DE68925106D1 - Tunneleinheit und Rasterkopf für ein Tunnelrastermikroskop - Google Patents

Tunneleinheit und Rasterkopf für ein Tunnelrastermikroskop

Info

Publication number
DE68925106D1
DE68925106D1 DE68925106T DE68925106T DE68925106D1 DE 68925106 D1 DE68925106 D1 DE 68925106D1 DE 68925106 T DE68925106 T DE 68925106T DE 68925106 T DE68925106 T DE 68925106T DE 68925106 D1 DE68925106 D1 DE 68925106D1
Authority
DE
Germany
Prior art keywords
tunnel
scanning
unit
microscope
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68925106T
Other languages
English (en)
Other versions
DE68925106T2 (de
Inventor
Tadashi C O Lsi Kenky Nishioka
Takao C O Lsi Kenkyusho Yasue
Hiroshi C O Lsi Kenkyus Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1057809A external-priority patent/JP2501897B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE68925106D1 publication Critical patent/DE68925106D1/de
Application granted granted Critical
Publication of DE68925106T2 publication Critical patent/DE68925106T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE68925106T 1988-12-13 1989-06-20 Tunneleinheit und Rasterkopf für ein Tunnelrastermikroskop Expired - Fee Related DE68925106T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP31282588 1988-12-13
JP1057809A JP2501897B2 (ja) 1988-12-13 1989-03-13 走査型トンネル顕微鏡のトンネル・ユニット及びスキャン・ヘッド

Publications (2)

Publication Number Publication Date
DE68925106D1 true DE68925106D1 (de) 1996-01-25
DE68925106T2 DE68925106T2 (de) 1996-08-22

Family

ID=26398882

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68925106T Expired - Fee Related DE68925106T2 (de) 1988-12-13 1989-06-20 Tunneleinheit und Rasterkopf für ein Tunnelrastermikroskop

Country Status (3)

Country Link
US (1) US4947042A (de)
EP (1) EP0373742B1 (de)
DE (1) DE68925106T2 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02187944A (ja) * 1989-01-13 1990-07-24 Sharp Corp 再生装置
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
US5103095A (en) * 1990-05-23 1992-04-07 Digital Instruments, Inc. Scanning probe microscope employing adjustable tilt and unitary head
JP2501945B2 (ja) * 1990-08-28 1996-05-29 三菱電機株式会社 原子間力顕微鏡のカンチレバ―及びその製造方法
JPH0758193B2 (ja) * 1990-09-14 1995-06-21 三菱電機株式会社 原子間力顕微鏡の微動走査機構
JP2744346B2 (ja) * 1990-10-19 1998-04-28 キヤノン株式会社 情報記録ユニットと情報記録及び／又は再生装置と情報記録及び／又は再生方法と情報記録媒体
US5155361A (en) * 1991-07-26 1992-10-13 The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
US5317153A (en) * 1991-08-08 1994-05-31 Nikon Corporation Scanning probe microscope
JP2598851B2 (ja) * 1992-01-23 1997-04-09 松下電器産業株式会社 位置決め装置
US5291775A (en) * 1992-03-04 1994-03-08 Topometrix Scanning force microscope with integrated optics and cantilever mount
US5319960A (en) * 1992-03-06 1994-06-14 Topometrix Scanning force microscope
US5448399A (en) * 1992-03-13 1995-09-05 Park Scientific Instruments Optical system for scanning microscope
US5218262A (en) * 1992-04-06 1993-06-08 The Perkin-Elmer Corporation Apparatus for retaining an electrode by a magnetically shielded magnet
US5260577A (en) * 1992-11-09 1993-11-09 International Business Machines Corp. Sample carriage for scanning probe microscope
JPH07122218A (ja) * 1993-10-26 1995-05-12 Ryoden Semiconductor Syst Eng Kk 走査プローブ顕微鏡ヘッドの試料台
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5513518A (en) * 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5808302A (en) * 1994-08-27 1998-09-15 International Business Machines Corporation Fine positioning apparatus with atomic resolution
US5675154A (en) * 1995-02-10 1997-10-07 Molecular Imaging Corporation Scanning probe microscope
US5621210A (en) * 1995-02-10 1997-04-15 Molecular Imaging Corporation Microscope for force and tunneling microscopy in liquids
US5750989A (en) * 1995-02-10 1998-05-12 Molecular Imaging Corporation Scanning probe microscope for use in fluids
US5569918A (en) * 1995-03-17 1996-10-29 Rhk Technology, Inc. Probe holder and probe mounting method for a scanning probe microscope
US5654546A (en) * 1995-11-07 1997-08-05 Molecular Imaging Corporation Variable temperature scanning probe microscope based on a peltier device
US5821545A (en) * 1995-11-07 1998-10-13 Molecular Imaging Corporation Heated stage for a scanning probe microscope
JP3390318B2 (ja) * 1996-02-13 2003-03-24 セイコーインスツルメンツ株式会社 微小位置決め機構及びそれを用いた走査型プローブ顕微鏡及び微小領域加工機
US6076397A (en) * 1997-12-01 2000-06-20 International Business Machines Corporation Positioning apparatus
JP3788573B2 (ja) * 2000-11-16 2006-06-21 信越化学工業株式会社 Ｍｒｉ用磁気回路の組立方法
JP5728162B2 (ja) * 2010-03-30 2015-06-03 株式会社メルビル 試料ホルダー、及び試料駆動装置
CN105092899B (zh) * 2015-08-25 2018-06-29 中国科学院物理研究所 一种支架定位装置
CN105791621B (zh) * 2016-04-29 2018-08-31 安徽宝葫芦信息科技集团股份有限公司 一种文档扫描机的扫描头快速固定装置
AT519344B1 (de) * 2016-10-18 2019-11-15 Anton Paar Gmbh Definiert schaltbare magnetische Haltevorrichtung
CN109863638B (zh) * 2017-07-11 2022-03-04 株式会社Lg化学 用于二次电池测试的固定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE68916667T2 (de) * 1988-03-04 1995-01-12 Toshiba Kawasaki Kk Mikroskop.
JP2572107B2 (ja) * 1988-04-04 1997-01-16 三菱電機株式会社 走査型トンネル顕微鏡の粗動機構

Also Published As

Publication number Publication date
DE68925106T2 (de) 1996-08-22
EP0373742A2 (de) 1990-06-20
EP0373742A3 (de) 1991-10-02
US4947042A (en) 1990-08-07
EP0373742B1 (de) 1995-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee