装置及其提纯工艺

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Also Published As

Publication number Publication date
ATE127097T1 (de) 1995-09-15
JPH03504374A (ja) 1991-09-26
DE68924065T2 (de) 1996-05-02
EP0417194A1 (de) 1991-03-20
EP0417194B1 (de) 1995-08-30
US4952386A (en) 1990-08-28
WO1989011321A1 (en) 1989-11-30
EP0417194A4 (en) 1991-07-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee