DE69010218D1 - Ultraschneller elektro-dynamischer x, y und theta positionierungstisch. - Google Patents

Ultraschneller elektro-dynamischer x, y und theta positionierungstisch.

Info

Publication number
DE69010218D1
DE69010218D1 DE69010218T DE69010218T DE69010218D1 DE 69010218 D1 DE69010218 D1 DE 69010218D1 DE 69010218 T DE69010218 T DE 69010218T DE 69010218 T DE69010218 T DE 69010218T DE 69010218 D1 DE69010218 D1 DE 69010218D1
Authority
DE
Germany
Prior art keywords
ultra
dynamic
positioning table
fast electro
theta positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69010218T
Other languages
English (en)
Other versions
DE69010218T2 (de
Inventor
Ralph Hollis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69010218D1 publication Critical patent/DE69010218D1/de
Publication of DE69010218T2 publication Critical patent/DE69010218T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70766—Reaction force control means, e.g. countermass
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70816—Bearings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/035—DC motors; Unipolar motors
    • H02K41/0352—Unipolar motors
    • H02K41/0354—Lorentz force motors, e.g. voice coil motors
    • H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D2007/0012—Details, accessories or auxiliary or special operations not otherwise provided for
    • B26D2007/0043—Details, accessories or auxiliary or special operations not otherwise provided for the cutting machine comprising a linear motor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
DE69010218T 1990-04-06 1990-09-28 Ultraschneller elektro-dynamischer x, y und theta positionierungstisch. Expired - Fee Related DE69010218T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/513,749 US5153494A (en) 1990-04-06 1990-04-06 Ultrafast electro-dynamic x, y and theta positioning stage
PCT/US1990/005563 WO1991015333A2 (en) 1990-04-06 1990-09-28 Ultrafast electro-dynamic x, y and theta positioning stage

Publications (2)

Publication Number Publication Date
DE69010218D1 true DE69010218D1 (de) 1994-07-28
DE69010218T2 DE69010218T2 (de) 1995-02-09

Family

ID=24044536

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69010218T Expired - Fee Related DE69010218T2 (de) 1990-04-06 1990-09-28 Ultraschneller elektro-dynamischer x, y und theta positionierungstisch.

Country Status (5)

Country Link
US (1) US5153494A (de)
EP (1) EP0523042B1 (de)
JP (1) JP2528552B2 (de)
DE (1) DE69010218T2 (de)
WO (1) WO1991015333A2 (de)

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JPH06183561A (ja) * 1992-12-18 1994-07-05 Canon Inc 移動ステージ装置
JPH0737786A (ja) * 1993-07-21 1995-02-07 Canon Inc ステージ位置決め制御方法
DE4436865A1 (de) * 1994-10-17 1996-08-08 Pasim Mikrosystemtechnik Gmbh Modularer Planarläufer und Verfahren zu seiner Herstellung
US5548195A (en) * 1994-12-22 1996-08-20 International Business Machines Corporation Compensated servo control stage positioning apparatus
JPH08194162A (ja) * 1995-01-17 1996-07-30 Nikon Corp ステージの駆動装置
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
DE19535438A1 (de) * 1995-09-23 1997-03-27 Rovema Gmbh Vorrichtung zum Bewegen mindestens eines Bauteils oder eines sonstigen Gegenstandes
JPH11191585A (ja) * 1997-12-26 1999-07-13 Canon Inc ステージ装置、およびこれを用いた露光装置、ならびにデバイス製造方法
JPH11211732A (ja) * 1998-01-27 1999-08-06 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡
US6130517A (en) * 1998-02-12 2000-10-10 Nikon Corporation Magnetic actuator producing large acceleration on fine stage and low RMS power gain
US6320345B1 (en) 1998-03-05 2001-11-20 Nikon Corporation Command trajectory for driving a stage with minimal vibration
US6008610A (en) * 1998-03-20 1999-12-28 Nikon Corporation Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
US6260282B1 (en) 1998-03-27 2001-07-17 Nikon Corporation Stage control with reduced synchronization error and settling time
US6144118A (en) 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6703724B1 (en) * 1998-11-13 2004-03-09 Merlex Corporation Pty Limited Electric machine
US20040222708A1 (en) * 1998-11-13 2004-11-11 Barry Reginald Hobson Electric oscillatory machine
TW439116B (en) * 1998-12-16 2001-06-07 Nippon Kogaku Kk Platen motor device and assembly method thereof, platen motor device driving method, stage device and driving method thereof, exposure device and method thereof, and device and production method thereof
US6323494B1 (en) 1999-04-09 2001-11-27 Nikon Corporation Vertical direction force transducer
US6144119A (en) * 1999-06-18 2000-11-07 Nikon Corporation Planar electric motor with dual coil and magnet arrays
DE10019226B4 (de) * 2000-04-18 2010-03-18 Physik Instrumente (Pi) Gmbh & Co Elektromechanischer Linearantrieb mit Momentenkompensation
US6405659B1 (en) 2000-05-01 2002-06-18 Nikon Corporation Monolithic stage
US6515381B1 (en) * 2000-09-13 2003-02-04 Nikon Corporation Cantilever stage
JP4288694B2 (ja) * 2001-12-20 2009-07-01 株式会社ニコン 基板保持装置、露光装置及びデバイス製造方法
US6776042B2 (en) 2002-01-25 2004-08-17 Kinemetrics, Inc. Micro-machined accelerometer
US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
US6888289B2 (en) * 2002-07-16 2005-05-03 Baldor Electric Company Multi-axes, sub-micron positioner
EP1548819A4 (de) 2002-07-30 2007-05-02 Tamura Seisakusho Kk Präzisionsverarbeitungsstufenvorrichtung
US7057370B2 (en) * 2003-06-21 2006-06-06 Igor Victorovich Touzov Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector
DE102004057062B4 (de) * 2004-11-25 2012-06-14 Technische Universität Dresden Lineardirektantriebsanordnung und Verfahren zu seiner Regelung
JP4498285B2 (ja) * 2006-02-01 2010-07-07 キヤノン株式会社 走査型プローブ装置
JP4378385B2 (ja) 2006-05-17 2009-12-02 キヤノン株式会社 走査型プローブ装置における駆動ステージ、走査型プローブ装置
US8267388B2 (en) * 2007-09-12 2012-09-18 Xradia, Inc. Alignment assembly
KR100979539B1 (ko) * 2010-01-29 2010-09-02 아주대학교산학협력단 평면 3자유도 스테이지
DE102012101979B4 (de) * 2012-03-08 2018-02-15 Technische Universität Dresden Verfahren und Vorrichtung zur Erzeugung einer Relativbewegung
US9052250B1 (en) * 2012-05-04 2015-06-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of calibrating a force balance
CN103066894B (zh) * 2012-12-12 2015-05-20 清华大学 一种六自由度磁悬浮工件台
CN108000176A (zh) * 2018-01-12 2018-05-08 西南石油大学 一种六自由度并联机床
CN111239777B (zh) * 2020-01-07 2023-07-25 哈尔滨工业大学 一种基于位置指纹的卫星集群分级定位方法

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Also Published As

Publication number Publication date
EP0523042B1 (de) 1994-06-22
WO1991015333A3 (en) 1992-02-20
DE69010218T2 (de) 1995-02-09
US5153494A (en) 1992-10-06
JPH05504100A (ja) 1993-07-01
JP2528552B2 (ja) 1996-08-28
WO1991015333A2 (en) 1991-10-17
EP0523042A1 (de) 1993-01-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee