DE69000227D1 - Verfahren und vorrichtung zum detektieren und messen einer physikalischen groesse. - Google Patents

Verfahren und vorrichtung zum detektieren und messen einer physikalischen groesse.

Info

Publication number
DE69000227D1
DE69000227D1 DE9090400407T DE69000227T DE69000227D1 DE 69000227 D1 DE69000227 D1 DE 69000227D1 DE 9090400407 T DE9090400407 T DE 9090400407T DE 69000227 T DE69000227 T DE 69000227T DE 69000227 D1 DE69000227 D1 DE 69000227D1
Authority
DE
Germany
Prior art keywords
pct
measuring
sec
magnitude
date
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9090400407T
Other languages
English (en)
Other versions
DE69000227T2 (de
Inventor
Rene Lequime
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bertin Technologies SAS
Original Assignee
Bertin et Cie SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bertin et Cie SA filed Critical Bertin et Cie SA
Application granted granted Critical
Publication of DE69000227D1 publication Critical patent/DE69000227D1/de
Publication of DE69000227T2 publication Critical patent/DE69000227T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
DE9090400407T 1989-02-14 1990-02-14 Verfahren und vorrichtung zum detektieren und messen einer physikalischen groesse. Expired - Fee Related DE69000227T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8901900A FR2643145A1 (fr) 1989-02-14 1989-02-14 Procede et dispositif de detection et de mesure d'une grandeur physique

Publications (2)

Publication Number Publication Date
DE69000227D1 true DE69000227D1 (de) 1992-09-03
DE69000227T2 DE69000227T2 (de) 1993-03-18

Family

ID=9378771

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9090400407T Expired - Fee Related DE69000227T2 (de) 1989-02-14 1990-02-14 Verfahren und vorrichtung zum detektieren und messen einer physikalischen groesse.

Country Status (12)

Country Link
US (1) US5200796A (de)
EP (1) EP0387115B1 (de)
JP (1) JPH03504047A (de)
KR (1) KR910700445A (de)
AT (1) ATE78917T1 (de)
BR (1) BR9005186A (de)
DE (1) DE69000227T2 (de)
DK (1) DK0387115T3 (de)
ES (1) ES2034824T3 (de)
FR (1) FR2643145A1 (de)
GR (1) GR3006035T3 (de)
WO (1) WO1990009564A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2673023B1 (fr) * 1991-02-14 1993-06-11 Bertin & Cie Recepteur de demultiplexage sequentiel pour un reseau de capteurs optiques a codage de modulation spectrale.
DE69206654T2 (de) * 1991-03-26 1996-07-11 Hamamatsu Photonics Kk Optischer Spannungsdetektor
GB2258725B (en) * 1991-07-30 1995-06-21 Rosemount Ltd A method of decoding a spectrally modulated light signal
US5485268A (en) * 1993-03-18 1996-01-16 Tobias; Reginald Multiplex spectroscopy
US5483335A (en) * 1993-03-18 1996-01-09 Tobias; Reginald Multiplex spectroscopy
DE4314535C2 (de) * 1993-05-03 1997-05-07 Sick Ag Inferferometrisches Gaskomponenten-Meßgerät
GB9401459D0 (en) * 1994-01-26 1994-03-23 Secr Defence Method and apparatus for measurement of unsteady gas temperatures
US5465859A (en) * 1994-04-28 1995-11-14 International Business Machines Corporation Dual phase and hybrid phase shifting mask fabrication using a surface etch monitoring technique
CA2122782C (en) * 1994-05-03 1999-07-27 Wojtek J. Bock Apparatus for measuring an ambient physical parameter applied to a highly birefringent sensing fiber and method
JPH08247858A (ja) * 1995-03-07 1996-09-27 Toshiba Corp 光温度分布センサ及び温度分布測定方法
DE10027533C1 (de) * 2000-06-02 2001-11-15 Ufz Leipzighalle Gmbh Verfahren und Anordnung zur mehrkanaligen Messung von Temperaturen mittels optischer Detektion der energetischen Bandlücke von Festkörpern
US6842254B2 (en) * 2002-10-16 2005-01-11 Fiso Technologies Inc. System and method for measuring an optical path difference in a sensing interferometer
US7559701B2 (en) 2007-03-19 2009-07-14 General Electric Company High-temperature pressure sensor and method of assembly
US8223334B1 (en) * 2008-09-26 2012-07-17 J.A. Woollam Co., Inc. Method of improving ellipsometric and the like data
US8659820B1 (en) * 2011-06-17 2014-02-25 L-3 Communications Spectral sensing demodulator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
GB8320107D0 (en) * 1983-07-26 1983-08-24 Barr & Stroud Ltd Optical monitoring apparatus
US4770535A (en) * 1985-02-08 1988-09-13 The Board Of Trustees Of The Leland Stanford Junior University Distributed sensor array and method using a pulsed signal source
FR2595820B1 (fr) * 1986-03-13 1990-01-05 Bertin & Cie Dispositif a fibres optiques pour la detection a distance d'une grandeur physique, en particulier de la temperature
DE3623265C2 (de) * 1986-07-10 1994-11-03 Siemens Ag Verfahren und Anordnung zur faseroptischen Messung einer Weglänge oder einer Weglängenänderung

Also Published As

Publication number Publication date
DE69000227T2 (de) 1993-03-18
ES2034824T3 (es) 1993-04-01
DK0387115T3 (da) 1992-11-02
JPH03504047A (ja) 1991-09-05
GR3006035T3 (de) 1993-06-21
KR910700445A (ko) 1991-03-15
FR2643145A1 (fr) 1990-08-17
ATE78917T1 (de) 1992-08-15
BR9005186A (pt) 1991-08-06
EP0387115A1 (de) 1990-09-12
WO1990009564A1 (fr) 1990-08-23
EP0387115B1 (de) 1992-07-29
US5200796A (en) 1993-04-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee