DE68926363D1 - Vorrichtung zur Aufnahme thermischer Bilder - Google Patents

Vorrichtung zur Aufnahme thermischer Bilder

Info

Publication number
DE68926363D1
DE68926363D1 DE68926363T DE68926363T DE68926363D1 DE 68926363 D1 DE68926363 D1 DE 68926363D1 DE 68926363 T DE68926363 T DE 68926363T DE 68926363 T DE68926363 T DE 68926363T DE 68926363 D1 DE68926363 D1 DE 68926363D1
Authority
DE
Germany
Prior art keywords
patches
imaging device
thermal imaging
pillars
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68926363T
Other languages
English (en)
Other versions
DE68926363T2 (de
Inventor
Roger Voles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Optronics Staines Ltd
Original Assignee
Thales Optronics Staines Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Optronics Staines Ltd filed Critical Thales Optronics Staines Ltd
Application granted granted Critical
Publication of DE68926363D1 publication Critical patent/DE68926363D1/de
Publication of DE68926363T2 publication Critical patent/DE68926363T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
DE68926363T 1988-06-01 1989-05-31 Vorrichtung zur Aufnahme thermischer Bilder Expired - Fee Related DE68926363T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB888812957A GB8812957D0 (en) 1988-06-01 1988-06-01 Thermal imaging

Publications (2)

Publication Number Publication Date
DE68926363D1 true DE68926363D1 (de) 1996-06-05
DE68926363T2 DE68926363T2 (de) 1996-11-28

Family

ID=10637883

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68926363T Expired - Fee Related DE68926363T2 (de) 1988-06-01 1989-05-31 Vorrichtung zur Aufnahme thermischer Bilder

Country Status (7)

Country Link
US (1) US4996428A (de)
EP (1) EP0345049B1 (de)
JP (1) JP2806972B2 (de)
AT (1) ATE137610T1 (de)
CA (1) CA1323903C (de)
DE (1) DE68926363T2 (de)
GB (1) GB8812957D0 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9009117D0 (en) * 1990-04-24 1990-08-08 Emi Plc Thorn Pyroelectric detector and method of manufacturing the same
GB2274543A (en) * 1993-01-21 1994-07-27 Central Research Lab Ltd Infrared detector
JPH07286894A (ja) * 1994-04-18 1995-10-31 Fujitsu Ltd 赤外線検知装置の製造方法
US10651095B2 (en) * 2016-08-11 2020-05-12 Applied Materials, Inc. Thermal profile monitoring wafer and methods of monitoring temperature

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2035685B (en) * 1978-10-28 1983-05-05 Plessey Co Ltd Pyroelectric detectors
JPS5932828A (ja) * 1982-08-18 1984-02-22 Matsushita Electric Ind Co Ltd 赤外線検出素子
US4737642A (en) * 1983-04-21 1988-04-12 Licentia Patent-Verwaltungs-Gmbh Arrangement for multispectral imaging of objects, preferably targets
US4593456A (en) * 1983-04-25 1986-06-10 Rockwell International Corporation Pyroelectric thermal detector array
JPS60119426A (ja) * 1983-12-01 1985-06-26 Murata Mfg Co Ltd 薄膜型焦電センサアレイ
GB2163596B (en) * 1984-08-24 1988-02-03 Philips Electronic Associated A thermal imaging device and a method of manufacturing a thermal imaging device
JPS6166129A (ja) * 1984-09-07 1986-04-04 Murata Mfg Co Ltd 焦電型赤外線センサアレイ
US4701618A (en) * 1985-05-28 1987-10-20 Galileo Electro-Optics Corp. Middle-infrared imaging device
JPS62119422A (ja) * 1985-11-20 1987-05-30 Matsushita Electric Ind Co Ltd ２次元アレイ焦電形赤外センサ
US4754139A (en) * 1986-04-10 1988-06-28 Aerojet-General Corporation Uncooled high resolution infrared imaging plane

Also Published As

Publication number Publication date
US4996428A (en) 1991-02-26
ATE137610T1 (de) 1996-05-15
EP0345049A3 (en) 1990-10-03
EP0345049B1 (de) 1996-05-01
JP2806972B2 (ja) 1998-09-30
DE68926363T2 (de) 1996-11-28
EP0345049A2 (de) 1989-12-06
GB8812957D0 (en) 1988-10-05
JPH02236129A (ja) 1990-09-19
CA1323903C (en) 1993-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee