DE69016198D1 - Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit. - Google Patents

Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.

Info

Publication number
DE69016198D1
DE69016198D1 DE69016198T DE69016198T DE69016198D1 DE 69016198 D1 DE69016198 D1 DE 69016198D1 DE 69016198 T DE69016198 T DE 69016198T DE 69016198 T DE69016198 T DE 69016198T DE 69016198 D1 DE69016198 D1 DE 69016198D1
Authority
DE
Germany
Prior art keywords
stage
order
unit
pumping
sec
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69016198T
Other languages
English (en)
Other versions
DE69016198T2 (de
Inventor
Gilles Baret
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8205734&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69016198(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of DE69016198D1 publication Critical patent/DE69016198D1/de
Publication of DE69016198T2 publication Critical patent/DE69016198T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
DE69016198T 1990-07-06 1990-07-06 Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit. Revoked DE69016198T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90401965A EP0464292B1 (de) 1990-07-06 1990-07-06 Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit

Publications (2)

Publication Number Publication Date
DE69016198D1 true DE69016198D1 (de) 1995-03-02
DE69016198T2 DE69016198T2 (de) 1995-05-18

Family

ID=8205734

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69016198T Revoked DE69016198T2 (de) 1990-07-06 1990-07-06 Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.

Country Status (5)

Country Link
US (1) US5116196A (de)
EP (1) EP0464292B1 (de)
AT (1) ATE117410T1 (de)
DE (1) DE69016198T2 (de)
ES (1) ES2069713T3 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2681688B1 (fr) * 1991-09-24 1993-11-19 Alcatel Cit Installation de detection de fuites de gaz utilisant la technique de reniflage.
DE4228149A1 (de) * 1992-08-25 1994-03-03 Leybold Ag Vakuum-Meßgerät für die integrale Dichtigkeitskontrolle mit leichten Gasen
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5526678A (en) * 1994-08-10 1996-06-18 Chicago Bridge & Iron Technical Services Company Time of flight measurement/rate of rise measurement method for remote leak detection in evacuated spaces
FR2728072B1 (fr) 1994-12-07 1997-01-10 Cit Alcatel Detecteur de fuite
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2784184B1 (fr) 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
FR2787192B1 (fr) * 1998-12-10 2001-01-05 Cit Alcatel Vitesse variable sur le pompage primaire d'un detecteur de fuites par gaz traceur
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US8673394B2 (en) * 2008-05-20 2014-03-18 Sundew Technologies Llc Deposition method and apparatus
DE102009011082A1 (de) 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
EP2650544B1 (de) * 2010-12-10 2020-06-03 Edwards Japan Limited Vakuumpumpe
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN106872119B (zh) * 2015-12-12 2018-10-26 中国科学院大连化学物理研究所 采集焚烧烟气中持续有机污染物装置密封性的自检方法
GB2601313A (en) * 2020-11-25 2022-06-01 Edwards Ltd Drag pumping mechanism for a turbomolecular pump

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE910204C (de) * 1950-04-12 1954-04-29 Philips Nv Hochvakuummolekularpumpe
DE1648648C3 (de) * 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3616680A (en) * 1969-10-27 1971-11-02 Sargent Welch Scientific Co Leak detector
FR2475728A1 (fr) * 1980-02-11 1981-08-14 Cit Alcatel Detecteur de fuites a helium
JPS57169647A (en) * 1981-04-13 1982-10-19 Ulvac Corp He reverse diffusion type leakage detector using turbo molecular pump
DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
JPS5948630A (ja) * 1982-09-13 1984-03-19 Shimadzu Corp リ−クデテクタ
FR2604522B1 (fr) * 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
DE3865012D1 (de) * 1988-06-01 1991-10-24 Leybold Ag Pumpsystem fuer ein lecksuchgeraet.
DE3828588C1 (de) * 1988-08-23 1989-12-07 Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De

Also Published As

Publication number Publication date
ES2069713T3 (es) 1995-05-16
DE69016198T2 (de) 1995-05-18
EP0464292A1 (de) 1992-01-08
US5116196A (en) 1992-05-26
EP0464292B1 (de) 1995-01-18
ATE117410T1 (de) 1995-02-15

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation